JPS6339936U - - Google Patents

Info

Publication number
JPS6339936U
JPS6339936U JP13229086U JP13229086U JPS6339936U JP S6339936 U JPS6339936 U JP S6339936U JP 13229086 U JP13229086 U JP 13229086U JP 13229086 U JP13229086 U JP 13229086U JP S6339936 U JPS6339936 U JP S6339936U
Authority
JP
Japan
Prior art keywords
susceptor
disposed below
carbide layer
heating reactor
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13229086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13229086U priority Critical patent/JPS6339936U/ja
Publication of JPS6339936U publication Critical patent/JPS6339936U/ja
Pending legal-status Critical Current

Links

JP13229086U 1986-08-29 1986-08-29 Pending JPS6339936U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13229086U JPS6339936U (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13229086U JPS6339936U (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Publications (1)

Publication Number Publication Date
JPS6339936U true JPS6339936U (enrdf_load_stackoverflow) 1988-03-15

Family

ID=31031532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13229086U Pending JPS6339936U (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPS6339936U (enrdf_load_stackoverflow)

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