JP2002047014A - Thermal shielding cylinder, device and method of manufacturing glass preform provided with it - Google Patents
Thermal shielding cylinder, device and method of manufacturing glass preform provided with itInfo
- Publication number
- JP2002047014A JP2002047014A JP2000234678A JP2000234678A JP2002047014A JP 2002047014 A JP2002047014 A JP 2002047014A JP 2000234678 A JP2000234678 A JP 2000234678A JP 2000234678 A JP2000234678 A JP 2000234678A JP 2002047014 A JP2002047014 A JP 2002047014A
- Authority
- JP
- Japan
- Prior art keywords
- heat shield
- base material
- glass base
- porous glass
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、多孔質ガラス母材
を反応容器内で加熱処理し、透明ガラス化を行ってガラ
ス母材、特には、線引きして光ファイバを得るのに好適
なガラス母材の製造に際して用いられる遮熱筒、これを
備えたガラス母材の製造装置及び製造方法に関する。BACKGROUND OF THE INVENTION The present invention relates to a glass preform which is obtained by heating a porous glass preform in a reaction vessel and vitrifying the glass preform, and in particular, a glass suitable for obtaining an optical fiber by drawing. The present invention relates to a heat shield cylinder used for manufacturing a base material, a manufacturing apparatus and a manufacturing method of a glass base material having the same.
【０００２】[0002]
【従来の技術】ＶＡＤ法やＯＶＤ法による多孔質ガラス
母材の製造は、ＳｉＣｌ4，ＧｅＣｌ4などの原料ガスを
酸素・水素火炎中に供給して火炎加水分解反応により生
成するガラス微粒子 (スート)をダミー棒もしくはコア
となる出発ターゲット棒に堆積させて多孔質ガラス母材
（スート堆積体）を合成し、さらに１,５００℃程度の
温度で脱水、透明ガラス化してガラス母材を得ている。
特に、光ファイバ用ガラス母材の合成は、透明ガラス化
中、あるいは透明ガラス化処理に先立って、多孔質ガラ
ス母材を塩素を含む脱水ガス雰囲気中で加熱することに
より、光ファイバの伝送損失の要因となる水酸基を除去
する脱水処理を行っている。2. Description of the Related Art In the production of a porous glass preform by a VAD method or an OVD method, a raw material gas such as SiCl 4 or GeCl 4 is supplied into an oxygen / hydrogen flame to produce glass fine particles (soot) produced by a flame hydrolysis reaction. ) Is deposited on a dummy rod or a starting target rod serving as a core to synthesize a porous glass base material (soot deposition body), and further dehydrated at a temperature of about 1,500 ° C. and vitrified to obtain a glass base material. I have.
In particular, in the synthesis of the glass preform for optical fiber, the transmission loss of the optical fiber is increased by heating the porous glass preform in a dehydrating gas atmosphere containing chlorine during or before the vitrification treatment. The dehydration treatment which removes the hydroxyl group which causes the above is performed.
【０００３】多孔質ガラス母材の透明ガラス化処理を、
図４を用いて説明する。多孔質ガラス母材１をシャフト
２に接続部３で接続し、炉芯管４内にセットする。その
後、回転モータ５により、シャフト２を介して多孔質ガ
ラス母材１を回転させつつ引き下げ、加熱器６で加熱
し、脱水、透明ガラス化を行う。このとき、ガス導入口
７よりＨｅ，Ｃｌ2等の焼結ガスを供給し、排気口８よ
り排気する。なお、ここでは多孔質ガラス母材１を引き
下げつつ、多孔質ガラス母材１の下部から透明ガラス化
する方法を示したが、多孔質ガラス母材１を加熱器６よ
り下方に一旦降ろしてから、引き上げつつ多孔質ガラス
母材１の上部からガラス化を行う方法もある。また、多
孔質ガラス母材１の吊り下げ部は、多孔質ガラス母材製
造時の石英ガラスからなるダミー棒もしくは出発ターゲ
ット棒（以下、単に石英ロッドという）９が吊り下げ部
材としての役割を担っている。[0003] The transparent vitrification of the porous glass base material is performed by
This will be described with reference to FIG. The porous glass base material 1 is connected to the shaft 2 at the connection part 3 and set in the furnace core tube 4. Thereafter, the porous glass preform 1 is pulled down while being rotated by the rotary motor 5 via the shaft 2, heated by the heater 6, and dehydrated and transparent vitrified. At this time, a sintering gas such as He or Cl 2 is supplied from the gas inlet 7 and exhausted from the exhaust port 8. Here, a method is shown in which the porous glass preform 1 is lowered and the transparent glass is made from the lower portion of the porous glass preform 1, but after the porous glass preform 1 is once lowered below the heater 6, There is also a method in which vitrification is performed from the upper portion of the porous glass base material 1 while lifting. In addition, a dummy rod or a starting target rod (hereinafter, simply referred to as a quartz rod) 9 made of quartz glass at the time of manufacturing the porous glass base material plays a role as a hanging member of the suspended portion of the porous glass base material 1. ing.
【０００４】図５および図６に、多孔質ガラス母材上部
の石英ロッド９とシャフト２との接続の例を示す。図５
は、石英ロッド９の上端部にくさび部１０を設け、シャ
フト２の下端部に取り付けられたシャフト管１１の中に
くさび部１０を差し込み、シャフト管１１の側面にあけ
られた穴１２にピン１３を差し込むことで接続してい
る。図６の接続例は、石英ロッド９の上端に凸部１４を
設け、シャフト２の下端に取り付けられた嵌合部材１５
の嵌合部１６に、凸部１４を嵌め合わせるものである。
シャフト２、シャフト管１１および嵌合部材１５には、
耐熱性、耐熱衝撃性、耐塩素性等が要求されるため、こ
れらの特性を満たすＳｉ3Ｎ4が用いられることが多い。FIGS. 5 and 6 show an example of connection between the quartz rod 9 and the shaft 2 on the porous glass base material. FIG.
Is provided with a wedge portion 10 at the upper end portion of the quartz rod 9, inserts the wedge portion 10 into a shaft tube 11 attached to the lower end portion of the shaft 2, and inserts a pin 13 into a hole 12 formed in the side surface of the shaft tube 11. To connect. In the connection example of FIG. 6, a projection 14 is provided on the upper end of the quartz rod 9, and a fitting member 15 attached to the lower end of the shaft 2 is provided.
The convex portion 14 is fitted to the fitting portion 16 of FIG.
The shaft 2, the shaft tube 11, and the fitting member 15 include:
Since heat resistance, thermal shock resistance, chlorine resistance and the like are required, Si 3 N 4 satisfying these characteristics is often used.
【０００５】透明ガラス化の進行にともない、接続部3
が加熱器６およびその周囲の断熱材等の高温体に接近す
ると、接続部3の温度は上がり高くなる。Ｓｉ3Ｎ4と石
英ガラスの熱膨張率を比較すると、Ｓｉ3Ｎ4の方が大き
いため、接続部3が高温になると、図５の接続構成で
は、シャフト管１１がより大きく膨張し、くさび部１０
は矢印１７の方向にずれ石英ロッド９が下がる。この
後、透明ガラス化が終了して接続部３が高温体から遠ざ
けられ、接続部3の温度が下がると、シャフト管１１は
収縮し、くさび部１０がピン１３とシャフト管１１の間
で圧縮力を受け、くさび部１０やシャフト管１１、ピン
１３等が破損する。このような現象を「焼きばめ」と称
している。[0005] As the transparent vitrification progresses, the connecting portion 3
Approaching the heater 6 and a high-temperature body such as a heat insulating material around the heater 6, the temperature of the connection portion 3 rises and rises. Comparing the thermal expansion coefficients of Si 3 N 4 and quartz glass, Si 3 N 4 is larger, so when the connecting portion 3 becomes hot, the shaft tube 11 expands more in the connection configuration of FIG. Part 10
Is shifted in the direction of arrow 17 and the quartz rod 9 is lowered. Thereafter, when the vitrification is completed and the connecting portion 3 is moved away from the high-temperature body and the temperature of the connecting portion 3 decreases, the shaft tube 11 contracts, and the wedge portion 10 is compressed between the pin 13 and the shaft tube 11. Under the force, the wedge portion 10, the shaft tube 11, the pin 13 and the like are damaged. Such a phenomenon is called "shrink fit".
【０００６】図６の接続構成においても高温体への接近
・離間があると、同様に焼きばめが起こり、凸部１４や
嵌合部１６が破損する。これらの破損にともない、高温
の多孔質ガラス母材（あるいは、透明ガラス化されたガ
ラス母材）は落下し、炉芯管や加熱器等の破損を引き起
こす。これは非常に危険であり、かつ製造コストを押し
上げる。従来、このような焼きばめによる事故を防ぐた
め、多孔質ガラス母材の上端から接続部までの距離を十
分に離し、接続部が高温にならないようにしていた。In the connection configuration shown in FIG. 6, if there is an approach to or separation from a high-temperature body, a shrink fit similarly occurs, and the protrusions 14 and the fitting portions 16 are damaged. Along with these damages, the high-temperature porous glass base material (or the transparent vitrified glass base material) falls, causing damage to the furnace core tube, the heater, and the like. This is very dangerous and increases manufacturing costs. Conventionally, in order to prevent such an accident due to shrink fitting, the distance from the upper end of the porous glass base material to the connecting portion has been sufficiently set so that the connecting portion does not become hot.
【０００７】しかしながら、ＯＶＤ法で多孔質ガラス母
材を合成しガラス化する場合、上記したように、シャフ
トとの接続部から、ガラス化される多孔質ガラス母材有
効部の上端位置までの距離がかなり必要とされるため、
図７（ａ）に示すように、チャック間距離１８に対して
ガラス化される多孔質ガラス母材１の有効部１９の長さ
が相対的に短くなるが、接続部３と有効部１９の上端位
置までの距離２０を短くすることができれば、図７
（ｂ）に示すように、チャック間距離１８を十分に活用
してガラス微粒子堆積用バーナ２１の移動範囲を広げる
ことができ、より長尺の多孔質ガラス母材１を合成して
ガラス化することができ、多孔質ガラス母材１の全長に
対する有効部１９の比率が上がり、製品になり得ず廃棄
処分されるテーパー部２２の比率を相対的に下げること
ができる。However, when the porous glass preform is synthesized and vitrified by the OVD method, as described above, the distance from the connection portion with the shaft to the upper end position of the effective portion of the porous glass preform to be vitrified is increased. Is required so much that
As shown in FIG. 7A, the length of the effective portion 19 of the porous glass preform 1 to be vitrified with respect to the chuck distance 18 is relatively short. If the distance 20 to the upper end position can be reduced, FIG.
As shown in (b), the range of movement of the glass particle deposition burner 21 can be expanded by making full use of the distance 18 between the chucks, and a longer porous glass preform 1 is synthesized and vitrified. As a result, the ratio of the effective portion 19 to the entire length of the porous glass base material 1 increases, and the ratio of the tapered portion 22 that cannot be a product and is discarded can be relatively reduced.
【０００８】[0008]
【発明が解決しようとする課題】本発明は、上記事情に
鑑みてなされたものであり、多孔質ガラス母材を吊り下
げるシャフトと多孔質ガラス母材上部の石英ロッドとの
接続部の温度上昇を抑えることができ、接続部から多孔
質ガラス母材の有効部までの距離を短くすることのでき
るガラス母材を得るのに好適な遮熱筒、これを備えたガ
ラス母材の製造装置及び製造方法を提供することを課題
としている。SUMMARY OF THE INVENTION The present invention has been made in consideration of the above circumstances, and has been made in view of the above circumstances, and raises the temperature rise at the connection between a shaft for suspending a porous glass base material and a quartz rod on the porous glass base material. Can be suppressed, a heat shield cylinder suitable for obtaining a glass base material capable of shortening the distance from the connection portion to the effective portion of the porous glass base material, a glass base material manufacturing apparatus including the same, and It is an object to provide a manufacturing method.
【０００９】[0009]
【課題を解決するための手段】本発明の遮熱筒は、反応
容器内に吊り下げられた多孔質ガラス母材を加熱処理
し、透明ガラス化を行う装置において、多孔質ガラス母
材を吊り下げるシャフトと、多孔質ガラス母材上部の石
英ロッドとの接続部が加熱手段および周囲の高温体から
受ける輻射熱量を低減するために、該接続部近傍に設け
られた筒状の接続部遮熱部材であることを特徴としてい
る。なお、この遮熱筒は、耐熱性および耐塩素性を有す
る素材、例えば、表面をサンドブラスト処理された石英
ガラス、不透明石英ガラス、Ｓｉ3Ｎ4等を用いて形成
し、接続部近傍の周囲を取り囲むように設けるのが好ま
しい。本発明のガラス母材の製造装置は、反応容器内に
吊り下げられた多孔質ガラス母材を加熱処理し、透明ガ
ラス化を行う装置であって、多孔質ガラス母材を吊り下
げるシャフトと多孔質ガラス母材上部の石英ロッドとの
接続部が加熱手段および周囲の高温体から受ける輻射熱
量を低減するため、該接続部近傍に遮熱筒を備えたもの
であり、該遮熱筒は接続部を覆うように設けられる。ま
た、遮熱筒を下部からの輻射熱を防ぐための遮熱板上に
設けてもよい。本発明のガラス母材の製造方法は、この
ような製造装置を用いて製造するものである。SUMMARY OF THE INVENTION A heat shielding cylinder according to the present invention is a device for heat-treating a porous glass base material suspended in a reaction vessel to form a vitrified transparent glass substrate. In order to reduce the amount of radiant heat received from the heating means and the surrounding high-temperature body at the connection portion between the shaft to be lowered and the quartz rod on the porous glass base material, a cylindrical connection portion heat shield provided near the connection portion It is characterized by being a member. The heat shield tube is made of a material having heat resistance and chlorine resistance, for example, quartz glass whose surface is sandblasted, opaque quartz glass, Si 3 N 4 or the like, and is formed around the vicinity of the connection portion. Preferably, it is provided so as to surround it. The apparatus for manufacturing a glass preform of the present invention is an apparatus for performing heat treatment on a porous glass preform suspended in a reaction vessel to perform transparent vitrification, and a shaft for suspending the porous glass preform and a porous glass. In order to reduce the amount of radiant heat received from the heating means and the surrounding high-temperature body at the connection portion with the quartz rod on the top of the glass base material, a heat shield tube is provided near the connection portion, and the heat shield tube is connected It is provided so as to cover the part. Further, the heat shield cylinder may be provided on a heat shield plate for preventing radiant heat from below. The method for manufacturing a glass base material according to the present invention is manufactured using such a manufacturing apparatus.
【００１０】[0010]
【発明の実施の形態】図１〜図３を用いて本発明のガラ
ス母材の製造装置をさらに詳細に説明する。図１は、本
発明のガラス母材の製造装置を示す概略断面図であり、
多孔質ガラス母材１は炉心管４内にセットされ、遮熱筒
２３が、多孔質ガラス母材上部の石英ロッド９とシャフ
ト２との接続部３を覆うように設けられている。多孔質
ガラス母材１は、回転モータ５によってシャフト２によ
って回転しつつ引き下げられ、加熱器６で加熱されて透
明ガラス化が行われる。この間、ガス導入口７からＨｅ
等の焼結ガスが供給され、排気口８から排気される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The apparatus for manufacturing a glass base material of the present invention will be described in more detail with reference to FIGS. FIG. 1 is a schematic sectional view showing an apparatus for manufacturing a glass base material of the present invention,
The porous glass preform 1 is set in a furnace tube 4, and a heat shield tube 23 is provided so as to cover the connection portion 3 between the quartz rod 9 and the shaft 2 on the porous glass preform. The porous glass base material 1 is pulled down while being rotated by the rotation motor 5 by the shaft 2, and is heated by the heater 6 to perform vitrification. During this time, He is introduced from the gas inlet 7.
Is supplied and exhausted from the exhaust port 8.
【００１１】遮熱筒２３は、石英ロッド９に形成された
凸部２４上に、接続部３を覆うように装着される。この
とき、凸部２４の上部に平面部を設け、遮熱筒２３と凸
部２４の間に焼きばめが起こらないように装着するのが
望ましい。遮熱筒２３は、接続部３が受ける、加熱器６
やその周囲に配設された断熱材等の高温体による下方お
よび側方からの輻射熱を遮るのに十分な大きさとする必
要がある。The heat shield tube 23 is mounted on the convex portion 24 formed on the quartz rod 9 so as to cover the connecting portion 3. At this time, it is desirable to provide a flat part on the upper part of the convex part 24 and mount it so that shrink fitting does not occur between the heat shield cylinder 23 and the convex part 24. The heat shield cylinder 23 is connected to the heater 6
It should be large enough to block radiant heat from below and from the sides due to a high-temperature body such as a heat insulating material or the like provided around the heat sink.
【００１２】図２に示す態様は、石英ロッド９に形成さ
れた凸部２４上に遮熱板２５を配設し、この上に遮熱筒
２３を設けたものであり、下方からの熱の多くは遮熱板
２５で遮ぎられるため、さらに接続部３に対する遮熱性
能が向上し、接続部への熱負荷が低減する。この場合、
遮熱筒自体には、下方からの輻射熱を遮る手段を設けな
くてもよい。遮熱筒２３と遮熱板２５の併用は、図１に
示した遮熱筒２３のみを使用する態様よりもさらに有効
である。In the embodiment shown in FIG. 2, a heat shield plate 25 is provided on a convex portion 24 formed on a quartz rod 9 and a heat shield tube 23 is provided thereon. Since many are blocked by the heat shield plate 25, the heat shielding performance for the connection portion 3 is further improved, and the heat load on the connection portion is reduced. in this case,
The heat shield cylinder itself does not need to be provided with a means for blocking radiant heat from below. The combined use of the heat shield cylinder 23 and the heat shield plate 25 is more effective than the mode using only the heat shield cylinder 23 shown in FIG.
【００１３】図３に、本発明の遮熱筒２３の構造の一例
を示す。多孔質ガラス母材上部の石英ロッドとシャフト
を接続した後、接続部を覆うように接続部近傍に、石英
ロッドに設けられた凸部上に３面遮熱部品２６を装着
し、これに１面遮熱部品２７を引っ掛けるようにして取
り付ける。３面遮熱部品２６と１面遮熱部品２７との隙
間を通って輻射熱が接続部近傍に到達しないように、１
面遮熱部品２７には輻射熱漏入防止板２８が設けられて
いる。遮熱筒２３の上方は開放され、内部に熱がこもら
ない構造になっている。FIG. 3 shows an example of the structure of the heat shield cylinder 23 of the present invention. After connecting the quartz rod and the shaft on the porous glass base material to the shaft, a three-sided heat shield component 26 is mounted on the convex portion provided on the quartz rod near the connection portion so as to cover the connection portion. The surface heat shield 27 is hooked and attached. 1 so that radiant heat does not reach the vicinity of the connection portion through the gap between the three-side heat shield component 26 and the one-side heat shield component 27.
The surface heat shield component 27 is provided with a radiant heat leakage prevention plate 28. The upper part of the heat shield cylinder 23 is opened so that heat is not stored inside.
【００１４】遮熱筒および遮熱板には、輻射熱遮蔽能が
要求されるため、耐熱性、耐熱衝撃性、耐塩素性を有す
る材質のものが使用される。これらの要求を満たすもの
としてＳｉ3Ｎ4が挙げられるが、Ｓｉ3Ｎ4は比較的高価
な材質であり、これに代るものとして、不透明石英ガラ
スや、より安価なものとして石英ガラス表面にサンドブ
ラスト処理を施したもの等を用いることもできる。な
お、遮熱筒は、接続部遮熱部材として設置されるもので
あり、その形状は接続部の周囲を取り囲むものであれ
ば、円柱状、楕円柱状、角柱状のいずれであってもよ
い。また、遮熱筒の低部は有底とするが、遮熱板上に設
置する場合は、無底のものであってもよい。Since the heat shielding cylinder and the heat shielding plate are required to have a radiation heat shielding ability, a material having heat resistance, thermal shock resistance and chlorine resistance is used. Si 3 N 4 can be cited as a material that satisfies these requirements, but Si 3 N 4 is a relatively expensive material. As an alternative, opaque quartz glass or a less expensive quartz glass surface can be used. Those subjected to sandblasting can also be used. The heat shield cylinder is installed as a connection part heat shield member, and may have any of a columnar shape, an elliptical columnar shape, and a prismatic shape as long as it surrounds the periphery of the connection portion. Although the lower part of the heat shield cylinder has a bottom, when it is installed on a heat shield plate, it may have no bottom.
【００１５】[0015]
【実施例】以下に、本発明の実施例、比較例を示すが、
本発明はこれらに限定されるものではなく、様々な態様
が可能である。 （実施例１）ＯＶＤ法によって合成した直胴部の直径３
５０ｍｍφ、長さ１,９００ｍｍ、シャフトとの接続部
下端から直胴部上端までの距離が５００ｍｍの多孔質ガ
ラス母材を、図５に示したくさび方式を用いて多孔質ガ
ラス母材上部の石英ロッドと、回転自在に設けられたシ
ャフトとを接続し、遮熱板および遮熱筒を装着して、図
２に示すヒータ長４００ｍｍの加熱手段を有する装置を
用いて透明ガラス化した。このようにして多孔質ガラス
母材の直胴部上端が、ヒータ上端から２００ｍｍ下の位
置まで来るようにして、２０本の多孔質ガラス母材の焼
結、ガラス化を行ったが、焼きばめは起こらず、シャフ
ト管、ピン、くさび部のいずれにも損傷はなかった。EXAMPLES Examples of the present invention and comparative examples are shown below.
The present invention is not limited to these, and various embodiments are possible. (Example 1) Diameter 3 of a straight body synthesized by the OVD method
A porous glass base material having a diameter of 50 mmφ, a length of 1,900 mm, and a distance from the lower end of the connecting portion to the shaft to the upper end of the straight body portion of 500 mm was formed on the porous glass base material using the wedge method shown in FIG. The rod and a rotatably provided shaft were connected, a heat shield plate and a heat shield tube were attached, and the glass was transparently vitrified using an apparatus having a heater having a heater length of 400 mm shown in FIG. The sintering and vitrification of the 20 porous glass preforms were performed in such a manner that the upper end of the straight body portion of the porous glass preform reached a position 200 mm below the upper end of the heater. No shafting, pins or wedges were undamaged.
【００１６】（比較例１）ＯＶＤ法によって合成した直
胴部の直径３５０ｍｍφ、長さ１,９００ｍｍ、接続部
下端から直胴部上端までの距離が５００ｍｍの多孔質ガ
ラス母材を、図４に示すヒータ長４００ｍｍの加熱手段
を有する装置を用い、遮熱板および遮熱筒を装着せず
に、図５に示したくさび方式を用いて多孔質ガラス母材
上部の石英ロッドとシャフトとを接続し、焼結、ガラス
化を行った。このとき、多孔質ガラス母材の直胴部上端
が、ヒータ上端から１５０ｍｍ下の位置まで来たところ
で、焼きばめが起こり、シャフト管に亀裂が入った。(Comparative Example 1) FIG. 4 shows a porous glass base material having a diameter of 350 mmφ, a length of 1,900 mm, and a distance of 500 mm from the lower end of the connecting portion to the upper end of the straight body synthesized by the OVD method. Using a device having a heating means with a heater length of 400 mm as shown, connecting the quartz rod and the shaft above the porous glass base material using the wedge method shown in FIG. 5 without attaching a heat shield plate and a heat shield tube. Then, sintering and vitrification were performed. At this time, when the upper end of the straight body of the porous glass base material reached a position 150 mm below the upper end of the heater, shrink fit occurred, and a crack was formed in the shaft tube.
【００１７】[0017]
【発明の効果】本発明によれば、多孔質ガラス母材とシ
ャフトとの接続部を覆うように接続部近傍に遮熱筒を設
けたことにより、ヒータや断熱材等から受ける輻射熱が
低減し、接続部の温度上昇が抑制され、焼きばめは防止
される。これにより、接続部から母材有効部上端までの
距離を、従来よりも短くすることができる。その分、多
孔質ガラス母材の有効長を長くすることができ、廃棄さ
れるテーパー部の比率が相対的に減り、収率が向上し、
生産性が向上した。According to the present invention, radiant heat received from a heater, a heat insulating material and the like is reduced by providing a heat shield cylinder near the connection portion so as to cover the connection portion between the porous glass base material and the shaft. In addition, a rise in the temperature of the connection portion is suppressed, and shrink fit is prevented. Thereby, the distance from the connection portion to the upper end of the base material effective portion can be made shorter than before. To that extent, the effective length of the porous glass base material can be increased, the ratio of the tapered portion discarded is relatively reduced, and the yield is improved,
Productivity has improved.
【図１】 本発明のガラス母材の製造装置を示す概略縦
断面図である。FIG. 1 is a schematic longitudinal sectional view showing an apparatus for manufacturing a glass base material of the present invention.
【図２】 図１とは異なる態様のガラス母材の製造装置
を示す概略縦断面図である。FIG. 2 is a schematic longitudinal sectional view showing a manufacturing apparatus of a glass base material in a mode different from FIG.
【図３】 本発明の遮熱筒の構造の一例を示す概略斜視
図である。FIG. 3 is a schematic perspective view showing an example of the structure of the heat shield cylinder of the present invention.
【図４】 多孔質ガラス母材の透明ガラス化処理を説明
する概略縦断面図である。FIG. 4 is a schematic vertical cross-sectional view illustrating a transparent vitrification treatment of a porous glass base material.
【図５】 多孔質ガラス母材とシャフトとの接続例を示
す部分概略縦断面図である。FIG. 5 is a partial schematic longitudinal sectional view showing an example of connection between a porous glass base material and a shaft.
【図６】 多孔質ガラス母材とシャフトとの接続例を示
す部分概略縦断面図である。FIG. 6 is a partial schematic longitudinal sectional view showing an example of connection between a porous glass base material and a shaft.
【図７】 （ａ），（ｂ）は、多孔質ガラス母材の有効
部の比率を説明する概略縦断面図である。FIGS. 7A and 7B are schematic longitudinal sectional views illustrating the ratio of the effective portion of the porous glass base material.
１． 多孔質ガラス母材 ２． シャフト ３． 接続部 ４． 炉芯管 ５． 回転モータ ６． 加熱器 ７． ガス導入口 ８． 排気口 ９． 石英ロッド １０． くさび部 １１． シャフト管 １２． 穴 １３． ピン １４． 凸部 １５． 嵌合部材 １６． 嵌合部 １７． 矢印 １８． チャック間距離 １９． 有効部 ２０． 距離 ２１． ガラス微粒子堆積用バーナ ２２． テーパー部 ２３． 遮熱筒 ２４． 凸部 ２５． 遮熱板 ２６． ３面遮熱部品 ２７． １面遮熱部品 ２８． 輻射熱漏入防止板 1. 1. Porous glass base material Shaft 3. Connection part 4. Furnace core tube 5. Rotary motor 6. Heater 7. Gas inlet 8. Exhaust port 9. Quartz rod 10. Wedge part 11. Shaft tube 12. Hole 13. Pin 14. Convex part 15. Fitting member 16. Fitting part 17. Arrow 18. 19. Distance between chucks Effective part 20. Distance 21. Burner for deposition of glass particles 22. Tapered portion 23. Heat shield tube 24. Convex part 25. Heat shield plate 26. Three-sided heat shield component 27. One-sided heat shield component 28. Radiation heat leakage prevention plate
Claims (11)
ス母材を加熱処理し、透明ガラス化を行う装置におい
て、多孔質ガラス母材を吊り下げるシャフトと、多孔質
ガラス母材上部の石英ロッドとの接続部が加熱手段およ
び周囲の高温体から受ける輻射熱量を低減するために、
該接続部近傍に設けられた筒状の接続部遮熱部材である
ことを特徴とする遮熱筒。1. An apparatus for heat-treating a porous glass base material suspended in a reaction vessel to perform vitrification, comprising: a shaft for suspending the porous glass base material; and quartz on an upper portion of the porous glass base material. In order to reduce the amount of radiant heat received by the connecting part with the rod from the heating means and the surrounding high-temperature body,
A heat shield tube, characterized in that it is a tubular heat shield member provided in the vicinity of the connection portion.
囲むように設けられている請求項１に記載の遮熱筒。2. The heat shield cylinder according to claim 1, wherein the heat shield cylinder is provided so as to surround a periphery near a connection portion.
を有する請求項１又は２に記載の遮熱筒。3. The heat shield cylinder according to claim 1, wherein a material of the heat shield cylinder has heat resistance and chlorine resistance.
スト処理された石英ガラスである請求項１又は２に記載
の遮熱筒。4. The heat shield cylinder according to claim 1, wherein a material of the heat shield cylinder is quartz glass whose surface is sandblasted.
である請求項１又は２に記載の遮熱筒。5. The heat shield cylinder according to claim 1, wherein the material of the heat shield cylinder is opaque quartz glass.
求項１又は２に記載の遮熱筒。6. The heat shield cylinder according to claim 1, wherein a material of the heat shield cylinder is Si 3 N 4 .
ス母材を加熱処理し、透明ガラス化を行う装置であっ
て、多孔質ガラス母材を吊り下げるシャフトと多孔質ガ
ラス母材上部の石英ロッドとの接続部が加熱手段および
周囲の高温体から受ける輻射熱量を低減するために、該
接続部近傍に遮熱筒が設けられていることを特徴とする
ガラス母材の製造装置。7. An apparatus for subjecting a porous glass base material suspended in a reaction vessel to heat treatment to perform vitrification, wherein a shaft for suspending the porous glass base material and an upper part of the porous glass base material are provided. An apparatus for manufacturing a glass base material, characterized in that a heat shield tube is provided in the vicinity of a connecting portion with a quartz rod in order to reduce the amount of radiant heat received from a heating means and a surrounding high-temperature body.
からなる遮熱筒が、接続部近傍に設けられている請求項
７に記載のガラス母材の製造装置。8. The apparatus for manufacturing a glass base material according to claim 7, wherein a heat shield cylinder made of the material according to any one of claims 3 to 6 is provided near the connection portion.
囲むように設けられている請求項７に記載のガラス母材
の製造装置。9. The manufacturing apparatus of a glass base material according to claim 7, wherein the heat shield cylinder is provided so as to surround a periphery near a connection portion.
ぐための遮熱板上に設けられている請求項７乃至９のい
ずれかに記載のガラス母材の製造装置。10. The glass base material manufacturing apparatus according to claim 7, wherein the heat shield cylinder is provided on a heat shield plate for preventing radiant heat from below.
ガラス母材の製造装置を用いて製造することを特徴とす
るガラス母材の製造方法。11. A method of manufacturing a glass base material, wherein the method is performed by using the manufacturing apparatus of a glass base material according to claim 7.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000234678A JP4435390B2 (en) | 2000-08-02 | 2000-08-02 | Heat shield cylinder, glass base material manufacturing apparatus and method including the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000234678A JP4435390B2 (en) | 2000-08-02 | 2000-08-02 | Heat shield cylinder, glass base material manufacturing apparatus and method including the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002047014A true JP2002047014A (en) | 2002-02-12 |
| JP4435390B2 JP4435390B2 (en) | 2010-03-17 |
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|---|---|---|---|
| JP2000234678A Expired - Fee Related JP4435390B2 (en) | 2000-08-02 | 2000-08-02 | Heat shield cylinder, glass base material manufacturing apparatus and method including the same |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009132586A (en) * | 2007-11-30 | 2009-06-18 | Sumitomo Electric Ind Ltd | Drawing method for glass preform |
| CN103214180A (en) * | 2012-01-19 | 2013-07-24 | 信越化学工业株式会社 | Porous glass base material thermal insulating member and sintering method |
| EP2716612A1 (en) * | 2012-10-05 | 2014-04-09 | Shin-Etsu Chemical Co., Ltd. | Mechanism and method for hanging a glass optical fibre preform |
| CN104944758A (en) * | 2014-03-26 | 2015-09-30 | 信越化学工业株式会社 | Sintering apparatus and sintering method for glass preform for optical fiber |
| JP2021178753A (en) * | 2020-05-13 | 2021-11-18 | 株式会社フジクラ | Device and method for producing optical fiber preform |
-
2000
- 2000-08-02 JP JP2000234678A patent/JP4435390B2/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009132586A (en) * | 2007-11-30 | 2009-06-18 | Sumitomo Electric Ind Ltd | Drawing method for glass preform |
| CN103214180A (en) * | 2012-01-19 | 2013-07-24 | 信越化学工业株式会社 | Porous glass base material thermal insulating member and sintering method |
| JP2013147379A (en) * | 2012-01-19 | 2013-08-01 | Shin-Etsu Chemical Co Ltd | Porous glass base material thermal insulating member and sintering method |
| US9382148B2 (en) | 2012-01-19 | 2016-07-05 | Shin-Etsu Chemical Co., Ltd. | Porous glass base material thermal insulating member and sintering method |
| EP2716612A1 (en) * | 2012-10-05 | 2014-04-09 | Shin-Etsu Chemical Co., Ltd. | Mechanism and method for hanging a glass optical fibre preform |
| CN104944758A (en) * | 2014-03-26 | 2015-09-30 | 信越化学工业株式会社 | Sintering apparatus and sintering method for glass preform for optical fiber |
| JP2015182946A (en) * | 2014-03-26 | 2015-10-22 | 信越化学工業株式会社 | Sintering apparatus and sintering method of glass preform for optical fiber |
| JP2021178753A (en) * | 2020-05-13 | 2021-11-18 | 株式会社フジクラ | Device and method for producing optical fiber preform |
| JP7412270B2 (en) | 2020-05-13 | 2024-01-12 | 株式会社フジクラ | Optical fiber base material manufacturing equipment and manufacturing method |
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| Publication number | Publication date |
|---|---|
| JP4435390B2 (en) | 2010-03-17 |
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