JPS61111963U - - Google Patents
Info
- Publication number
- JPS61111963U JPS61111963U JP19956984U JP19956984U JPS61111963U JP S61111963 U JPS61111963 U JP S61111963U JP 19956984 U JP19956984 U JP 19956984U JP 19956984 U JP19956984 U JP 19956984U JP S61111963 U JPS61111963 U JP S61111963U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- raw material
- material gas
- reactor
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956984U JPS61111963U (enExample) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956984U JPS61111963U (enExample) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61111963U true JPS61111963U (enExample) | 1986-07-15 |
Family
ID=30759613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19956984U Pending JPS61111963U (enExample) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61111963U (enExample) |
-
1984
- 1984-12-27 JP JP19956984U patent/JPS61111963U/ja active Pending
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