JPS61121732U - - Google Patents
Info
- Publication number
- JPS61121732U JPS61121732U JP283785U JP283785U JPS61121732U JP S61121732 U JPS61121732 U JP S61121732U JP 283785 U JP283785 U JP 283785U JP 283785 U JP283785 U JP 283785U JP S61121732 U JPS61121732 U JP S61121732U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- substrate
- quartz plate
- introduction pipe
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP283785U JPS61121732U (enExample) | 1985-01-16 | 1985-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP283785U JPS61121732U (enExample) | 1985-01-16 | 1985-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61121732U true JPS61121732U (enExample) | 1986-07-31 |
Family
ID=30476888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP283785U Pending JPS61121732U (enExample) | 1985-01-16 | 1985-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61121732U (enExample) |
-
1985
- 1985-01-16 JP JP283785U patent/JPS61121732U/ja active Pending
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