JPS6110164Y2 - - Google Patents

Info

Publication number
JPS6110164Y2
JPS6110164Y2 JP1977020414U JP2041477U JPS6110164Y2 JP S6110164 Y2 JPS6110164 Y2 JP S6110164Y2 JP 1977020414 U JP1977020414 U JP 1977020414U JP 2041477 U JP2041477 U JP 2041477U JP S6110164 Y2 JPS6110164 Y2 JP S6110164Y2
Authority
JP
Japan
Prior art keywords
light
light spot
optical system
surface accuracy
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977020414U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53115050U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977020414U priority Critical patent/JPS6110164Y2/ja
Publication of JPS53115050U publication Critical patent/JPS53115050U/ja
Application granted granted Critical
Publication of JPS6110164Y2 publication Critical patent/JPS6110164Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1977020414U 1977-02-22 1977-02-22 Expired JPS6110164Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977020414U JPS6110164Y2 (enrdf_load_stackoverflow) 1977-02-22 1977-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977020414U JPS6110164Y2 (enrdf_load_stackoverflow) 1977-02-22 1977-02-22

Publications (2)

Publication Number Publication Date
JPS53115050U JPS53115050U (enrdf_load_stackoverflow) 1978-09-13
JPS6110164Y2 true JPS6110164Y2 (enrdf_load_stackoverflow) 1986-04-02

Family

ID=28851347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977020414U Expired JPS6110164Y2 (enrdf_load_stackoverflow) 1977-02-22 1977-02-22

Country Status (1)

Country Link
JP (1) JPS6110164Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319412B2 (enrdf_load_stackoverflow) * 1973-07-31 1978-06-21

Also Published As

Publication number Publication date
JPS53115050U (enrdf_load_stackoverflow) 1978-09-13

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