JPS59136983A - Generator for gas laser - Google Patents

Abstract

PURPOSE:To increase a laser output by mounting a first communicating port for one blower on the other blower side from the outer circumferential end of the blower and installing a second communicating port for the other blower on the first communicating port side from the outer circumferential end of the blower on the opposite side to the first communicating port. CONSTITUTION:With centrifugal blowers 24, 25, fans 28 are mounted to output shafts 27 for driving motors 26, and they are encased in blower cases 29A, 29B. Suction pipes 30 are projected to upper surfaces and discharge pipes 31A, 31B to the outer circumferential sides respectively in the cases 29A, 29B, and one discharge pipe 31A and the other discharge pipe 31B are drawn out mutually of the reverse sides through inclined planes 32, and arranged oppositely. Consequently, the length size (L) of a cooling system 14A on the discharge pipe 31A side and a cooling system 14B of the discharge pipe 31B can be equalized. As a result, a mixed gas 4 is circulated and cooled in the directions of arrows when both centrifugal blowers 24, 25 are driven. The quantity of ventilation and velocity of flow of the mixed gas 4 are fed uniformly to both discharge pipes 2, 3 from one cooling system 14A and the other cooling system 14B at that time. Accordingly, both discharge pipes can maintain equal glow discharge, and a laser optical output is not lowered.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a gas laser generator with an improved arrangement of a blower.

[Prior art]

Generally, a gas laser generator supplies a mixed gas such as COz, N2, H"k into a narrow growth tube, and
Seikoku is placed. A glow discharge is generated between the electrodes to excite the mixed gas, creating a population inversion pattern and generating laser light. The laser light is amplified between the output mirrors and total reflection mirrors at both ends of the discharge tube, and is extracted from the output mirrors. In order to improve the quality of laser light and obtain high output, we have improved the gas laser generator as follows. That is, since laser light has some irregularities, it is generally desirable to use a laser light having Gaussian distribution characteristics. A laser beam having Gaussian distribution characteristics is a characteristic in which the energy of the laser beam is strongest at the center of the laser beam, and the energy of the laser beam gradually decreases from the center toward the outer periphery.・In order to obtain a laser beam with this characteristic, connect 111 rows of temporary radiating parts to the long radiator 1 (L 100 yen), and make the V-za light path Jk.
In order to improve the laser power output, it is necessary to feed a large amount of mixed gas into the discharge tube, generate many excited bags, and generate a large number of laser beams. In this case, the technique of leaving it alone becomes difficult, and the laser beam is absorbed, or the expanded mixed gas prevents the solid mixed gas from entering the vent. Therefore, the potential laser output decreases.

Therefore, two cooling paths are provided between the middle part and both ends of the long and large air discharge section, and a double heat exchanger and a motor blower, such as a centrifugal blower, are installed in each cooling path. The prime mover is driven to rotate the centrifugal blower, and the cooled mixed gas is sent into the Tsuruga tube, maintaining the temperature inside the Tsuruga tube at a constant temperature.

In this case, the length dimensions of each centrifugal blower and each cooling path are different depending on the arrangement of each reverse-centered blower, and the amount and speed of air flow of the combined gas sent from each cooling path to each discharge section are , communicate with each other. As a result, in the concentric part where the amount of mixed gas blowing is small and the blowing speed is large, the glow change is reduced to 5 arc, and the laser output is decreased by 1 degree.

[Eyes of invention]

The purpose of this example is to provide a gas laser generator with improved laser output.

[4 Requirements of the Invention] In order to achieve this object, in the present invention, one side delay port of the blower KM that communicates with at least two cooling paths is connected to the first communication port of one blower from the outer peripheral end of the blower. Yagata's blower (i
lU, and the second connecting port of the other blower is provided on the first] back connecting port side from the outer peripheral end of the blower opposite to the first connecting port,
The lengths between the cooling passages connected to these gates and the front of each broadcast can be made equal, and in general, they can be made into the L dimension (L dimension), so the passage of mixed waste flowing in each broadcast station can be made equal. You can make the amount equal, or you can put more electricity into it.

Therefore, laser output can be improved.

[Embodiments of the invention]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be explained below using a gas laser generator 1 shown in FIGS. 1 to 5.

The two first and second vents 2.3 arranged parallel to each other are filled with a mixed gas 4 and have a ring-shaped cathode 5 and a ring-shaped electrode 6 arranged therein. Direct current power is applied between the cathode 5 and the positive and negative electrodes 6 to generate glow emission 7 between the two electrodes. The mixed gas 4 is excited by the glow emitter 7, enters a population inversion state, and generates a laser beam 8. V-
The first discharge light 8 is reflected by the folding mirror 10 provided at the other end of the first discharge market #2 and the second discharge monitor 3 in a direction different from the traveling direction of the first discharge light 8. Total reflection mirror 11 installed in 3
leading to. The laser beam 8 from the total reflection mirror 11 is again reflected between the sides of the output mirror, amplified, and taken out from the output mirror 8 to the outside. The interiors of both vent tubes loosened by the glow center 7 and the laser beam 8 are placed in the lower u(1) and are cooled by cooling 1814.

The cooling path 14 is configured as shown below. Discharge port 16A
, 16B and the intake ports 17A, 17B are the first discharge 1, total 2
are formed at both ends and in the middle of the second discharge tube 3. -y product of one vertical cooling pipe 18A, 18B has suction port 16A.
, 16B, and the other end is connected to the common terminal 19.

Common-W19 has a heat exchanger 20 installed inside. The vertical cooling pipes 21A and 21B, which are arranged in correspondence with each other, are connected at one end to the suction ports 17A and 17BK, and are connected to the insulating pipe 22 at the other end. One end of the insulating tube 22 is an L-shaped cooling tube 23A bent toward one common tube.

Continued to 23B. L-shaped cooling pipe 23A.

A first centrifugal proar 24 and a second centrifugal proar 25 are disposed between the other end of 23B and the common pipe 19.

Both centrifugal blowers 24 and 25 output the output of one sounding motor 26.
A fan 28 is attached to the pongee 27, and these are housed in centrifugal blower cases 29A and 29B.

Both centrifugal pro-a case 29A, 29Bid have suction pipe 30 on the top surface and discharge pipe 31A, 31 on the outer peripheral side as shown in FIG.
B is prominent. One discharge '1i31A
and the other discharge yaiB are the inclined surface 3 from opposite sides.
2 and has a corresponding arrangement. The suction pipe 30 is connected to the common pipe 19, and the discharge line 31A and 31B are L-shaped coolers 23A.

It is connected to one end of 2313 via 7 langes 33. The dimension of the dark first half section 35 between the middle figure point O and the outer peripheral end 34 on the discharge front side is set to 3.
L, and if the dimension of the second radius 37 between the outer circumferential end 34 and the opposite outer circumferential end 36 and the center point 0 is 4L, then 3L)4
It is in the relationship of L. The above-mentioned centrifugal prowers 24 and 25 have an output shaft 27 located above.

Since it is placed at the bottom, this arrangement is called a vertical arrangement.

In addition, if the output shaft is arranged on the left and right, that is, in the same direction as the longitudinal direction of each Hodaisei, it is called a horizontal arrangement. and the bottom side.

In this configuration, one discharge pipe 31A and the other discharge front 31B that correspond to each other are approximately Dimensions can be made equal.

For example, as shown in FIG. 3, if one discharge pipe 318' and the other discharge pipe 31B' are pulled out from the same 1μ+1,
Length dimension IL on one side, length dimension 2 on the other side lI]ll
Since it is longer than L, the length dimension IL' of the cooling system 148'
and the length dimension 2 L/ of the cooling system 14B' means LL'>
It is located at Seki/Ito on 2L'.

In this way, the length dimensions of both discharge meters 31A and 31B can be made equal. For this reason, if both centrifugal blowers 24 and 25 are driven, the mixed waste 4 will be reduced as shown in FIG.

, shown in Figure n4'': Circulate and cool the sea urchin in the direction of the arrow. At this time, the mixed gas 4A air flow rate and flow rate are set to one cooling system 14A.
and the other cooling system 14B are equally supplied to both the double-layer blues 2 and 3. Therefore, since both discharge tubes can maintain the same black weight, the laser light output does not decrease. Also,
As shown in FIG. 4, cooling systems 14A and 14B are connected to the discharge tube 2.
, 3 can be connected over a short distance, so the pipe resistance of the mixed gas is small.

As a result, the mixed gas can flow better, so the laser light output can be further improved, and the centrifugal blower 2
4,2si-L and the gas laser generator 1 can be downsized.

Furthermore, if the second centrifugal blower 24 is rotated 180 degrees and arranged, the second centrifugal blower 25 becomes 1c"7 of the second centrifugal blower 25, so a centrifugal blower with the same shape can be used. The blower is easy to handle.

On the other hand, the first radius portions 35 of both the centrifugal proar cases 29A and 29B are arranged on the left and right sides with respect to the longitudinal direction of each discharge g2 and 3, so that the left and right weight balance can be made equal.
There is no possibility of deviation from the laser optical axis and no reduction in laser light output.

Further, by arranging the first radius portions 35 on the left and right sides, a symmetrical space 38 can be formed, and each eccentric '
12.3, centrifugal blowers 24, 25, cooling path 14, etc. are easy to maintain and inspect.

; In figure A5, one discharge tube 40 is further added to constitute three discharge meters. The suction ports 30 of both centrifugal blowers 24 and 25 are formed in a common end pipe 19 that coincides with the center point of the central vent 3. In order to send the mixed gas 4 to the central emitter 3 through the discharge ports of the left and right intermediate common stations 41, the mixed gas inlet (not shown) of the central discharge tube 3 is connected to the inlet of the left and right emitters 1. Make it smaller and adjust the amount of mixed gas supplied.

As shown in Fig. 6, it is composed of four discharge tubes 2, 3, 40° 42, and two centrifugal blowers 24, 25 are used. In this case, the inlet 30 of the central discharge tube 3.40 is , it is better to adjust in the same way as in FIG.

In Figure 6, two of the configurations in Figure 4 are combined, resulting in four 5, A centrifugal blower may also be used. In addition, in Figure 6 The discharge a may be arranged in a Z arrangement.

Historically, centrifugal blowers were used at both ends of discharge tubes in which at least 21 or more discharge parts were arranged in series, and the discharge tube of each centrifugal blower was connected to the cooling path, and one end of each cooling path was connected in a single layer. It goes without saying that the same effects as in the above-mentioned embodiments can be achieved even when connected at the intermediate portion.

If the 7-mer gas in the above-mentioned implementation 1+1 is circulated in the opposite direction to the direction of the arrow, the discharge pipe and suction surface of the centrifugal pro-case will be reversed, and the centrifugal pro-case will be placed in place of the discharge pipe and before suction. An inlet and an outlet may be formed in the inlet.

〔Effect of the invention〕

As described above, according to the gas laser generator of the present invention,
Laser light output can be improved.

[Brief explanation of drawings]

Fig. 1 is a side sectional view of a gas laser generator shown as an embodiment of the present invention, Fig. 2 is a 41 side view taken along the line T in Fig. 1, and Fig. 3 is a side sectional view of a centrifugal blower shown for reference. , FIG. 4 is a plan view of FIG. 1, and FIGS. 5 and 6 are cross-sectional views of a gas laser generator shown as an embodiment of the present invention. 2.3...Discharge tube, 4...Mixed gas, 5,6...
Discharge part, 14...Cooling path, 24t 25...Centrifugal blower, 29A. 29B...Centrifugal pro case, 31A, 31B...
discharge pipe. Agent Patent Attorney Akio Takahashi 40 people 67 Mistakes

Claims (1)

[Claims] (1) A discharge tube having at least two or more radial portions;
A cooling path is provided between the middle part of the discharge tube and both ends of the discharge tube between the discharge parts, and the cooling path is slowed down through a communication port, and the mixed gas is circulated and cooled between the cooling path and the discharge tube. A blower is provided on one side of the second communication port of the second blower, and of course, one side of the second communication port of the other blower is provided on the side of the other blower from the outer peripheral end of the blower. A gas laser generator characterized in that it is installed on the first communication side from the outer peripheral end of the blower opposite to the first communication port. 2. The 11th prefecture entrance and the second masuko exit are the first radius part between the center point of the blower and the outer peripheral end on one side, and the outer peripheral part on the opposite side of the first radius part and the center point. A patent characterized in that a first communication port and a second communication port are provided on the first radius part side when the dimension between the second radius part and the second radius part is set as the first radius part>the second half-dwelling area. A gas laser generator according to claim 1.