JPS6096536A - Furnace for producing optical fiber preform - Google Patents

Furnace for producing optical fiber preform

Info

Publication number
JPS6096536A
JPS6096536A JP20019683A JP20019683A JPS6096536A JP S6096536 A JPS6096536 A JP S6096536A JP 20019683 A JP20019683 A JP 20019683A JP 20019683 A JP20019683 A JP 20019683A JP S6096536 A JPS6096536 A JP S6096536A
Authority
JP
Japan
Prior art keywords
core tube
quartz glass
furnace core
optical fiber
carbon graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20019683A
Other languages
Japanese (ja)
Other versions
JPH0351662B2 (en
Inventor
Tsutomu Yabuki
矢吹 勉
Yoshihiro Narita
芳大 成田
Shigeo Okada
岡田 茂生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP20019683A priority Critical patent/JPS6096536A/en
Publication of JPS6096536A publication Critical patent/JPS6096536A/en
Publication of JPH0351662B2 publication Critical patent/JPH0351662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To prevent the deformation and cracking of the quartz glass core tube of a furnace, by inserting a refractory cushioning material between the carbon graphite core tube and the quartz glass core tube of a furnace. CONSTITUTION:A heat-insulating cusioning material 10 made of carbon felt is inserted between the inner surface of the carbon graphite core tube 5 and the outer surface of the quartz glass core tube 4. The cushioning material 10 is furnished with plural perforations to enable the efficient teansmission of the radiant heat from the ring heater 6 and the carbon graphite core tube 5. The porous preform 2 is put into the quartz glass core tube 4, and He gas and Cl2 gas, etc. are passed through the tube. The pressure in the quartz glass core tube 4 is controlled, the temperature is raised, and the preform 2 is converted to transparent glass by moving vertically in the tube under rotation. The life of the quartz glass core tube can be extended, and the conversion of the optical fiber preform to transparent glass can be carried out stably and continuously.

Description

【発明の詳細な説明】 〔発明の背景と目的〕 本発明は、光フアイバ用多孔質母材を脱水及び透明ガラ
ス化する場合に用いられる光ファイバ母材製造用〃l熱
炉の改良に関するものである。
[Detailed Description of the Invention] [Background and Objectives of the Invention] The present invention relates to an improvement of a thermal furnace for manufacturing an optical fiber preform used for dehydrating and transparent vitrifying a porous preform for an optical fiber. It is.

H,−o、火炎中に5iCL4.GaCl2等のハロゲ
ン化物を流し、S i O=4、GlloS等ガラス微
粒子を合成し、これらをターゲット上に付着させ多孔質
母材を得るいわゆるVAD法は、さらに、多孔質母材を
加熱炉によって透明ガラスイヒして光フアイバ母材を得
る方法である。
H,-o, 5iCL4. in flame. In the so-called VAD method, a porous base material is obtained by flowing a halide such as GaCl2, synthesizing glass particles such as S i O = 4 and GlloS, and depositing these on a target. This is a method of obtaining an optical fiber base material by forming a transparent glass.

第1図は従来の多孔質母材を透明化するのに用いられる
光ファイノ(母材製造用加熱炉の断面図である。図にお
いて、6は環状発熱体で、断熱材7内に不活性ガスのN
、が矢印Aの如く流動される加熱炉本体8内に配置され
、環状発熱体6の内(Illにはカーボングラファイト
炉芯管5が配置されている。
Fig. 1 is a cross-sectional view of an optical fin (heating furnace for producing the base material) used to make a conventional porous base material transparent. Gas N
are arranged in the heating furnace main body 8 which flows as shown by arrow A, and a carbon graphite furnace core tube 5 is arranged in the annular heating element 6 (Ill).

カーボングラファイト炉芯管5の内側に石英ガラス炉芯
管4が配設され、石英ガラス炉芯管4の内部は約180
0℃に保持されるとともにHaガス、Ctガスが矢印B
の如く流動されている。そして石英ガラス炉芯管4内で
、ターゲット1に付着された多孔質母材2を回転させな
がら上下に移動し透明ガラス化した光ファイノ(母材6
を得ている。
A quartz glass furnace core tube 4 is arranged inside the carbon graphite furnace core tube 5, and the inside of the quartz glass furnace core tube 4 is approximately 180 mm.
While the temperature is maintained at 0°C, Ha gas and Ct gas are indicated by arrow B.
It is flowing like this. Then, inside the quartz glass furnace core tube 4, the porous base material 2 attached to the target 1 is moved up and down while rotating, and the optical fins (base material 6) are turned into transparent glass.
I am getting .

尚、9はガスカーテンである。In addition, 9 is a gas curtain.

上記の構造において、石英ガラス炉芯管4は、1800
℃の算囲気にさらされ、石英ガラス炉芯管4の内側と外
側との圧力差、自重などにより変形し、さらに、カーボ
ングラファイト炉芯管5の内壁に密着し降温時に熱膨張
差により石英ガラス炉芯管4が割れ、そのため、1回し
か使用できない欠点があった。
In the above structure, the quartz glass furnace core tube 4 has a diameter of 1800 mm.
Celsius, it is deformed due to the pressure difference between the inside and outside of the quartz glass furnace core tube 4, its own weight, etc.Furthermore, it adheres closely to the inner wall of the carbon graphite furnace core tube 5, and when the temperature falls, the quartz glass deforms due to the difference in thermal expansion. There was a drawback that the furnace core tube 4 was broken, so that it could only be used once.

そこで、カーボングラファイト炉芯f5.!:石英ガラ
ス炉芯管4との間に、ガスを流し圧力を制御し変形を防
ぐようにしたが、石英ガラスは熱膨張係数が小さいとは
云いながら高温下では伸びも大きく、石英ガラス炉芯管
4の表面の各部とカーボングラファイト炉芯・g5との
間に間隙を生じ圧力制御がむずかしく、変形、クラック
が生じ易く、寿命も1〜2回であった。
Therefore, carbon graphite furnace core f5. ! : Gas was flowed between the quartz glass furnace core tube 4 and the pressure was controlled to prevent deformation, but although quartz glass has a small coefficient of thermal expansion, it also expands greatly at high temperatures, so the quartz glass furnace core Gaps were created between various parts of the surface of the tube 4 and the carbon graphite furnace core g5, making pressure control difficult, easily deforming and cracking, and having a lifespan of only one or two cycles.

本発明は上記の状況に鑑みなされたものであり、石英ガ
ラス炉芯管の変形、クラックを防止すると共に寿命を延
長できる光フアイバ母材製造用加熱炉を提供することを
目的としたものである。
The present invention was made in view of the above-mentioned situation, and an object of the present invention is to provide a heating furnace for producing an optical fiber base material that can prevent deformation and cracking of a quartz glass furnace core tube and extend its life. .

〔発明の概要〕[Summary of the invention]

本発明の光フアイバ母材製造用加熱炉は、不活性ガス雰
囲気中に配設された環状発熱体の内側に配設されるカー
ボングラファイト炉芯管と、該カーボングラファイト炉
芯管の内側に配設され内部が約1800℃に保持される
と共にガスが流動されて内圧が大気圧よシ高く保たれ、
内部でターゲットに付着された多孔質母材を回転駆動す
ると共に上下動させて光フアイバ母材が製造される石英
ガラス炉芯管とを設けてなり、上記カーボングラファイ
ト炉芯管内周と上記石英ガラス炉芯・g外周との間に耐
熱性クッション材が挿入されてなるものである。。
The heating furnace for producing optical fiber preforms of the present invention includes a carbon graphite furnace core tube disposed inside an annular heating element disposed in an inert gas atmosphere, and a carbon graphite furnace core tube disposed inside the carbon graphite furnace core tube. The inside of the tank is maintained at about 1800℃, and gas is flowed to keep the internal pressure higher than atmospheric pressure.
A quartz glass furnace core tube is provided in which an optical fiber base material is manufactured by rotating and vertically moving a porous base material attached to a target, and the inner periphery of the carbon graphite furnace core tube and the quartz glass core tube are provided. A heat-resistant cushioning material is inserted between the furnace core and the outer circumference. .

〔実施例〕〔Example〕

以下本発明の光ファイバ母材製造用カロ熱炉を実施例を
用い従来と同部品は同符号で示し同部分の構造の説明は
省略し、第2図により説明する。
Hereinafter, the Carothermal Furnace for manufacturing optical fiber preforms of the present invention will be explained with reference to Examples and FIG. 2, with parts that are the same as those of the conventional art being denoted by the same reference numerals and explanations of the structures of the same parts will be omitted.

第2図は断面図を示し、10は厚さ5−のカーボンフェ
ルトからなる耐熱性クッション材であシ、カーボングラ
ファイト炉芯管5内周と石英ガラス炉芯管4の外周との
間に挿入されている。また、クッション材1oのカーボ
ンフェルトは断熱材となってしまうので、環状発熱体6
及びカーボングラファイト炉芯d5の副射熱を効率よく
伝えるために、幅60遍にわたシ直径10++o++の
穴(図示せず)が規則正しく複数個あけられている。
FIG. 2 shows a cross-sectional view, and 10 is a heat-resistant cushioning material made of carbon felt with a thickness of 5 mm, which is inserted between the inner periphery of the carbon graphite furnace core tube 5 and the outer periphery of the quartz glass furnace core tube 4. has been done. In addition, since the carbon felt of the cushioning material 1o serves as a heat insulating material, the annular heating element 6
In order to efficiently transmit the secondary radiation heat of the carbon graphite furnace core d5, a plurality of holes (not shown) each having a diameter of 10++o++ are regularly drilled across the width of 60mm.

そして、この加熱炉において石英ガラス炉芯管4の内部
に多孔質母材2を入れ%Haガス及びCt2ガスを流し
ガス出口径を調整し1石英ガラス炉芯び4内圧が大気圧
より+1 +lll1水柱となるようにした。その鎌、
石英ガラス炉芯管4内を約1800℃に昇温し多孔質母
材2を回転させながら上下移動させて透明ガラス化し光
ファイバ母制3を得る実験を行なった。そして、実験の
結果、石英ガラス炉芯管4の変形は全く見られず、数十
回の1更用では少しづつ変形し、さらに失透現象を生じ
た。
Then, in this heating furnace, the porous base material 2 is placed inside the quartz glass furnace core tube 4, %Ha gas and Ct2 gas are flowed, and the gas outlet diameter is adjusted so that the internal pressure of the quartz glass furnace core tube 4 is +1 +lll1 from atmospheric pressure. I made it look like a water column. That sickle,
An experiment was conducted in which the temperature inside the quartz glass furnace core tube 4 was raised to about 1800° C., and the porous preform 2 was moved up and down while rotating to make it transparent vitrified to obtain an optical fiber preform 3. As a result of the experiment, no deformation of the quartz glass furnace core tube 4 was observed, and after repeated use several dozen times, it deformed little by little, and a devitrification phenomenon occurred.

しかし、昇降[1’のクラック発生もなく、数十回、約
100時間の使用が可能であった。
However, there was no cracking during lifting and lowering [1'], and it could be used several dozen times for about 100 hours.

このように本実施例の光フアイバ母材製造用加熱炉は、
カーボングラファイト炉芯管内周と石英ガラス炉芯管外
周との間にカーボンフェルトのクッション材を挿入した
ことにより、石英ガラス炉芯管の変形、クラックを防止
し著しく寿命を延長でき、透明ガラス化を安定し連続し
て行なうことができる。
In this way, the heating furnace for manufacturing optical fiber base material of this example is
By inserting a carbon felt cushioning material between the inner periphery of the carbon graphite furnace core tube and the outer periphery of the quartz glass furnace core tube, the quartz glass furnace core tube is prevented from deforming and cracking, significantly extending its life, and making transparent glass possible. It is stable and can be performed continuously.

〔発明の効果〕〔Effect of the invention〕

以上記述した如く本発明の光フアイバ母材製造用加熱炉
は、石英ガラス炉心管の変形、クラックを防止するとと
もに寿命を著しく延長することができる効果を有するも
のである。
As described above, the heating furnace for producing optical fiber preforms of the present invention has the effect of preventing deformation and cracking of the quartz glass furnace tube and significantly extending its life.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の光フアイバ母材製造用加熱炉の断面図、
第2図は本発明の光フアイバ母材製造用加熱炉の実施例
の断面図である。 1;ターゲット、2;多孔質母材、 6;光フアイバ母材、4;石英ガラス炉芯管、5;カー
ボングラファイト炉芯管、 6;環状発熱体、10;クッション材。 児 1 図 B 第 2 旧
Figure 1 is a cross-sectional view of a conventional heating furnace for manufacturing optical fiber base material.
FIG. 2 is a cross-sectional view of an embodiment of a heating furnace for producing an optical fiber preform according to the present invention. Reference Signs List 1: target, 2: porous base material, 6: optical fiber base material, 4: quartz glass furnace core tube, 5: carbon graphite furnace core tube, 6: annular heating element, 10: cushioning material. Child 1 Figure B 2nd Old

Claims (1)

【特許請求の範囲】[Claims] (1)不活性ガス雰囲気中に配設された環状発熱体の内
側に配設されるカーボングラファイト炉芯管と、該カー
ボングラファイト炉芯管の内側に配設され内部が約18
00℃に保持されると共にガスが流動されて内圧が大気
圧よシ篩く保たれ内部でターゲットに付着された多孔質
母材を回6smymすると共に上下動させて光フアイバ
母材が製造される石英ガラス炉芯管とを設けたものにお
いて、上記カーボングラファイト炉芯管内周と上記石英
ガラス炉芯・U外周との間に耐熱性クッション材が挿入
されてなることを特徴とする光ファイバ母材製造用〃口
熱炉。
(1) A carbon graphite furnace core tube disposed inside an annular heating element disposed in an inert gas atmosphere, and an internal diameter of approximately 18 mm.
The optical fiber base material is produced by keeping the porous base material attached to the target at 00°C and moving it up and down for 6 smym times while keeping the internal pressure close to atmospheric pressure by flowing gas. An optical fiber preform provided with a quartz glass furnace core tube, characterized in that a heat-resistant cushioning material is inserted between the inner periphery of the carbon graphite furnace core tube and the outer periphery of the quartz glass furnace core/U. A hot-mouth furnace for manufacturing.
JP20019683A 1983-10-26 1983-10-26 Furnace for producing optical fiber preform Granted JPS6096536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20019683A JPS6096536A (en) 1983-10-26 1983-10-26 Furnace for producing optical fiber preform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20019683A JPS6096536A (en) 1983-10-26 1983-10-26 Furnace for producing optical fiber preform

Publications (2)

Publication Number Publication Date
JPS6096536A true JPS6096536A (en) 1985-05-30
JPH0351662B2 JPH0351662B2 (en) 1991-08-07

Family

ID=16420395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20019683A Granted JPS6096536A (en) 1983-10-26 1983-10-26 Furnace for producing optical fiber preform

Country Status (1)

Country Link
JP (1) JPS6096536A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013032266A (en) * 2011-06-27 2013-02-14 Furukawa Electric Co Ltd:The Heat treatment apparatus for porous glass preform
CN105669019A (en) * 2016-04-19 2016-06-15 江苏亨通光导新材料有限公司 Manufacturing device and manufacturing method of optical fiber preform rod

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116733U (en) * 1981-01-07 1982-07-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116733U (en) * 1981-01-07 1982-07-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013032266A (en) * 2011-06-27 2013-02-14 Furukawa Electric Co Ltd:The Heat treatment apparatus for porous glass preform
CN105669019A (en) * 2016-04-19 2016-06-15 江苏亨通光导新材料有限公司 Manufacturing device and manufacturing method of optical fiber preform rod
WO2017181649A1 (en) * 2016-04-19 2017-10-26 江苏亨通光导新材料有限公司 Manufacturing device and manufacturing method for optical fiber preform rod
CN105669019B (en) * 2016-04-19 2018-08-07 江苏亨通光导新材料有限公司 The manufacturing device and its manufacturing method of preform

Also Published As

Publication number Publication date
JPH0351662B2 (en) 1991-08-07

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