JPH0475870A - Surface lap polishing machine - Google Patents

Abstract

PURPOSE:To improve a polishing accuracy, by using a driving pulley and transmission pulley provided with taper on the outer periphery of a surface plate with the rotation of the surface plate being utilized, and adjusting the azimuth speed of a correction ring and that of the surface plate identically with this space being joined by an O ring for transmission. CONSTITUTION:A rotation force is taken out of the side face of a rotating surface plate1 by a driving pulley 5 closely fitted to the surface plate 1 side face, the rotation force fed from the surface plate 1 is transmitted to a transmission pulley 4 via an O ring 6 for transmission and a correction ring 2 in which the body 3 to be polished is stored, is driven with its rotation to the inner diameter side by the transmission pulley 4 fixed to a plate 11 and an auxiliary pulley 7. Consequently, the polishing in a high accuracy with less vibration and small rotation error can be performed.

Description

Detailed Description of the Invention A9.Objective of the Invention [Field of Industrial Application] The present invention is directed to a flat lapping polishing machine that uses a lapping machine to polish the processed surface of a workpiece to be smooth and flat in submicron units. In particular, the present invention relates to a flat lapping polishing machine that is equipped with a novel forced rotation mechanism, has a simple structure, and can produce objects to be polished with high polishing accuracy.

[Conventional technology]

Conventionally, this type of forced rotation mechanism requires a worm, gears, belt, or chain as a transmission mechanism in order to derive its power source from the power for rotating the surface plate and a separate power source for rotation of the correction ring. , and structures to support these transmission mechanisms.The structure is complicated and the shape is large, making it complicated to replace parts and adjust the equipment during repairs.On the other hand, the polishing equipment It has disadvantages such as increased weight and high price. In addition, separate power is used to rotate the object to be polished, and a complicated transmission mechanism increases the number of vibration sources, which may damage the object during the polishing process and make high-precision polishing impossible. there were.

In addition, in order to perform high-precision polishing by applying a speed vector of a fixed ratio between the surface plate and the correction ring, the electric control for forcibly rotating the correction ring in synchronization with the rotation of the surface plate is as follows. A detector for monitoring the synchronization and asynchronousness of the surface plate and the correction ring, a controller built into the control side to monitor mechanical damage in the transmission system, and a complex control system that allows the motor to operate quickly in response to controller commands. [Problems to be Solved by the Invention] In order to eliminate these drawbacks, the present invention extracts rotational force from the surface plate using a drive pulley pressed against the side surface of the surface plate. , turn the transmission pulley through the transmission mechanism.

The correction ring in contact with the transmission pulley is forcibly rotated together with the auxiliary pulley, and the transmission mechanism between the drive pulley and the transmission pulley has a structure in which each pulley is tapered to change the rotation speed of the correction ring relative to the rotation speed of the surface plate. This is a flat lapping machine with a forced rotation mechanism for the correction ring, which has a structure that does not require electrical control, has little vibration, is easy to adjust, and enables submicron polishing of the flatness of the surface of the polished object. It is on offer.

In addition, the rotation speed between the drive pulley and the transmission pulley can be adjusted by moving the connecting element to change the diameter of each pulley at the tapered part provided on the outer periphery of the drive pulley and the transmission pulley, thereby achieving continuously variable speed. This structure enables high-precision polishing by rotating the surface plate and correction ring synchronously at a certain ratio, in other words, to improve polishing efficiency.

To provide a flat lapping polishing machine capable of polishing with high flatness by increasing the relative speed of a surface plate and a correction ring.

The following is a configuration of the invention with zero margins [Means for solving the problem] The present invention is characterized in that a correction ring for storing a workpiece to be polished on the inner diameter side is placed on the surface of the correction ring, approached to a rotating surface plate, and separated from the surface plate. A correction ring that rotates on a surface plate is held by a plate fixed to a column, and a transmission pulley and an auxiliary pulley fixed and supported by the plate. A drive pulley is provided which rotates in close contact with the auxiliary plate, and a compression coil spring is installed between the position of the drive pulley at the tip of the auxiliary plate and the plate to bring the drive pulley into close contact with the outer circumferential surface of the surface plate. Also, the drive pulley and transmission pulley are connected by a transmission O-ring.
In addition, there is a taper on the side of the rotation shaft of the drive pulley and transmission pulley, so the rotation ratio between the rotation of the drive pulley and the transmission pulley can be changed steplessly depending on the drive position of the transmission O-ring that connects each pulley. I can do it. In other words, it is possible to continuously change the rotation speed of the surface plate and the rotation ratio of the correction ring. At the position of the object to be polished in the correction ring, the distance from the center of the surface plate to the object to be polished is rl, the distance between the object to be polished in the correction ring and the center of the correction ring is r2, and the angular velocity of the surface plate is 3. When the angular velocity of the correction ring is w2, change the angular velocity of the correction ring so that it becomes 1 x rl = W2 The relative speed between the surface plate and the correction ring of the housed object to be polished can be made uniform regardless of the position within the correction ring, and polishing can be made uniform regardless of the position within the correction ring. Therefore, by using the flat lapping polishing machine of the present invention, the flatness of the object to be polished can be finished to submicron level.

[Effect]

The present invention extracts rotational force from the side surface of a rotating surface plate using a drive pulley that is in close contact with the surface plate side surface, transmits the rotational force from the surface plate to the transmission pulley via a transmission O-ring, and fixes the surface plate to the plate. A transmission pulley and an auxiliary pulley rotate a correction ring containing an object to be polished on the inner diameter side. Fork,
There is a taper in the part where the transmission O-ring is installed on the outside of the rotation axis of the drive brake/rider transmission pulley, and the position of the transmission O-ring on each pulley can be changed and the position fixed using the adjustment rubber. The rotation speed of the correction ring relative to the surface plate can be changed by At this time, the angular velocity of the correction ring is W2,
When the angular velocity of the surface plate is 2, the distance between the object to be polished and the center of the surface plate is r2, and the distance M6 between the object to be polished and the center of the correction ring is r2, the angular velocity of the correction ring and the surface plate are the same. By adjusting the IJ value, the relative velocity of the object to be polished with respect to the surface plate within the correction ring can be made constant.

In FIG. 3, the radius of the correction ring 2 is assumed to be χ.

When polishing an object to be polished within the inner diameter of the correction ring, the installation position of the object to be polished is at point A touching the outer periphery of the surface plate, point 02 at the center of the correction ring, and point B near the center of the surface plate. The relative velocity of each object to be polished is: a) At point A, Wl (a+2 z ) - Z 12
- At stomach 2 t+(a”z) 1)) At 02 points Wl (z +a)+O=w+ (
a+ z ) c) At point B, Wia"W2Z W1", so wl(a+χ) In other words, by setting the angle between the surface plate and the correction ring to a certain condition, conditions a), b), C) The relative speed between the co-surface plate and the object to be polished can be constant.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing the structure of an embodiment of a forced rotation mechanism for a correction ring of a flat lapping machine according to the present invention. The forced rotation mechanism main body includes a transmission pulley 4 fixed to a plate 11 that is integrally supported by a fixed column 12 located close to the rotating surface plate 1, an auxiliary pulley 7, and a plate 11.
, a drive pulley 5 fixed to one end of an auxiliary plate 10 rotatably supported by a fulcrum 13;
is in close contact with the outside of the surface plate 1, and transmits the rotational force of the drive pulley to the transmission pulley via the transmission O-ring 6. In order to constantly press the transmission O-ring 6 and the driving pulley 5 against the surface plate 1, a compression coil spring 9 is installed between the tips of the auxiliary valves 1 to 10 and the cylinders 1-11. ing.

Next, the operation of this forced rotation mechanism will be explained. The drive pulley 5 is capable of swinging around a fulcrum 13, and is constantly pressed against the outer surface of the rotating surface plate 1 by a compression coil spring 9 connected to a plate 11 and an auxiliary bracket 13. , the drive pulley 5 rotates at the same time as the surface plate 1 rotates. At this time, a rotational driving force is also applied to the transmission pulley 4 via the transmission O-ring 6 placed between the drive pulley 5 and the transmission pulley 4.

On the other hand, the correction ring 2 holds the object to be polished 3 inside and is in contact with the transmission pulley 4 and the auxiliary pulley 7, and the correction ring 2 is rotated by applying rotational driving force to the transmission pulley 4. An O-ring 8 is attached to the outer periphery of the driving pulley 5, transmission pulley 4, and auxiliary pulley 7 in contact with the surface plate and the correction ring.
are fitted into grooves provided in each pulley, and contact the surface plate and correction ring via the O-ring 8, which softens the impact during rotation and suppresses vibration.

FIG. 2 is an explanatory diagram of the continuously variable speed change mechanism in the correction ring forced rotation mechanism of the flat lapping machine of the present invention. In order to rotate the correction ring 2 synchronously with the surface plate 1, the diameters of the drive pulley 5 and transmission pulley 4 are determined in advance according to the diameters of the surface plate 1 and correction ring 2, and the angular velocity is designed. A difference of 14 occurs due to deformation and slippage over time. For this reason, in the present invention, in order to minimize the error, as shown in FIG. It is equipped with a mechanism. The variable speed mechanism has a tapered outer cylindrical portion of the driving pulley 5 and the transmission pulley 4, around which the transmission O-ring 6 can be inserted, and the adjustment rubber 14a and the adjustment rubber 141) can be moved up and down. By changing the ratio of the diameters of the drive pulley and the transmission O-ring of the transmission pulley in contact with each other, nine speeds can be achieved without permission. The nuts 1-15 are closed with double nuts, and fix the adjusting rubber 14a and the adjusting rubber 1413.

An example of polishing an object to be polished using a flat lapping machine according to the present invention will be described below.6 In Fig. 1, the outer diameter of the surface plate is 300 mmφ, and the inner diameter is 90 mm.
A tin surface plate was used for the shoe φ, and the correction ring was made of ceramic and had an outer diameter of 140 mm and an inner diameter of 10 mm.

A cube-shaped block of molybdate with 20 squares on each side is glued to the resin work carrier shown in Figure 1, and diamond abrasive grains are poured between the surface plate and lead molybdate, which is the workpiece to be polished. When polishing was carried out at a rotation speed of 20 to 30 times per minute, the time it took for the polished surface to reach a flatness of 0.16 μm was as long as 3 polishing times using a conventional flat lapping machine.
In contrast, the flat lapping machine of the present invention required approximately half the polishing time to obtain the same level of flatness as the conventional method.

C1 Effects of the invention [Effects of the invention] As described above, according to the flat lapping polishing machine of the present invention,
Instead of using a separate drive source to drive the correction ring, corrections can be made by using the rotation of the surface plate, using a drive pulley and a transmission pulley with a tapered outer periphery of the surface plate, and connecting them with a transmission O-ring. It has a simple structure and is inexpensive so that the rotational angular velocity of the ring and the surface plate are the same, and it produces less vibration, less rotational error, and can perform highly accurate polishing, and also improves polishing efficiency. It has now become possible to provide a flat surface lapping polishing machine that has the advantage of a stepless variable speed that requires simple adjustment when increasing the rotational speed of the surface plate and correction ring in order to improve the polishing performance.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a flat lapping polishing machine of the present invention. FIG. 2 is a front view showing the continuously variable transmission mechanism of the flat lapping polishing machine of the present invention. FIG. 3 is a plan view illustrating the angular velocity between the correction ring and surface plate of the flat lapping polishing machine of the present invention and the relative velocity of the object to be polished. DESCRIPTION OF SYMBOLS 1... Surface plate, 2... Correction ring, 3... Work to be polished, 4... Transmission pulley, 5... Drive pulley, 6...
Transmission O-ring, 7... Auxiliary pulley, 8... O-ring, 9... Compression coil spring, 10... Auxiliary plate, 11... Plate, 12... Support column, 13... Fulcrum, 14a, 14b... Adjustment rubber, 15... Nut, 16... Work carrier. Figure 1

Claims (1)

[Claims] 1. On the plate fixed to the support located above the surface plate,
A transmission pulley that transmits rotational drive to a correction ring that stores the object to be polished, and an auxiliary pulley that rotates in response to the correction ring.
A drive pulley is provided which is fixed to the tip of the auxiliary plate which is rotatably attached to the fulcrum of the plate and rotates in close contact with the outer periphery of the surface plate, and the tip of the auxiliary plate and the plate are connected by a compression coil spring to drive the auxiliary pulley. is always pressed against the outer surface of the surface plate, the auxiliary pulley and the transmission pulley are connected by a transmission O-ring, and a taper is attached to the outer periphery of the drive pulley and transmission pulley, respectively, so that the diameter of each pulley changes in the direction A flat lapping polishing machine characterized in that the surface plate and the correction ring are adjusted to have the same angular velocity by moving a connecting element to polish the object to be polished in the correction ring.