JPS61117243U - - Google Patents
Info
- Publication number
- JPS61117243U JPS61117243U JP1985000715U JP71585U JPS61117243U JP S61117243 U JPS61117243 U JP S61117243U JP 1985000715 U JP1985000715 U JP 1985000715U JP 71585 U JP71585 U JP 71585U JP S61117243 U JPS61117243 U JP S61117243U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion source
- vane plate
- semiconductor substrate
- rotary table
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000715U JPS61117243U (enExample) | 1985-01-08 | 1985-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000715U JPS61117243U (enExample) | 1985-01-08 | 1985-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117243U true JPS61117243U (enExample) | 1986-07-24 |
Family
ID=30472806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985000715U Pending JPS61117243U (enExample) | 1985-01-08 | 1985-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117243U (enExample) |
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1985
- 1985-01-08 JP JP1985000715U patent/JPS61117243U/ja active Pending