JPS6111918B2 - - Google Patents
Info
- Publication number
- JPS6111918B2 JPS6111918B2 JP21461383A JP21461383A JPS6111918B2 JP S6111918 B2 JPS6111918 B2 JP S6111918B2 JP 21461383 A JP21461383 A JP 21461383A JP 21461383 A JP21461383 A JP 21461383A JP S6111918 B2 JPS6111918 B2 JP S6111918B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- width
- die
- band
- shaped silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 54
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 28
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 239000010703 silicon Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008713 feedback mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003079 width control Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21461383A JPS60108399A (ja) | 1983-11-15 | 1983-11-15 | 帯状シリコン結晶の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21461383A JPS60108399A (ja) | 1983-11-15 | 1983-11-15 | 帯状シリコン結晶の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60108399A JPS60108399A (ja) | 1985-06-13 |
| JPS6111918B2 true JPS6111918B2 (enrdf_load_stackoverflow) | 1986-04-05 |
Family
ID=16658620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21461383A Granted JPS60108399A (ja) | 1983-11-15 | 1983-11-15 | 帯状シリコン結晶の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60108399A (enrdf_load_stackoverflow) |
-
1983
- 1983-11-15 JP JP21461383A patent/JPS60108399A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60108399A (ja) | 1985-06-13 |
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