JPS61102045U - - Google Patents
Info
- Publication number
- JPS61102045U JPS61102045U JP18790384U JP18790384U JPS61102045U JP S61102045 U JPS61102045 U JP S61102045U JP 18790384 U JP18790384 U JP 18790384U JP 18790384 U JP18790384 U JP 18790384U JP S61102045 U JPS61102045 U JP S61102045U
- Authority
- JP
- Japan
- Prior art keywords
- processing equipment
- semiconductor wafers
- processed
- self
- propelled vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18790384U JPS61102045U ( ) | 1984-12-10 | 1984-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18790384U JPS61102045U ( ) | 1984-12-10 | 1984-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61102045U true JPS61102045U ( ) | 1986-06-28 |
Family
ID=30745375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18790384U Pending JPS61102045U ( ) | 1984-12-10 | 1984-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61102045U ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007269071A (ja) * | 2006-03-30 | 2007-10-18 | Asyst Shinko Inc | 無人搬送装置 |
-
1984
- 1984-12-10 JP JP18790384U patent/JPS61102045U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007269071A (ja) * | 2006-03-30 | 2007-10-18 | Asyst Shinko Inc | 無人搬送装置 |