JPS61125044U - - Google Patents
Info
- Publication number
- JPS61125044U JPS61125044U JP899185U JP899185U JPS61125044U JP S61125044 U JPS61125044 U JP S61125044U JP 899185 U JP899185 U JP 899185U JP 899185 U JP899185 U JP 899185U JP S61125044 U JPS61125044 U JP S61125044U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- light source
- substrate
- focal point
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 230000001443 photoexcitation Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を示した光ＣＶＤ装
置の概略図、第２図はその一部構成図、第３図は
従来の光励起プロセス装置の一例として示した光
ＣＶＤ装置の該略図である。
１０：反応室、１１：窓、１２：排気口、１３
：排気手段、１４：プロセスガス導入口、１５：
プロセスガス供給手段、１６：基板ステージ、１
７：モータ、１８Ａ，１８Ｂ，１８Ｃ，………：
基板、１９：紫外線ランプ、２０：反射鏡。
FIG. 1 is a schematic diagram of a photo-CVD device showing an embodiment of the present invention, FIG. 2 is a partial configuration diagram thereof, and FIG. 3 is a schematic diagram of a photo-CVD device shown as an example of a conventional photo-excitation process device. It is. 10: Reaction chamber, 11: Window, 12: Exhaust port, 13
: Exhaust means, 14: Process gas inlet, 15:
Process gas supply means, 16: Substrate stage, 1
7: Motor, 18A, 18B, 18C, ......:
Substrate, 19: Ultraviolet lamp, 20: Reflector.
Claims (1)
つて、該反応室内で該ガスを光励起させ、該反応
室内に配置された基板の表面を化学的処理する装
置において、断面が楕円の一部の形状を成したド
ーム状の反射鏡の一方の焦点に、柱状の光源を配
置し、他方の焦点に基板を配置し、該基板、又は
前記光源と反射鏡を該光源の長手方向に直角な方
向に移動可能に成した事を特徴とする光励起プロ
セス装置。 In an apparatus for chemically treating the surface of a substrate placed in a reaction chamber by introducing a process gas and light into the reaction chamber to optically excite the gas in the reaction chamber, the cross section is a part of an ellipse. A columnar light source is arranged at one focal point of a dome-shaped reflecting mirror, a substrate is arranged at the other focal point, and the substrate, or the light source and the reflecting mirror are arranged in a direction perpendicular to the longitudinal direction of the light source. A photoexcitation process device characterized in that it is movable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP899185U JPS61125044U (en) | 1985-01-25 | 1985-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP899185U JPS61125044U (en) | 1985-01-25 | 1985-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125044U true JPS61125044U (en) | 1986-08-06 |
Family
ID=30488784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP899185U Pending JPS61125044U (en) | 1985-01-25 | 1985-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125044U (en) |
-
1985
- 1985-01-25 JP JP899185U patent/JPS61125044U/ja active Pending
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