JPS61100984A - レ−ザ干渉計 - Google Patents

レ−ザ干渉計

Info

Publication number
JPS61100984A
JPS61100984A JP59221606A JP22160684A JPS61100984A JP S61100984 A JPS61100984 A JP S61100984A JP 59221606 A JP59221606 A JP 59221606A JP 22160684 A JP22160684 A JP 22160684A JP S61100984 A JPS61100984 A JP S61100984A
Authority
JP
Japan
Prior art keywords
light
total reflection
sample
reflection mirror
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59221606A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476237B2 (enExample
Inventor
Minoru Kimura
実 木村
Hidemi Takahashi
秀美 高橋
Reiji Sano
佐野　令而
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59221606A priority Critical patent/JPS61100984A/ja
Publication of JPS61100984A publication Critical patent/JPS61100984A/ja
Publication of JPH0476237B2 publication Critical patent/JPH0476237B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
JP59221606A 1984-10-22 1984-10-22 レ−ザ干渉計 Granted JPS61100984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221606A JPS61100984A (ja) 1984-10-22 1984-10-22 レ−ザ干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221606A JPS61100984A (ja) 1984-10-22 1984-10-22 レ−ザ干渉計

Publications (2)

Publication Number Publication Date
JPS61100984A true JPS61100984A (ja) 1986-05-19
JPH0476237B2 JPH0476237B2 (enExample) 1992-12-03

Family

ID=16769388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221606A Granted JPS61100984A (ja) 1984-10-22 1984-10-22 レ−ザ干渉計

Country Status (1)

Country Link
JP (1) JPS61100984A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335062A (en) * 1992-11-19 1994-08-02 California Institute Of Technology Apparatus for all-optical self-aligning holographic phase modulation and motion sensing and method sensing and method for sensing such phase modulation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146587A (en) * 1977-05-26 1978-12-20 Nec Corp Laser gyro
JPS5628036A (en) * 1979-08-14 1981-03-19 Toyota Motor Corp Tandem brake oil-hydraulic controller having bypass means

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146587A (en) * 1977-05-26 1978-12-20 Nec Corp Laser gyro
JPS5628036A (en) * 1979-08-14 1981-03-19 Toyota Motor Corp Tandem brake oil-hydraulic controller having bypass means

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335062A (en) * 1992-11-19 1994-08-02 California Institute Of Technology Apparatus for all-optical self-aligning holographic phase modulation and motion sensing and method sensing and method for sensing such phase modulation

Also Published As

Publication number Publication date
JPH0476237B2 (enExample) 1992-12-03

Similar Documents

Publication Publication Date Title
US3601490A (en) Laser interferometer
US3885875A (en) Noncontact surface profilometer
US5325177A (en) Optical, interferometric hole gauge
US3729261A (en) Stabilized multipass interferometer
JPS62232503A (ja) 微小な長さを測定する装置
JPS58200137A (ja) 定在波干渉計
US4950078A (en) High accuracy differential plane mirror interferometer
US3738754A (en) Optical contacting systems for positioning and metrology systems
US3708229A (en) System for measuring optical path length across layers of small thickness
JPS61221614A (ja) 微小変位測定装置
JPS61100984A (ja) レ−ザ干渉計
US4425041A (en) Measuring apparatus
US5068525A (en) Apparatus for measuring the duration of single optical radiation pulses
JPS6183911A (ja) 光学式変位測定装置
JPH0472163B2 (enExample)
JPS62212507A (ja) レ−ザ干渉計で校正を不要とした触針式表面形状検出器
JPH0342401B2 (enExample)
JPH09325165A (ja) 圧電定数測定方法
JPH0463305A (ja) 偏光ビームスプリッタ及びレーザ干渉測長計
JPS62238089A (ja) ビ−ム光軸調整装置
JPS63168522A (ja) 干渉計の調整装置
Martin Design and use of a laser interferometer for ultrasonic bonding studies
JPS6231281B2 (enExample)
JPS6154422A (ja) 光フアイバのモ−ドフイ−ルド径測定方法および装置
JPS6226406B2 (enExample)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term