JPS61121863A - Polishing device - Google Patents

Polishing device

Info

Publication number
JPS61121863A
JPS61121863A JP24214584A JP24214584A JPS61121863A JP S61121863 A JPS61121863 A JP S61121863A JP 24214584 A JP24214584 A JP 24214584A JP 24214584 A JP24214584 A JP 24214584A JP S61121863 A JPS61121863 A JP S61121863A
Authority
JP
Japan
Prior art keywords
cylindrical
line
lap
wrap
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24214584A
Other languages
Japanese (ja)
Inventor
Nobuyoshi Iwasaki
暢喜 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP24214584A priority Critical patent/JPS61121863A/en
Publication of JPS61121863A publication Critical patent/JPS61121863A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/02Driving main working members
    • B23Q5/04Driving main working members rotary shafts, e.g. working-spindles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

PURPOSE:To uniformly polish a workpiece by dividing a lap surface coaxilly around a rotary shaft and rotating said divided surfaces so as to permit relative movement speeds to be made constant. CONSTITUTION:A group 2 of laps supported rotatably on a bearing 1 are adapted to extrapolate coaxial cylindrical alps 2a-2e in order, brought into close contact with each other, and made to be rotatable. And, a lap surface providing a cross sectional shape of a polishing surface is formed on the end surface of said united laps. In addition, pulley parts 4a-4e are respectively formed on the lower ends of the respective cylindrical laps 2a-2e, and belts 7a-7e are trained between said pulleys and a pulley 6 disposed on the driving device 5 for transmitting rotation. With the respective pulleys 4a-4e having diameters being set to provide prescribed relative movement speeds on the lap surface 3, uniform frictional sliding can be assumed at a central portion of the lap surface when a workpiece P such as a rod lens, etc., is driven in a state of the workpiece in contact with the lap surface 3.

Description

【発明の詳細な説明】 (技術分野) 本発明は、金型、鏡体又はレンズ等の研磨装置に関する
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a polishing apparatus for molds, mirror bodies, lenses, etc.

(従来技術) 従来、レンズ等の凹凸球面を研磨する装置のラップとし
ては、第6図に示す特公昭40−23119号の如く多
数の同心円筒状に分断するとともに該各部状片を中心軸
を含む放射状面に沿って分断独立した多数のラップ截片
aの集合体によって構成し、上記各ラッグ截片aをラッ
プの中心部が周縁部よりも大きくなるような圧力を加え
て被研磨面を均一に研磨する構造のものがあるが、その
加圧構造として弾性体すを使用している為、加圧力の調
整が困難であり圧力と研磨量の関係が決定できないもの
であることから研磨精度を上げることができない欠点を
有していた。
(Prior Art) Conventionally, as a wrap for a device for polishing an uneven spherical surface of a lens, etc., as shown in Japanese Patent Publication No. 40-23119 shown in Fig. 6, the wrap is divided into a number of concentric cylindrical pieces, and each piece is separated with its center axis. The surface to be polished is constructed by a collection of a large number of lap pieces a separated and independent along the radial plane, and the surface to be polished is applied to each of the lap pieces a so that the center part of the lap becomes larger than the peripheral part. There are products that have a structure that polishes uniformly, but since they use an elastic body as the pressure structure, it is difficult to adjust the pressure force, and the relationship between pressure and polishing amount cannot be determined, so the polishing accuracy cannot be determined. It had the disadvantage that it could not be improved.

(目的) 本発明は上記問題に鑑み、被研磨物の球面或は非球面型
研磨面の中心部と外周部を均−且つ高精度に研磨するこ
とのできる研磨装置を提供することを目的とするもので
ある。
(Objective) In view of the above-mentioned problems, it is an object of the present invention to provide a polishing device that can uniformly and highly accurately polish the center and outer circumference of a spherical or aspherical polished surface of an object to be polished. It is something to do.

(概要) 本発明の研磨装置はラップを被研磨物は押し当てて回転
する型の研磨装置において、研磨面を形成する上記ラッ
プを皿状研磨面の中心から外径に亘って多数の同心円状
に分断して同心円筒状ラップ群を形成し、内側の円筒状
ラップ外径と外側の2ツブ内径が密接して回転するよう
に各円筒状ラップを同一中心軸上に配設すると共に、各
円筒状ラップを無端ベルト又は歯車等の回転伝達装置を
介してモータ等の回転駆動装置とそれぞれ回転比を異に
するよ、5に連結し、中心側の円筒状ラップを外径側の
円筒状ラップより高速度に回転させて被研磨物に対する
各円筒状ラップの相対移動速度が略均等になるよ5にし
たものである。
(Summary) The polishing device of the present invention is a polishing device of the type that rotates by pressing a lap against an object to be polished. The cylindrical wraps are arranged on the same central axis so that the outer diameter of the inner cylindrical wrap and the inner diameter of the two outer cylindrical wraps rotate closely. The cylindrical wrap is connected to a rotary drive device such as a motor through a rotation transmission device such as an endless belt or a gear, each having a different rotation ratio. The cylindrical wraps are rotated at a higher speed than the laps so that the relative movement speed of each cylindrical lap with respect to the object to be polished is approximately equal.

(実施例) 以下、本発明の研磨装置の好ましい実施例を図面に従っ
て説明するに、第1図及び第2図はその一実施例を示す
ものである。
(Embodiment) Hereinafter, a preferred embodiment of the polishing apparatus of the present invention will be described with reference to the drawings, and FIGS. 1 and 2 show one embodiment.

軸受1に回転自在に軸設されたラップ群2は軸芯Cを中
心とする多数の同心円筒状ラップzat2bt2c、・
・・、 2eを順次外挿し、内径側の円筒状ラップと外
径側の円筒状ラップとを互いに密接して回転自在となる
ように軸設して構成され、ラップ群2の端面には研磨面
の断面形状(図示の実施例では凹曲面である)VC成る
連続したラップ面3が形成されている。また、上記各円
筒状ラップ2a、2b。
The wrap group 2 rotatably mounted on the bearing 1 includes a large number of concentric cylindrical wraps centered on the axis C, zat2bt2c, .
2e is sequentially extrapolated, and the cylindrical wrap on the inner diameter side and the cylindrical wrap on the outer diameter side are arranged in close contact with each other so as to be rotatable, and the end face of the wrap group 2 is polished. A continuous lapped surface 3 is formed which has a cross-sectional shape VC (in the illustrated embodiment, it is a concave curved surface). Moreover, each of the above-mentioned cylindrical wraps 2a, 2b.

1・、 2eの下端部には、それぞれプーリ部4a、4
bt・・・、 4eが形成されていると共に、これらの
プーリ部と、軸芯Cと並設したモータ等の回転駆動装置
5の回転軸に軸着した主動側プーリ6との間にそれぞれ
無端ベル) 7a、7b、・・・、 7eがかけ渡され
て上記各円筒状ラップ2a+2bm・・・、 2eに回
転が伝達されるようになっている。
Pulley parts 4a and 4 are provided at the lower ends of 1 and 2e, respectively.
bt..., 4e are formed, and endless pulleys are formed between these pulley parts and the main drive side pulley 6 which is pivoted on the rotating shaft of the rotational drive device 5 such as a motor arranged in parallel with the shaft center C. 7a, 7b, . . . , 7e are stretched over each other so that rotation is transmitted to each of the cylindrical wraps 2a+2bm, . . ., 2e.

上記構成の研磨装置は回転駆動装置5を駆動すると、主
動側プーリ6、無端ベルト7a、7b、・・・。
In the polishing apparatus having the above configuration, when the rotary drive device 5 is driven, the driving pulley 6, the endless belts 7a, 7b, . . .

7eを介して各円筒状ラップ2a+2bt・・・、 2
eがそれぞれ異なった回転速度で回転する。
Each cylindrical wrap 2a+2bt..., 2 via 7e
e rotate at different rotational speeds.

ところで、上記各円筒状ラップの移動速度(線速度)L
は、各円筒状ラップの半径をr、角速度をωとすると、 L署r×ω   φe−串・・・(1)によって与えら
れる。しかるに、上記駆動装置5によって回転する各円
筒状ラップの半径rと角速度ωの間には ω■−Φ・11・・(2) の関係が成!するよ5になっているので、これを上記(
1)式に代入すると、移動速度りは一定となる。
By the way, the moving speed (linear speed) L of each of the above cylindrical wraps
is given by L signature r×ω φe−skewer (1), where r is the radius of each cylindrical wrap and ω is the angular velocity. However, the following relationship is established between the radius r and the angular velocity ω of each cylindrical wrap rotated by the drive device 5: ω■-Φ・11 (2)! 5, so change this to the above (
1) When substituted into equation, the moving speed becomes constant.

即ち、各円筒状ラップ2a、2b、・・・、 2eはそ
のラッグ面3において一定の相対移動速度りとなるよう
に回転するのでロッドレンズ等の被研磨物Rを該ラレプ
面3に圧接した状態で駆動したとき、中心部と外縁部に
おいて一定した摺擦量を得ることができる。
That is, each of the cylindrical laps 2a, 2b, . When driven in this state, a constant amount of rubbing can be obtained at the center and outer edges.

従って、被研磨物Rとラップ面30間に必要に応じて適
宜研磨材を介在せしめ、且つ被研磨物R側の支持軸を微
少揺動することKよって各円筒状ラップ2 a + 2
 b +−・・、 2eは被研磨面を均一に研磨すると
同時に、各円筒状ラップ2a、2bt・・・、 2eの
継ぎ目痕を生ずることもない。
Therefore, by interposing an abrasive material as necessary between the object R and the lapping surface 30 and slightly rocking the support shaft on the side of the object R, each cylindrical lap 2 a + 2
b+-..., 2e uniformly polish the surface to be polished, and at the same time, do not produce seam marks between the respective cylindrical laps 2a, 2bt..., 2e.

次に1本発明の第2の実施例を第3図及び第4図に従っ
て説明する。
Next, a second embodiment of the present invention will be described with reference to FIGS. 3 and 4.

本実施例はラップ群 12  の各円筒状ラップ12a
In this embodiment, each cylindrical wrap 12a of wrap group 12 is
.

12b、12Cを連結する回転伝達装置を歯車装置によ
って構成したもので、前記第1の実施例と同様にラップ
面13を外端に形成するラップ群12は同心円筒状ラッ
プ12a、12b、12cを相互に回転自在に同一軸芯
上に配設すると共に、中心軸位置のラップ12aの内端
に連続して回転駆動装f(図示せず)に連続する回転軸
15を構成してなり、この回転軸15の外周上部に形成
した歯車16aに対して、軸受10aによって回転自在
に支持した2個の歯車17a。
The rotation transmission device that connects 12b and 12C is constituted by a gear device. Similar to the first embodiment, the wrap group 12 having the wrap surface 13 at the outer end has concentric cylindrical wraps 12a, 12b, and 12c. They are arranged on the same axis so as to be rotatable with each other, and a rotary shaft 15 is constructed which is connected to the inner end of the wrap 12a at the central axis position and is connected to a rotary drive device f (not shown). Two gears 17a are rotatably supported by a bearing 10a relative to a gear 16a formed on the upper outer periphery of the rotating shaft 15.

17bを介して円筒状ラップ12bの内周に形成し゛た
歯車19aを噛合せしめる一方、上記回転軸15の外周
下部に形成した他の歯車15bK対して、軸受10bK
よって回転自在に支持した2個の歯車18a、18bを
介して円筒状2ツブ12Cの内周に形成した歯車19b
を噛合せしめてなるものである。
The gear 19a formed on the inner periphery of the cylindrical wrap 12b is engaged with the other gear 15bK formed on the lower outer periphery of the rotating shaft 15 through the bearing 10bK.
Therefore, a gear 19b formed on the inner periphery of the two cylindrical knobs 12C via two rotatably supported gears 18a and 18b.
It is made by meshing the two.

上記研磨装置は回転駆動装置を回転させ、回転軸15を
介してラップ12aを回動させると、それぞれ2個の歯
車17a、17b 、  18a、18bを介して円筒
状ラップ12b、12cがラップ12aと同方向忙回転
するよ5になる。また、この回転速度は、歯車17a。
In the polishing apparatus, when the rotary drive device is rotated and the lap 12a is rotated through the rotating shaft 15, the cylindrical laps 12b and 12c are connected to the lap 12a through the two gears 17a, 17b, 18a and 18b, respectively. It will turn in the same direction and become 5. Further, this rotational speed is the same as that of the gear 17a.

17b及び18a、18bをそれぞれ相互に同歯数Vc
構成することにより、回転軸15上の歯車16a、 1
6bと各円筒状ラップ12b、12cの歯車19a、1
9bの比によって決定され、各円筒状ラップ12a、1
2b、12cはそれぞれ11!研磨物との相対移動速度
りを等しくするよ5になる。
17b, 18a, and 18b have the same number of teeth Vc.
By configuring, gears 16a, 1 on the rotating shaft 15
6b and gears 19a, 1 of each cylindrical wrap 12b, 12c.
9b, each cylindrical wrap 12a, 1
2b and 12c are 11 each! It becomes 5 to make the relative movement speed with the polishing object equal.

従って、前記第1実施例と同様に被研磨物に対する均一
な研磨加工を達成することができる。
Therefore, as in the first embodiment, uniform polishing of the object to be polished can be achieved.

第5図は、本発明の第3実施例を示すものである。FIG. 5 shows a third embodiment of the invention.

即ち1本実施例は前記第2実施例と同様に%ラップ群2
2を構成する同心円筒状ラップ22a、22b。
That is, in this embodiment, as in the second embodiment, %lap group 2
2 concentric cylindrical wraps 22a, 22b.

22Cを相互に回転自在に配設すると#に、中心軸位置
のラップ22aの内端に連続して回転駆動装置(図示せ
ず)に連結する回転軸25を構成してなるもので、この
回転軸25の外周に形成した歯車26aに対して、軸受
20aによって回転自在に支持した2個の歯車27a、
27bを介して円筒状ラップ22bの内周に形成した歯
車29aを噛合せしめる一方、上記円筒状2ツブ22b
の外周に形成した歯車26b tc対して、軸受20b
 Vc回転自在に支持した2個の歯車28a、28bを
介して円筒状ラップ12Cの内周に形成した歯車29b
を噛合せしめて構成したものである。
22C are disposed so as to be rotatable with respect to each other, a rotating shaft 25 is continuously connected to the inner end of the wrap 22a at the central axis position and connected to a rotational drive device (not shown), and this rotation Two gears 27a are rotatably supported by bearings 20a relative to a gear 26a formed on the outer periphery of the shaft 25,
A gear 29a formed on the inner periphery of the cylindrical wrap 22b is meshed with the gear 27b, while the two cylindrical tabs 22b
The gear 26b tc formed on the outer periphery of the bearing 20b
A gear 29b formed on the inner periphery of the cylindrical wrap 12C via two gears 28a and 28b rotatably supported by Vc.
It is constructed by interlocking the two.

上記構成によれば、各円筒状ラップ22a + 22b
 *22cの内外径に隣接するものを歯車で相互に@転
連結した構造になり、この各円筒状ラップ22a。
According to the above configuration, each cylindrical wrap 22a + 22b
Each cylindrical wrap 22a has a structure in which those adjacent to the inner and outer diameters of *22c are connected to each other by gears.

22b、22cの回転比も半径と逆比例する。即ち、回
転軸25を回転駆動したとき、ラップ面23は被研磨物
に対して中心部から外径部に亘って一定の移動速度を持
って回転駆動せしめられる。従って前記実施例と同様に
、被研磨物に対する研磨量が研磨面全体に亘って均一と
なり、高精度の研磨性能を発揮するようKなる。
The rotation ratio of 22b and 22c is also inversely proportional to the radius. That is, when the rotating shaft 25 is rotated, the lapping surface 23 is rotated at a constant moving speed with respect to the object to be polished from the center to the outer diameter. Therefore, similarly to the embodiment described above, the amount of polishing of the object to be polished becomes uniform over the entire polishing surface, so that highly accurate polishing performance can be achieved.

(発明の効果) 以上述べた如く本発明によれば、ラップ面が回転軸を中
心に同心円状に分割され、それぞれ相対移動速度が一定
になるように回転されるものであるため、被研磨物に対
する研磨量が被研磨面の中心から外縁部に亘りて一定に
なり、均一な研磨加工を行うことができる特徴を有する
(Effects of the Invention) As described above, according to the present invention, the lapping surface is divided into concentric circles around the rotation axis, and each is rotated so that the relative movement speed is constant. The polishing amount is constant from the center to the outer edge of the surface to be polished, so that uniform polishing can be performed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明のg1実施例を示す研磨装置の、一部
切久した正面図、 第2図は、上記第1図に示した研磨装置の一部を破截し
た底面図、 第3図は、本発明の第2実施例を示す研磨装置の縦断面
図、 第4図は、上記第3図における八−A線1’(沿う断面
図、 第5図は、本発明の第3実施例を示す研磨装置の要部を
半裁した正面図、 第6図は、従来の研磨装置の一例を示す要部を牛截した
正面図である。 2.12.22・ψ・・・円筒状ラップ群7a、7b+
・・・、7e ・・・・無端ベルト(回転伝達装置)5
・・・・・・・・・・・回転駆動装置15.25−4・
・・拳・回転軸 16a+ 16b117a、 17b+ 18a、 1
sb、 19 a H27ag 27b+28at28
b、29a・・・・・歯車(回転伝達装置)策2Z ス 方5図 p)ス ′f)6Z 手続補正書(自発) 昭和60年2月25日 2、発明の名称  研磨装置 3、補正をする者 事件との関係  特許出願人 所在地  東京都渋谷区幅ケ谷2丁目43番2号名 称
   (057)  オリンパス光学工業株式会社4代
 理 人 5、補正の対象 明細書の「発明の詳細な説明」および「図面の簡単な説
明」、「特許請求の範囲」の各欄6、補正の内容 (1)  明細書第1頁末行末尾から第2買初行初頭に
わたって記載した「ラップ」を「研磨器」に改める。 (2)同 第2頁第4行中および第5行中にそれぞれ記
載の「ラップ截片a」を「研磨皿載片a」に訂正する。 (5)  同 第2頁第5行中、第18行中および末行
中にそれぞれ記載の「ラップ丁ビ研磨皿」K改める。 (4)同 第6買初行末から第2行初頭にわたって記載
の「ラッグ」を「研磨器」に訂正する。 (5)同 第3頁第2行中、第3行初め、第5行初め、
に7行末、第8行中、第9行中、第15行中。 第16行中、第18行中および第19行中にそれぞれ記
載の「ラップ」を、「研磨器」Kそれぞれ改める。 (6)同 第6頁第3行末尾から第4行初めにわたって
記載した「ラップ」を、「研磨器」に訂正する。 (7)同 第6頁第17行末から第18打切頭にわたっ
て記載した「ラップ」を、「研磨器」K改める。 (8)同 第4買初行中、第2行中、第8行中、第12
行中、第14行中および第15行中、第19行中にそれ
ぞれ記載した「ラップ」を、「研磨皿」にそれぞれ訂正
する。 (9)同 第4頁第5行初頭に記載の「り部」の次に、
「4a+4b+”’4e Jを加入する。 (10)同 第5頁第4行末から第5打切頭にわたって
記載した「ラップ」を、「研磨皿」に改める。 (11)同 第5頁第4行中、第7行初め、第10行中
、第13行初め、第14行中および第18行中にそれぞ
れ記載した「ラップ」を、「研磨皿」にそれぞれ改める
。 (12)同 第6買初行中、第2行中、第3行末、第8
行中、第12行中、第15行中および第17行中にそれ
ぞれ記載した「ラップ」を゛、「研磨皿」にそれぞれ訂
正する。 (13)同 第6頁第5行中に記載の「連続」を、「連
結」K改める。 (14)同 第7買初行中、第2行中、第10行中、第
12行中、第16行中、第18行中および末行中にそれ
ぞれ記載の「ラップ」を、「研磨皿」Kそれぞれ訂正す
る。 (15)同 第7頁第9行末尾から第10行初めにわた
って記載の「ランプ」を、「研磨皿」K改める。 (16)同 第8頁第3行中、第5行中、第7行中およ
び第14行中にそれぞれ記載の「ラップ」を、「研磨皿
」にそれぞれ改める。 (17)同 第9頁第15行中に記載の「ラップ」を、
「研磨皿」に改める。 (18)明細書第1頁に記載の「特許請求の範囲」を、
別紙の通り改めます。 別     紙 「2、特許請求の範囲 研磨皿を被研磨物に押圧させて回転して被研磨物を研磨
する研磨装置において、
FIG. 1 is a partially cutaway front view of a polishing device showing the g1 embodiment of the present invention, FIG. 2 is a partially cutaway bottom view of the polishing device shown in FIG. 1 above, and FIG. 3 is a longitudinal cross-sectional view of a polishing apparatus showing a second embodiment of the present invention, FIG. 4 is a cross-sectional view taken along line 8-A 1' in FIG. 3, and FIG. 2.12.22・ψ... Cylindrical wrap groups 7a, 7b+
..., 7e ...Endless belt (rotation transmission device) 5
......Rotary drive device 15.25-4.
...Fist/rotating shaft 16a+ 16b117a, 17b+ 18a, 1
sb, 19 a H27ag 27b+28at28
b, 29a...Gear (rotation transmission device) plan 2Z Figure 5 p) S'f) 6Z Procedural amendment (voluntary) February 25, 1985 2, Title of invention Polishing device 3, Amendment Relationship with the case involving a person who does Column 6 of "Description", "Brief Description of Drawings", and "Claims", Contents of Amendment (1) "Wrap" written from the end of the last line of the first page of the specification to the beginning of the first line of the second page was changed to "polisher". (2) "Lap cutting piece a" written in lines 4 and 5 of page 2 is corrected to "polishing plate piece a". (5) Revised "K" for "lap polishing plate" described in the 5th line, the 18th line, and the last line of the same page, respectively. (4) From the end of the first line of the 6th purchase to the beginning of the second line, the word ``rag'' has been corrected to ``polisher.'' (5) Page 3, 2nd line, beginning of 3rd line, beginning of 5th line,
at the end of line 7, middle of line 8, middle of line 9, middle of line 15. In the 16th line, the 18th line, and the 19th line, "lap" is respectively changed to "polisher" K. (6) The word "wrap" written from the end of the third line to the beginning of the fourth line on page 6 is corrected to "polisher." (7) "Wrap" written from the end of line 17 to the beginning of line 18 on page 6 of the same page was changed to "polisher". (8) 4th purchase first bank, 2nd bank, 8th bank, 12th bank
"Wrap" written in the following lines, 14th line, 15th line, and 19th line, respectively, is corrected to ``polishing plate.'' (9) Next to "Ribe" written at the beginning of the 5th line on page 4,
Add "4a+4b+"'4e J. (10) The word "wrap" written from the end of the fourth line to the beginning of the fifth truncation on page 5 has been changed to "polishing plate." (11) "Wrap" written in the 4th line, the beginning of the 7th line, the beginning of the 10th line, the beginning of the 13th line, the 14th line, and the 18th line of the same page, respectively, to the "polishing plate". Change each. (12) The 6th purchase first line, the 2nd line, the end of the 3rd line, the 8th line
"Wrap" written in the following lines, 12th line, 15th line, and 17th line is corrected to ``,'' and ``polishing plate,'' respectively. (13) The word "continuous" in line 5 on page 6 of the same document was changed to "concatenation." (14) "Wrap" listed in the 7th purchase first line, 2nd line, 10th line, 12th line, 16th line, 18th line, and last line, respectively, is replaced with ``polishing''. ``Plate'' K corrects each. (15) From the end of line 9 to the beginning of line 10 on page 7, the word ``lamp'' has been changed to ``polishing plate.'' (16) "Wrap" described in the third, fifth, seventh and 14th lines of page 8 has been changed to "polishing plate". (17) “Wrap” described in page 9, line 15 of the same,
Changed to "polishing plate". (18) “Claims” stated on page 1 of the specification,
Revised as per attached sheet. Attachment ``2. Claims In a polishing device that polishes an object to be polished by pressing a polishing plate against the object to be polished and rotating it,

Claims (1)

【特許請求の範囲】 ラップを被研磨物に押圧させて回転して被研磨物を研磨
する研磨装置において、 上記ラップを多数の同心円筒状ラップ群によつて形成し
、内側の円筒状ラップの外周と外側の円筒状ラップの内
周とが密接して回転自在となるように配設すると共に、
上記各円筒状ラップを回転伝達装置を介して回転駆動装
置と連結してなり、上記各円筒状ラップの被研磨物に対
する相対移動速度が略均一になるように上記各円筒状ラ
ップを回転することを特徴とする研磨装置。
[Claims] In a polishing device that polishes an object by pressing a lap against the object and rotating it, the lap is formed by a group of many concentric cylindrical laps, and the inner cylindrical lap is Arranged so that the outer periphery and the inner periphery of the outer cylindrical wrap are in close contact with each other and are rotatable,
Each of the cylindrical wraps is connected to a rotation drive device via a rotation transmission device, and each of the cylindrical wraps is rotated so that the relative movement speed of each of the cylindrical wraps with respect to the object to be polished is approximately uniform. A polishing device featuring:
JP24214584A 1984-11-16 1984-11-16 Polishing device Pending JPS61121863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24214584A JPS61121863A (en) 1984-11-16 1984-11-16 Polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24214584A JPS61121863A (en) 1984-11-16 1984-11-16 Polishing device

Publications (1)

Publication Number Publication Date
JPS61121863A true JPS61121863A (en) 1986-06-09

Family

ID=17084984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24214584A Pending JPS61121863A (en) 1984-11-16 1984-11-16 Polishing device

Country Status (1)

Country Link
JP (1) JPS61121863A (en)

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