JPS61102828U - - Google Patents
Info
- Publication number
- JPS61102828U JPS61102828U JP18608284U JP18608284U JPS61102828U JP S61102828 U JPS61102828 U JP S61102828U JP 18608284 U JP18608284 U JP 18608284U JP 18608284 U JP18608284 U JP 18608284U JP S61102828 U JPS61102828 U JP S61102828U
- Authority
- JP
- Japan
- Prior art keywords
- region
- cantilever
- cantilever beam
- resistance
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18608284U JPH037796Y2 (enExample) | 1984-12-10 | 1984-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18608284U JPH037796Y2 (enExample) | 1984-12-10 | 1984-12-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61102828U true JPS61102828U (enExample) | 1986-06-30 |
| JPH037796Y2 JPH037796Y2 (enExample) | 1991-02-26 |
Family
ID=30743544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18608284U Expired JPH037796Y2 (enExample) | 1984-12-10 | 1984-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037796Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005029013A1 (ja) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | 振動センサ |
-
1984
- 1984-12-10 JP JP18608284U patent/JPH037796Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005029013A1 (ja) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | 振動センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037796Y2 (enExample) | 1991-02-26 |