JPS61104551A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS61104551A
JPS61104551A JP22576584A JP22576584A JPS61104551A JP S61104551 A JPS61104551 A JP S61104551A JP 22576584 A JP22576584 A JP 22576584A JP 22576584 A JP22576584 A JP 22576584A JP S61104551 A JPS61104551 A JP S61104551A
Authority
JP
Japan
Prior art keywords
sample
image
electron microscope
optical lens
television camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22576584A
Other languages
Japanese (ja)
Inventor
Kazuo Nishii
西伊　一生
Shuji Kokubu
国分　修治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22576584A priority Critical patent/JPS61104551A/en
Publication of JPS61104551A publication Critical patent/JPS61104551A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable the sample and an attached device located near the sample to be monitored during image observation by an electron microscope by projecting an image of the desired area on a reflection mirror installed near the sample and then using an optical lens to magnify the projected image before using a television camera to observe the magnified image. CONSTITUTION:A reflection mirror 2 the position and the location of which can be varied is placed inside a pole piece 4 through an opening of a magnetic path 5. An optical lens 3 is installed in another hole of the magnetic path 5 from which the image reflected by the reflection mirror 2 can be seen. A television camera 6 is installed near the optical lens 3. The location and the position of the reflection mirror 2 are controlled so that the image of the observation area is projected upon the television camera 6. The reflected image is magnified by the optical lens 3 and the magnified image is displayed on a CRT monitor 7 by the television camera 6. Accordingly, during image observation by an electron microscope, it is possible to observe the sample and even the minute area of a device located near the sample.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は電子顕微鏡の試料及び試料周辺装置を容易にａ
ｌｌ察する装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention facilitates the preparation of electron microscope samples and sample peripheral equipment.
This invention relates to a device for monitoring.

〔発明の背景〕[Background of the invention]

従来の試料部のａ察法を第２図に示す。 Figure 2 shows the conventional method for a-detecting a sample section.

電子顕微鏡の光軸８上に試料１を置き、電子顕微鏡像を
観察后、光学顕微鏡の光軸９まで試料移動機構で試料１
を移動する。光源ランプ１０で試料ｌを照らし、光学レ
ンズ３で拡大して電子顕微鏡像と同じ場所を観察する。Place the sample 1 on the optical axis 8 of the electron microscope, and after observing the electron microscope image, move the sample 1 to the optical axis 9 of the optical microscope using the sample moving mechanism.
move. A sample 1 is illuminated with a light source lamp 10 and magnified with an optical lens 3 to observe the same location as the electron microscope image.

この方式では、付属装置を使用しているとき、試料の同
じ箇所を観察することは可能でも、同時に観察出来ない
ため、同条件での観察が困難である。又、付属装置の動
作ｗＡ察が出来ないという欠点がある。In this method, when using an attached device, it is possible to observe the same part of the sample, but it is not possible to observe it at the same time, making it difficult to observe under the same conditions. Another drawback is that it is not possible to predict the operation of the attached device.

〔発明の目的〕[Purpose of the invention]

本発明の目的は試料及び試料周辺で動作する付属装置を
、像観察の状態で監視する装置を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus for monitoring a sample and ancillary devices operating around the sample in an image observation state.

〔発明の概要〕[Summary of the invention]

本発明は試料近傍に設置した反射鏡に目的の箇所を写し
、これを光学レンズで拡大して、テレビカメラでｉｎす
るようにしたものである。In the present invention, a target location is imaged on a reflecting mirror placed near the sample, magnified with an optical lens, and then viewed with a television camera.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第１図により説明する。方向
と位置の調節可能な反射鏡２を対物磁路５の側面より対
物ポールピース４内に設置する。An embodiment of the present invention will be described below with reference to FIG. A reflecting mirror 2 whose direction and position are adjustable is installed in the objective pole piece 4 from the side of the objective magnetic path 5.

反射鏡２の反射像が見える別の穴に光学レンズ３を設け
、これを通してテレビカメラ６が設けられている。観察
したい箇所が写るように反射鏡２の位置と方向を調節す
る。この反射像を光学レンズ３で拡大してテレビカメラ
６でＣＲＴモニター７に写し観察する。An optical lens 3 is provided in another hole through which the reflected image of the reflecting mirror 2 can be seen, and a television camera 6 is provided through this. Adjust the position and direction of the reflecting mirror 2 so that the desired spot is captured. This reflected image is magnified with an optical lens 3 and is displayed on a CRT monitor 7 with a television camera 6 for observation.

本実施例によれば電子顕微鏡像観察の状態で、試料及び
試料周辺装置の細部まで観察できる効果がある。According to this embodiment, it is possible to observe even the details of the sample and the surrounding devices of the sample in the state of electron microscope image observation.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、試料周辺での付属装置の動作が細かく
確認できるので、付属装置の誤動作を無くし、効率向上
の効果がある。According to the present invention, since the operation of the attached device around the sample can be confirmed in detail, malfunctions of the attached device can be eliminated and efficiency can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の電子顕微鏡試料部近傍の縦断面図、第
２図は従来技術を説明する構成図である。 １・・・試料、２・・・反射鏡、３・・・光学レンズ、
４・・・対物ポールピース、５・・・対物磁路、６・・
・テレビカメラ、７・・・ＣＲＴモニター、８・・・電
子顕微鏡の光軸、９・・・光学顕微鏡の光軸、１０・・
・光源ランプ、１１・・・試料移動機構。FIG. 1 is a longitudinal cross-sectional view of the vicinity of a sample portion of an electron microscope according to the present invention, and FIG. 2 is a configuration diagram illustrating the prior art. 1... Sample, 2... Reflecting mirror, 3... Optical lens,
4...Objective pole piece, 5...Objective magnetic path, 6...
・Television camera, 7... CRT monitor, 8... Optical axis of electron microscope, 9... Optical axis of optical microscope, 10...
- Light source lamp, 11...sample movement mechanism.

Claims (1)

【特許請求の範囲】[Claims] １、電子顕微鏡の試料及び試料周辺を観察する装置にお
いて、前記試料近傍に反射鏡を設け前記反射鏡の反射像
を拡大して前記電子顕微鏡の像観察状態で観察する装置
を設けたことを特徴とする電子顕微鏡。1. An apparatus for observing a sample and the surrounding area of the electron microscope, characterized in that a reflecting mirror is provided near the sample, and a device is provided for magnifying the reflected image of the reflecting mirror and observing it in the image observation state of the electron microscope. electron microscope.
JP22576584A 1984-10-29 1984-10-29 Electron microscope Pending JPS61104551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22576584A JPS61104551A (en) 1984-10-29 1984-10-29 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22576584A JPS61104551A (en) 1984-10-29 1984-10-29 Electron microscope

Publications (1)

Publication Number Publication Date
JPS61104551A true JPS61104551A (en) 1986-05-22

Family

ID=16834453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22576584A Pending JPS61104551A (en) 1984-10-29 1984-10-29 Electron microscope

Country Status (1)

Country Link
JP (1) JPS61104551A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0641011A2 (en) * 1993-08-26 1995-03-01 Hitachi, Ltd. An electron beam apparatus
JP2008192616A (en) * 2007-02-05 2008-08-21 Fei Co Device for observing sample with particle beam and optical microscope
EP2419215A1 (en) * 2009-04-15 2012-02-22 Nanofactory Instruments AB Optical probing in electron microscopes
WO2016037198A1 (en) * 2014-09-12 2016-03-17 Technische Universität Wien Device and system for redirecting and measuring cathodoluminescence light in a transmission electron microscope

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0641011A2 (en) * 1993-08-26 1995-03-01 Hitachi, Ltd. An electron beam apparatus
EP0641011A3 (en) * 1993-08-26 1995-04-19 Hitachi Ltd An electron beam apparatus.
US5598002A (en) * 1993-08-26 1997-01-28 Hitachi, Ltd. Electron beam apparatus
JP2008192616A (en) * 2007-02-05 2008-08-21 Fei Co Device for observing sample with particle beam and optical microscope
EP2419215A1 (en) * 2009-04-15 2012-02-22 Nanofactory Instruments AB Optical probing in electron microscopes
EP2419215A4 (en) * 2009-04-15 2013-12-25 Nanofactory Instruments Ab Optical probing in electron microscopes
WO2016037198A1 (en) * 2014-09-12 2016-03-17 Technische Universität Wien Device and system for redirecting and measuring cathodoluminescence light in a transmission electron microscope

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