JPS61100133U - - Google Patents

Info

Publication number
JPS61100133U
JPS61100133U JP18549284U JP18549284U JPS61100133U JP S61100133 U JPS61100133 U JP S61100133U JP 18549284 U JP18549284 U JP 18549284U JP 18549284 U JP18549284 U JP 18549284U JP S61100133 U JPS61100133 U JP S61100133U
Authority
JP
Japan
Prior art keywords
wafer
mounting plate
gas flow
utility
stepped portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18549284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18549284U priority Critical patent/JPS61100133U/ja
Publication of JPS61100133U publication Critical patent/JPS61100133U/ja
Pending legal-status Critical Current

Links

JP18549284U 1984-12-06 1984-12-06 Pending JPS61100133U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18549284U JPS61100133U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18549284U JPS61100133U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Publications (1)

Publication Number Publication Date
JPS61100133U true JPS61100133U (enrdf_load_stackoverflow) 1986-06-26

Family

ID=30742961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18549284U Pending JPS61100133U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Country Status (1)

Country Link
JP (1) JPS61100133U (enrdf_load_stackoverflow)

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