JPS61102828U - - Google Patents

Info

Publication number
JPS61102828U
JPS61102828U JP18608284U JP18608284U JPS61102828U JP S61102828 U JPS61102828 U JP S61102828U JP 18608284 U JP18608284 U JP 18608284U JP 18608284 U JP18608284 U JP 18608284U JP S61102828 U JPS61102828 U JP S61102828U
Authority
JP
Japan
Prior art keywords
region
cantilever
cantilever beam
resistance
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18608284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037796Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18608284U priority Critical patent/JPH037796Y2/ja
Publication of JPS61102828U publication Critical patent/JPS61102828U/ja
Application granted granted Critical
Publication of JPH037796Y2 publication Critical patent/JPH037796Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP18608284U 1984-12-10 1984-12-10 Expired JPH037796Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18608284U JPH037796Y2 (https=) 1984-12-10 1984-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18608284U JPH037796Y2 (https=) 1984-12-10 1984-12-10

Publications (2)

Publication Number Publication Date
JPS61102828U true JPS61102828U (https=) 1986-06-30
JPH037796Y2 JPH037796Y2 (https=) 1991-02-26

Family

ID=30743544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18608284U Expired JPH037796Y2 (https=) 1984-12-10 1984-12-10

Country Status (1)

Country Link
JP (1) JPH037796Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029013A1 (ja) * 2003-09-22 2005-03-31 Hosiden Corporation 振動センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029013A1 (ja) * 2003-09-22 2005-03-31 Hosiden Corporation 振動センサ

Also Published As

Publication number Publication date
JPH037796Y2 (https=) 1991-02-26

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