JPS61117244U - - Google Patents

Info

Publication number
JPS61117244U
JPS61117244U JP33985U JP33985U JPS61117244U JP S61117244 U JPS61117244 U JP S61117244U JP 33985 U JP33985 U JP 33985U JP 33985 U JP33985 U JP 33985U JP S61117244 U JPS61117244 U JP S61117244U
Authority
JP
Japan
Prior art keywords
tank
lid
semiconductor wafers
cleaning tank
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP33985U priority Critical patent/JPS61117244U/ja
Publication of JPS61117244U publication Critical patent/JPS61117244U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP33985U 1985-01-07 1985-01-07 Pending JPS61117244U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33985U JPS61117244U (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33985U JPS61117244U (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Publications (1)

Publication Number Publication Date
JPS61117244U true JPS61117244U (enrdf_load_stackoverflow) 1986-07-24

Family

ID=30472090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33985U Pending JPS61117244U (enrdf_load_stackoverflow) 1985-01-07 1985-01-07

Country Status (1)

Country Link
JP (1) JPS61117244U (enrdf_load_stackoverflow)

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