JPS61117249U - - Google Patents
Info
- Publication number
- JPS61117249U JPS61117249U JP34485U JP34485U JPS61117249U JP S61117249 U JPS61117249 U JP S61117249U JP 34485 U JP34485 U JP 34485U JP 34485 U JP34485 U JP 34485U JP S61117249 U JPS61117249 U JP S61117249U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- temperature
- etching solution
- etching
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34485U JPS61117249U (US07534539-20090519-C00280.png) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34485U JPS61117249U (US07534539-20090519-C00280.png) | 1985-01-07 | 1985-01-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61117249U true JPS61117249U (US07534539-20090519-C00280.png) | 1986-07-24 |
Family
ID=30472100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP34485U Pending JPS61117249U (US07534539-20090519-C00280.png) | 1985-01-07 | 1985-01-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61117249U (US07534539-20090519-C00280.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05121392A (ja) * | 1991-10-28 | 1993-05-18 | Sharp Corp | エツチング等の処理槽 |
JP2005272940A (ja) * | 2004-03-25 | 2005-10-06 | Daishinku Corp | エッチング処理槽及び、エッチング処理槽を備えたエッチング処理装置 |
-
1985
- 1985-01-07 JP JP34485U patent/JPS61117249U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05121392A (ja) * | 1991-10-28 | 1993-05-18 | Sharp Corp | エツチング等の処理槽 |
JP2005272940A (ja) * | 2004-03-25 | 2005-10-06 | Daishinku Corp | エッチング処理槽及び、エッチング処理槽を備えたエッチング処理装置 |
JP4501486B2 (ja) * | 2004-03-25 | 2010-07-14 | 株式会社大真空 | エッチング処理槽及び、エッチング処理槽を備えたエッチング処理装置 |
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