JPS61124186A - Gas laser generator - Google Patents

Abstract

PURPOSE:To uniformly distribute laser gas flow and to produce a stable output by disposing a plurality of blowers in a cooling passage communicating with a discharger, providing a partition plate between the blowers, and preventing the blowing air of blower from canceling by the blowing power of the adjacent blower. CONSTITUTION:Mixture gas 7 is cooled by a heat exchanger 10 disposed in a gas flow passage. It is fed by three blowers 11 to a discharger 2. The output units 12 of the blowers 11 are provided with partition plates 13, which are provided at adjacent portions of the blowers. WIth this structure, when the blowers 11A-11C are rotated in the same direction, the gas 7 generates turbulent flow 15. The central turbulent flow 15A and the adjacent turbulent flow 15B cancel each other in adjacent space 14, but the cancel is prevented by providing the partition plate. Thus, uniform and stably mixture gas 8 can be supplied in large quantity to the discharger 2, thereby improving the stability of the laser light output.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a gas laser generator with an improved gas flow path.

[Background of the invention]

In general, a laser generator needs to efficiently extract laser light from a gas excitation space caused by glow discharge. In an orthogonal laser device, since the discharge direction and the laser gas flow direction are perpendicular to each other, non-uniformity and instability in the gas flow velocity are one of the causes of worsening the glow discharge state. For this purpose, an air conditioner with a high air conditioning effect, such as a wire mesh made of fine mesh, such as that disclosed in Japanese Utility Model Publication No. 57-54297, has been installed at the inlet of the discharge section. However, as the need for higher output and smaller size laser devices increases, it has become necessary to operate small blowers in parallel, and a gas flow path structure that has a mutual air-straightening effect for each blower has become necessary.

[Purpose of the invention]

An object of the present invention is to provide a laser device that obtains a stable output by making the flow distribution of the laser gas blown to the discharge part uniform when a plurality of blowers are operated in parallel and stabilizing the glow discharge. .

[Summary of the invention]

In the gas laser device of the present invention, a plurality of blowers are arranged in a cooling path communicating with a discharge part, a partition plate is provided between the blowers, and the blowing force of the blower is canceled by the blowing force of an adjacent blower. The goal is to prevent

[Embodiments of the invention]

Embodiments of the present invention will be described below using a gas laser generator 1 shown in FIGS. 1 to 3.

The gas laser generator 1 is composed of a laser generator main body 2 and a gas flow passage 3. The laser generator main body 2 has mirrors 4A and 4B at both ends, and a cathode 5 and an anode 6 between the mirrors. Gas 7 circulates through laser generator body 2 . When a glow discharge 8 is performed between the cathode 5 and the anode 6, a part of the mixed gas 7 is excited and the generated laser light 9 is amplified between the mirrors and is emitted from one mirror 4.
Irradiate the outside from A. The mixed gas 7 is loosened by the glow discharge 8 and is sent to the gas flow path 3.

The mixed gas 7 is cooled by a heat exchanger 10 disposed within the gas flow path, and sent to the discharge section 2 by three blowers 11. The output section 12 of each blower 11 is provided with a partition plate 13. The partition plate 13 is provided adjacent to each blower.

If each of the blowers IIA to 11C is rotated in the same direction in this configuration, the mixed gas 7 generates a swirling flow 13, as shown in FIG. The central swirling flow 13A and the adjacent swirling flow 13B cancel each other out in the adjacent space 14, but in the present invention, the partition plate 13 is provided to prevent cancellation. As a result, a large amount of uniform and stable mixed gas 7 can be supplied to the discharge section 2, so that the laser light output can be stabilized and improved. Furthermore, since the gas flow can be made uniform with a simple structure in which partition plates are provided, there is no need for a complicated rectifying device using a conventional honeycomb. Furthermore, the amount of mixed gas blown using a plurality of blowers can be increased.

Although the above description has been made of an orthogonal laser generator in which the directions of the gas flow, discharge, and laser light are perpendicular to each other, an axial laser generator in which the directions of the gas flow, the discharge, and the laser beam are in the same direction can also be used.

〔Effect of the invention〕

As described above, according to the gas laser device of the present invention, a uniform and stable mixed gas can be supplied to the discharge section, so that the laser output can be improved.

[Brief explanation of drawings]

FIG. 1 shows the gas laser generator of the present invention, and the I-
2 is a perspective view of the gas laser generator of the present invention, and FIG. 3 is a sectional view taken along line DI-1 in FIG. 2. 2... Laser generator main body, 3... Gas flow path, 4
A.

Claims (1)

[Claims] 1. A blower is placed in the laser generator main body that excites the mixed gas by performing glow discharge and irradiates the generated laser light to the outside, and in the gas flow path that communicates with the laser generator main body. In a device that is driven to circulate a mixed gas between a laser generator main body and a gas flow path, a plurality of blowers are arranged in the gas flow path, and a partition plate is provided on the output side where each blower is adjacent. Characteristic gas laser generator.