JPS6093932A - 分布荷重センサの製造方法 - Google Patents

分布荷重センサの製造方法

Info

Publication number
JPS6093932A
JPS6093932A JP58201962A JP20196283A JPS6093932A JP S6093932 A JPS6093932 A JP S6093932A JP 58201962 A JP58201962 A JP 58201962A JP 20196283 A JP20196283 A JP 20196283A JP S6093932 A JPS6093932 A JP S6093932A
Authority
JP
Japan
Prior art keywords
pressure
ring
sensitive
load
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58201962A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246092B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shinobu Sagisawa
鷺沢　忍
Mitsuo Kobayashi
光男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP58201962A priority Critical patent/JPS6093932A/ja
Publication of JPS6093932A publication Critical patent/JPS6093932A/ja
Publication of JPH0246092B2 publication Critical patent/JPH0246092B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP58201962A 1983-10-28 1983-10-28 分布荷重センサの製造方法 Granted JPS6093932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58201962A JPS6093932A (ja) 1983-10-28 1983-10-28 分布荷重センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58201962A JPS6093932A (ja) 1983-10-28 1983-10-28 分布荷重センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6093932A true JPS6093932A (ja) 1985-05-25
JPH0246092B2 JPH0246092B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-12

Family

ID=16449646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58201962A Granted JPS6093932A (ja) 1983-10-28 1983-10-28 分布荷重センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6093932A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128833U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-04-09 1991-12-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128833U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-04-09 1991-12-25

Also Published As

Publication number Publication date
JPH0246092B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-12

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