JPS6111049A - マイクロ波放電プラズマ殺菌装置 - Google Patents

マイクロ波放電プラズマ殺菌装置

Info

Publication number
JPS6111049A
JPS6111049A JP13090084A JP13090084A JPS6111049A JP S6111049 A JPS6111049 A JP S6111049A JP 13090084 A JP13090084 A JP 13090084A JP 13090084 A JP13090084 A JP 13090084A JP S6111049 A JPS6111049 A JP S6111049A
Authority
JP
Japan
Prior art keywords
sterilization
vacuum container
microwave
sterilized
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13090084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237183B2 (enrdf_load_stackoverflow
Inventor
前羽　良保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP13090084A priority Critical patent/JPS6111049A/ja
Publication of JPS6111049A publication Critical patent/JPS6111049A/ja
Publication of JPH0237183B2 publication Critical patent/JPH0237183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatus For Disinfection Or Sterilisation (AREA)
JP13090084A 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置 Granted JPS6111049A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13090084A JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13090084A JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Publications (2)

Publication Number Publication Date
JPS6111049A true JPS6111049A (ja) 1986-01-18
JPH0237183B2 JPH0237183B2 (enrdf_load_stackoverflow) 1990-08-22

Family

ID=15045342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13090084A Granted JPS6111049A (ja) 1984-06-27 1984-06-27 マイクロ波放電プラズマ殺菌装置

Country Status (1)

Country Link
JP (1) JPS6111049A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005089818A1 (ja) * 2004-03-19 2005-09-29 Japan Science And Technology Agency マイクロ波プラズマ滅菌方法および装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865796A (enrdf_load_stackoverflow) * 1971-12-13 1973-09-10
JPS52156074A (en) * 1976-06-21 1977-12-26 Lilly Co Eli Plasma sterilizing method
JPS56102248A (en) * 1980-01-11 1981-08-15 Baiofuijikusu Research Ando Co Pasturization due to gas plasma added with seed
JPS56148354A (en) * 1980-04-18 1981-11-17 Tokyo Shibaura Electric Co Sterilizing treating device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865796A (enrdf_load_stackoverflow) * 1971-12-13 1973-09-10
JPS52156074A (en) * 1976-06-21 1977-12-26 Lilly Co Eli Plasma sterilizing method
JPS56102248A (en) * 1980-01-11 1981-08-15 Baiofuijikusu Research Ando Co Pasturization due to gas plasma added with seed
JPS56148354A (en) * 1980-04-18 1981-11-17 Tokyo Shibaura Electric Co Sterilizing treating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005089818A1 (ja) * 2004-03-19 2005-09-29 Japan Science And Technology Agency マイクロ波プラズマ滅菌方法および装置
JPWO2005089818A1 (ja) * 2004-03-19 2008-01-31 独立行政法人科学技術振興機構 マイクロ波プラズマ滅菌方法および装置
US7700039B2 (en) 2004-03-19 2010-04-20 Japan Science And Technology Agency Microwave plasma sterilizing method and device
JP4716457B2 (ja) * 2004-03-19 2011-07-06 独立行政法人科学技術振興機構 マイクロ波プラズマ滅菌装置およびそれを用いた滅菌方法

Also Published As

Publication number Publication date
JPH0237183B2 (enrdf_load_stackoverflow) 1990-08-22

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