JPS61125044U - - Google Patents

Info

Publication number
JPS61125044U
JPS61125044U JP899185U JP899185U JPS61125044U JP S61125044 U JPS61125044 U JP S61125044U JP 899185 U JP899185 U JP 899185U JP 899185 U JP899185 U JP 899185U JP S61125044 U JPS61125044 U JP S61125044U
Authority
JP
Japan
Prior art keywords
reaction chamber
light source
substrate
focal point
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP899185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP899185U priority Critical patent/JPS61125044U/ja
Publication of JPS61125044U publication Critical patent/JPS61125044U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP899185U 1985-01-25 1985-01-25 Pending JPS61125044U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP899185U JPS61125044U (enExample) 1985-01-25 1985-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP899185U JPS61125044U (enExample) 1985-01-25 1985-01-25

Publications (1)

Publication Number Publication Date
JPS61125044U true JPS61125044U (enExample) 1986-08-06

Family

ID=30488784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP899185U Pending JPS61125044U (enExample) 1985-01-25 1985-01-25

Country Status (1)

Country Link
JP (1) JPS61125044U (enExample)

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