Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Nippon Steel Corp
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Nippon Steel Corp
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Publication date
Application filed by Nippon Steel CorpfiledCriticalNippon Steel Corp
Priority to JP5277277ApriorityCriticalpatent/JPS53138367A/ja
Publication of JPS53138367ApublicationCriticalpatent/JPS53138367A/ja
Publication of JPS6112203B2publicationCriticalpatent/JPS6112203B2/ja
Meetstelsel voor het onder gebruikmaking van een op driehoeksmeting berustend principe, contactloos meten van een door een oppervlakcontour van een objectvlak gegeven afstand tot een referentieniveau.
Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed