JPS61117248U - - Google Patents
Info
- Publication number
- JPS61117248U JPS61117248U JP34285U JP34285U JPS61117248U JP S61117248 U JPS61117248 U JP S61117248U JP 34285 U JP34285 U JP 34285U JP 34285 U JP34285 U JP 34285U JP S61117248 U JPS61117248 U JP S61117248U
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- waste liquid
- tank
- semiconductor wafers
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 239000002699 waste material Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000012993 chemical processing Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34285U JPS61117248U (enExample) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34285U JPS61117248U (enExample) | 1985-01-07 | 1985-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117248U true JPS61117248U (enExample) | 1986-07-24 |
Family
ID=30472096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34285U Pending JPS61117248U (enExample) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117248U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183340A (zh) * | 2010-06-03 | 2011-09-14 | 新兴重工湖北三六一一机械有限公司 | 一种液面可升降多用途装置 |
-
1985
- 1985-01-07 JP JP34285U patent/JPS61117248U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183340A (zh) * | 2010-06-03 | 2011-09-14 | 新兴重工湖北三六一一机械有限公司 | 一种液面可升降多用途装置 |
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