JPS61102828U - - Google Patents

Info

Publication number
JPS61102828U
JPS61102828U JP18608284U JP18608284U JPS61102828U JP S61102828 U JPS61102828 U JP S61102828U JP 18608284 U JP18608284 U JP 18608284U JP 18608284 U JP18608284 U JP 18608284U JP S61102828 U JPS61102828 U JP S61102828U
Authority
JP
Japan
Prior art keywords
region
cantilever
cantilever beam
resistance
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18608284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037796Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18608284U priority Critical patent/JPH037796Y2/ja
Publication of JPS61102828U publication Critical patent/JPS61102828U/ja
Application granted granted Critical
Publication of JPH037796Y2 publication Critical patent/JPH037796Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP18608284U 1984-12-10 1984-12-10 Expired JPH037796Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18608284U JPH037796Y2 (enExample) 1984-12-10 1984-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18608284U JPH037796Y2 (enExample) 1984-12-10 1984-12-10

Publications (2)

Publication Number Publication Date
JPS61102828U true JPS61102828U (enExample) 1986-06-30
JPH037796Y2 JPH037796Y2 (enExample) 1991-02-26

Family

ID=30743544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18608284U Expired JPH037796Y2 (enExample) 1984-12-10 1984-12-10

Country Status (1)

Country Link
JP (1) JPH037796Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029013A1 (ja) * 2003-09-22 2005-03-31 Hosiden Corporation 振動センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029013A1 (ja) * 2003-09-22 2005-03-31 Hosiden Corporation 振動センサ

Also Published As

Publication number Publication date
JPH037796Y2 (enExample) 1991-02-26

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