JPS59184736A - Transparent vitrification of optical porous glass - Google Patents

Transparent vitrification of optical porous glass

Info

Publication number
JPS59184736A
JPS59184736A JP6031883A JP6031883A JPS59184736A JP S59184736 A JPS59184736 A JP S59184736A JP 6031883 A JP6031883 A JP 6031883A JP 6031883 A JP6031883 A JP 6031883A JP S59184736 A JPS59184736 A JP S59184736A
Authority
JP
Japan
Prior art keywords
glass
furnace
furnace core
transparent
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6031883A
Other languages
Japanese (ja)
Inventor
Kazuaki Yoshida
和昭 吉田
Masao Nishimura
西村 真雄
Akira Iino
顕 飯野
Kunio Ogura
邦男 小倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP6031883A priority Critical patent/JPS59184736A/en
Publication of JPS59184736A publication Critical patent/JPS59184736A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415Reactant delivery systems
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/02Pure silica glass, e.g. pure fused quartz
    • C03B2201/03Impurity concentration specified

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To prolong the life of furnace core pipe and to perform transparent vitrification for obtg. products of high quality and stability by using a furnace core pipe comprising an opaque quartz pipe having a high purity quartz glass layer laminated on its inside peripheral face in the stage of transforming an optical porous glass to transparent glass. CONSTITUTION:A furnace core pipe 3 is constructed by laminating a layer of high puriy puartz glass layer 5 on the inside peripheral face of an opaque quartz pipe 4 formed with an opaque quartz glass body contg. bubbles. Said opaque quartz pipe 4 has heat resistance and said quartz glass layer 5 contains substantially no heavy metallic impurities which are undesirable for obtg. requiresd light transmitting characteristics. The furnace core pipe 3 is installed to a heating furnace 1 having a heating element 2 built therein. The porous glass is fed into the furnace core pipe 3 and is heated with said heating element 2 and transparent vitrification is performed while supplying a gaseous mixture consisting of He and Cl2.

Description

【発明の詳細な説明】 不発明(は光フアイバ用母材、ロンドレンズ用t、:r
: 4;lなどを製造する隙の1工程である多孔質ガラ
スの透明ガラス化法に関する。
[Detailed description of the invention] Uninvented (base material for optical fiber, t for Rondo lens, :r
: 4; Relates to a transparent vitrification method for porous glass, which is one of the steps in producing l, etc.

VAD法、めf」けCVD法など(こよりこの種のij
j材をつくるどき、気相化学反応(こより生成さ、tI
た煤状ガラスを所定形状の多孔質ガラスとして堆積させ
ている。
VAD method, CVD method, etc.
When making J material, a gas phase chemical reaction (produced from this, tI
The sooty glass is deposited as porous glass in a predetermined shape.

例えばVAD法の場合、上記煤状ガラスを棒状に堆積さ
せて棒状多孔質ガラスをつくることとなり、外伺けCV
D法ではカラス俸−17’jはカラスパイプの外周?こ
同bηの多孔質ガラスを層状に形成することとなる。
For example, in the case of the VAD method, the above-mentioned soot-like glass is deposited in the shape of a rod to create a rod-shaped porous glass.
In method D, is the crow pay -17'j the outer circumference of the crow pipe? This bη porous glass is formed in layers.

こうしτ形成されグこ多孔質ガラスは、その後脱水処理
を兼ねた加熱ζこより透明ガラス化されるが、この際の
透明ガラス化法としでに、加tりs炉内に石英製の炉・
しパびを備えておき、不純物の混入を防ぐためHe、C
l3による?見合ガス雰囲気とした該炉心管内で多孔質
ガラスを加熱(]4400℃するのが一般的である。
The porous glass formed in this way is then turned into transparent glass by heating which also serves as a dehydration process.・
To prevent contamination with impurities, prepare a
By l3? Generally, the porous glass is heated (to 4400° C.) in the furnace tube in a mixed gas atmosphere.

上記の透明カラス化時、多孔質ガラスからHClなとの
ガスが発生ずるが、このよう4カスがし加熱炉のヒータ
を防獲する上でも炉・し・管(は心安である。
When the above-mentioned transparent glass is made, gases such as HCl are generated from the porous glass, but the furnace, glass, and tube (furnace, glass, and tube) are safe to use to protect the heater of the heating furnace.

ところが石莢製炉、b管の場合、がなり高い1ill1
点を有してはいるが、上記のようる高熱を受けるとυζ
化して変形し、しかもその外周面が結晶化して失透し破
損し易くなるのて当、し炉上・管を♀jυ1に交換しな
ければならない不経済を生じ、これを放ii’l)して
使いつつけると、安定で良好な透明ガラス化が期待でき
なくなる。
However, in the case of stone pod making furnaces and b-tubes, the 1ill1
However, when exposed to high heat as mentioned above, υζ
In addition, the outer circumferential surface becomes crystallized, devitrified, and easily damaged, resulting in the uneconomical need to replace the furnace top and tube with ♀jυ1, which is discarded. If it is used continuously, stable and good transparent vitrification cannot be expected.

本発明は上記の問題点を輩消すべくなされたものであり
、以下その具体的方法を図面と実施例により説明する。
The present invention has been made to eliminate the above-mentioned problems, and a specific method thereof will be explained below with reference to drawings and examples.

図において、1は加熱炉であり、この加熱炉1(・まノ
リコニノド発熱体、カーボン発熱体、フルコニア発熱体
などの発熱体2を内戚してい乙。
In the figure, 1 is a heating furnace, and this heating furnace 1 includes a heating element 2 such as a heating element, a carbon heating element, a fulconium heating element, etc.

さら(こン1(こおいて、(3)(は泡等が混入して不
透明となった石英系ガラス体で形成されグこ不透明石英
管4の内周ゴ11に高純度の石英ガラス層5を積層して
なる炉心管であり、その不透明石英管4は耐熱性を有し
、石英ガラス層6は光伝送特性上好寸しくない重金1.
・バネ鈍物(Fe1Cu。
In addition, (3) is made of a quartz-based glass body that has become opaque due to the inclusion of bubbles, etc. A high-purity quartz glass layer is placed on the inner circumferential wall 11 of the opaque quartz tube 4. The opaque quartz tube 4 has heat resistance, and the quartz glass layer 6 is composed of a heavy metal 1.5 which is not suitable for light transmission characteristics.
- Spring blunt (Fe1Cu.

Crなど)が0才たばOに近い(実質的(こO)の高純
度どなっている。
Cr, etc.) is close to O (substantially (O)) and has a high purity.

上記の高純度石英ガラス層5を不透明石英管4の内周面
(こ形成する手段としては、既知の各(ΦCVD法によ
り生成した所定の酸化物を不透明石英管4の内周面に堆
積させるとか、ンリコーン系の有機化合物(高純度)を
不透明石気管4の内周面に塗布し、これを加熱によりガ
ラス化すればよい。
The above-mentioned high-purity quartz glass layer 5 is formed on the inner peripheral surface of the opaque quartz tube 4 by depositing a predetermined oxide produced by known ΦCVD method on the inner peripheral surface of the opaque quartz tube 4. Alternatively, an organic compound (high purity) such as lincone may be applied to the inner circumferential surface of the opaque stone trachea 4, and this may be vitrified by heating.

図中6は多孔質ガラスであり、この多孔質ガラス6に既
述のとと<VAD法によりつくられたものとか、外伺け
CVD法番こよりつくられプこものである。
In the figure, reference numeral 6 indicates porous glass, and this porous glass 6 may be made by the above-mentioned VAD method or by the external CVD method.

本発明では多孔質ガラス6を炉心管3内(こ入れ、これ
を発熱体に上り加熱するが、この際、炉・し管3内にば
He、Cr2などの混合カスを供給し、こうした条件下
で多孔質ガラス6を透明ガラス化する。
In the present invention, the porous glass 6 is placed in the furnace tube 3 and heated by the heating element. At this time, a mixture of He, Cr2, etc. is supplied into the furnace tube 3, and under these conditions Below, the porous glass 6 is made into transparent glass.

具体的な実施例として下記の条(11により多孔質ガラ
ス6を透明ガラス化した。
As a specific example, the porous glass 6 was made into transparent glass according to the following article (11).

加熱炉1の発熱体2ニジリフニツト 炉心管3の不透明石英管4:外径90+++m、内径8
0mm 炉心・管3の石英ガラス層5:厚さ2007zmの5I
O2をMC VD法により 形成したもの。
Heating element 2 of heating furnace 1 Opaque quartz tube 4 of furnace core tube 3: outer diameter 90 + + + m, inner diameter 8
0 mm Quartz glass layer 5 of core/tube 3: 5I with a thickness of 2007 zm
Formed from O2 by MC VD method.

炉心管3内の温度:1450℃ 炉、シ・管3内のガス雰囲気: f(e 201/mjn 、’0211/winに常温
でバブリングした5ocz2 を同伴させたもの。
Temperature inside the furnace tube 3: 1450°C Gas atmosphere inside the furnace tube 3: f(e 201/mjn, '0211/win accompanied by 5ocz2 bubbled at room temperature.

多孔質ガラス6:VAD法〔こよるもの、GeO2−8
10□をコアとするブレ ーデンドインデソクス光ファ イバ用。
Porous glass 6: VAD method [Koyorimono, GeO2-8
For bladed index optical fiber with 10□ core.

上記(こおいて連続して多数の多孔質ガラス6を透明ガ
ラス化したところ、不透明石英管4の1liI熱性によ
り炉心管3は変形が長く生ぜず、また、高純度石英ガラ
ス層5の存在により炉心管3内には不純物の発生がみら
れず、つぎのような好結果が得らnた。
When a large number of porous glasses 6 were successively turned into transparent glass in the above process, the core tube 3 did not deform for a long time due to the thermal properties of the opaque quartz tube 4, and due to the presence of the high-purity quartz glass layer 5, No impurities were observed in the furnace core tube 3, and the following good results were obtained.

つ−j: 9、−1+’+−材からなる石英管(従来例
)の」÷。5合は、約2週間程度で炉ノし・管に異常が
発生し・Cいるが、不発明での炉ノし・管3は約1ケ月
半の使用ζこ充分耐えた。
-j: 9, "÷" of a quartz tube (conventional example) made of -1+'+- material. In the case of the 5th case, abnormality occurred in the furnace and tube after about two weeks, but the furnace and tube 3 developed by the uninvented company withstood enough use for about one and a half months.

寸だ、従来例では炉心管異常(こより光伝送特性のよい
母材が得られないが、本発明により透明ガラス化された
母材を紡糸して得た光ファイバの場合は、平均2.4 
s aB/Km (λ= 0.8571m)と旨い伝送
特性を示した。
In the conventional example, it is not possible to obtain a base material with good optical transmission characteristics due to the abnormality of the furnace tube, but in the case of the optical fiber obtained by spinning the transparent vitrified base material according to the present invention, on average 2.4
It showed good transmission characteristics with saB/Km (λ=0.8571m).

以上説明した通り、本発明は光学系多孔質ガラスを加熱
炉により加熱して透明ガラス化する方法において、不透
明石英管の内周面に高純度の石英ガラス層を積層してな
る炉・b管を備えておき、該炉・し・管内に光学系多孔
質ガラスを入れてこれを透明ガラス化することを44徴
としているから、熱変形や不純物発生など、炉心・管の
異常を長期にわたり抑制して高品質、冒安定の透明ガラ
ス化が実現できることとなり、設(iiii而からみて
も炉心管の寿命が長いこと、その交換作業回数が少ない
ことによりかなりの経611!j、が得られ、製品のコ
ストダウンもにかrするようcC’f(る0
As explained above, the present invention is a method of heating porous glass for optical systems in a heating furnace to make it transparent vitrification. The 44 characteristics are that porous optical glass is placed inside the furnace, tubes, and tubes to make it transparent, so abnormalities in the core and tubes, such as thermal deformation and the generation of impurities, can be suppressed for a long period of time. As a result, high-quality, stable and transparent glass can be achieved, and considerable savings can be achieved due to the long life of the reactor core tube and the reduced number of replacement operations. We are trying to reduce the cost of products.

【図面の簡単な説明】[Brief explanation of drawings]

図面は不発明方法の1実施例を示した説明図である。 1  ・・・・・ カロ熱炉 2・・・・・発熱体 3 ・・・・・炉上・菅 4・・・・・不透明石英管 6・・・・・高純度石芙ガラス眉 6・・・・・多孔質ガラス 特許出願人 代理人 弁理士  井 藤   誠 甲 The drawing is an explanatory diagram showing one embodiment of the non-inventive method. 1...Carothermal furnace 2... Heating element 3 ・・・・・・Heart/Suga 4... Opaque quartz tube 6...High-purity Ishifu glass eyebrows 6...Porous glass patent applicant Agent: Patent Attorney Makoto Ifuji Instep

Claims (1)

【特許請求の範囲】[Claims] 光学系多孔質ガラスを加熱炉により加熱して透1ヅ」ガ
ラス化する方法において、不透明石芙管の内周iMj 
iC高純匿の石英力゛ラス層を積層してなる炉・し・管
を上記加熱炉内に備えておき、該炉心層内番こ光学系多
孔質ガラスを入れてこれを透明ガラス化する光学系多孔
質ガラスの透明ガラス化法。
In a method of heating porous optical glass in a heating furnace to make it transparent, the inner periphery of the opaque stone tube is
A furnace tube made of laminated iC high-purity quartz glass layers is provided in the heating furnace, and a porous optical system glass is placed inside the core layer to convert it into transparent glass. Transparent vitrification method for optical porous glass.
JP6031883A 1983-04-06 1983-04-06 Transparent vitrification of optical porous glass Pending JPS59184736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6031883A JPS59184736A (en) 1983-04-06 1983-04-06 Transparent vitrification of optical porous glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6031883A JPS59184736A (en) 1983-04-06 1983-04-06 Transparent vitrification of optical porous glass

Publications (1)

Publication Number Publication Date
JPS59184736A true JPS59184736A (en) 1984-10-20

Family

ID=13138704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6031883A Pending JPS59184736A (en) 1983-04-06 1983-04-06 Transparent vitrification of optical porous glass

Country Status (1)

Country Link
JP (1) JPS59184736A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60210541A (en) * 1984-04-05 1985-10-23 Hitachi Cable Ltd Production of base material for optical fiber
JPS62182128A (en) * 1986-02-06 1987-08-10 Shin Etsu Chem Co Ltd Production of optical fiber preform
EP0542724A2 (en) * 1987-02-16 1993-05-19 Sumitomo Electric Industries Limited Furnace for heating glass preform for optical fiber and method for producing glass preform
US5749723A (en) * 1994-06-17 1998-05-12 Tokyo Electron Limited Heat treatment apparatus
JP2004359520A (en) * 2003-06-06 2004-12-24 Toshiba Ceramics Co Ltd Method and apparatus for manufacturing synthetic silica glass
JP2010500166A (en) * 2006-08-10 2010-01-07 コーニング インコーポレイテッド Particle synthesis equipment
US8839645B2 (en) 2006-06-26 2014-09-23 Shin-Etsu Chemical Co., Ltd. Method of manufacturing optical fiber base material and apparatus of the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4892410A (en) * 1972-02-11 1973-11-30
JPS4959818A (en) * 1972-08-05 1974-06-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4892410A (en) * 1972-02-11 1973-11-30
JPS4959818A (en) * 1972-08-05 1974-06-11

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60210541A (en) * 1984-04-05 1985-10-23 Hitachi Cable Ltd Production of base material for optical fiber
JPS62182128A (en) * 1986-02-06 1987-08-10 Shin Etsu Chem Co Ltd Production of optical fiber preform
JPH0565451B2 (en) * 1986-02-06 1993-09-17 Shinetsu Chem Ind Co
EP0542724A2 (en) * 1987-02-16 1993-05-19 Sumitomo Electric Industries Limited Furnace for heating glass preform for optical fiber and method for producing glass preform
US5749723A (en) * 1994-06-17 1998-05-12 Tokyo Electron Limited Heat treatment apparatus
JP2004359520A (en) * 2003-06-06 2004-12-24 Toshiba Ceramics Co Ltd Method and apparatus for manufacturing synthetic silica glass
US8839645B2 (en) 2006-06-26 2014-09-23 Shin-Etsu Chemical Co., Ltd. Method of manufacturing optical fiber base material and apparatus of the same
EP2048120B1 (en) * 2006-06-26 2017-01-11 Shin-Etsu Chemical Co., Ltd. Process for producing optical fiber base and apparatus therefor
JP2010500166A (en) * 2006-08-10 2010-01-07 コーニング インコーポレイテッド Particle synthesis equipment
JP2012115837A (en) * 2006-08-10 2012-06-21 Corning Inc Apparatus for particle synthesis

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