JPS6085363A - 接合状態検出方法及びその装置 - Google Patents

接合状態検出方法及びその装置

Info

Publication number
JPS6085363A
JPS6085363A JP58192409A JP19240983A JPS6085363A JP S6085363 A JPS6085363 A JP S6085363A JP 58192409 A JP58192409 A JP 58192409A JP 19240983 A JP19240983 A JP 19240983A JP S6085363 A JPS6085363 A JP S6085363A
Authority
JP
Japan
Prior art keywords
vibration
laser
inspection
detecting
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58192409A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252981B2 (https=
Inventor
Takashi Hiroi
高志 広井
Takanori Ninomiya
隆典 二宮
Yasuo Nakagawa
中川　泰夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58192409A priority Critical patent/JPS6085363A/ja
Publication of JPS6085363A publication Critical patent/JPS6085363A/ja
Publication of JPH0252981B2 publication Critical patent/JPH0252981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP58192409A 1983-10-17 1983-10-17 接合状態検出方法及びその装置 Granted JPS6085363A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58192409A JPS6085363A (ja) 1983-10-17 1983-10-17 接合状態検出方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58192409A JPS6085363A (ja) 1983-10-17 1983-10-17 接合状態検出方法及びその装置

Publications (2)

Publication Number Publication Date
JPS6085363A true JPS6085363A (ja) 1985-05-14
JPH0252981B2 JPH0252981B2 (https=) 1990-11-15

Family

ID=16290833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58192409A Granted JPS6085363A (ja) 1983-10-17 1983-10-17 接合状態検出方法及びその装置

Country Status (1)

Country Link
JP (1) JPS6085363A (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627200A (ja) * 1985-07-03 1987-01-14 株式会社日立製作所 接合状態検出装置
JPS62126346A (ja) * 1985-11-28 1987-06-08 Nippon Kokan Kk <Nkk> 非接触超音波探傷方法
JPS62133341A (ja) * 1985-12-06 1987-06-16 Hitachi Ltd はんだ付部検査装置
JPH01203966A (ja) * 1988-02-10 1989-08-16 Hitachi Constr Mach Co Ltd 微小部材接合部の接合状態検査方法およびその装置
JPH06242079A (ja) * 1993-02-19 1994-09-02 Hitachi Ltd 光音響信号検出方法及び装置
JPH06308095A (ja) * 1993-04-21 1994-11-04 Hitachi Ltd 光熱変位信号検出方法とその装置
WO2022157870A1 (ja) * 2021-01-21 2022-07-28 ヤマハロボティクスホールディングス株式会社 不良検出装置及び不良検出方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627200A (ja) * 1985-07-03 1987-01-14 株式会社日立製作所 接合状態検出装置
JPS62126346A (ja) * 1985-11-28 1987-06-08 Nippon Kokan Kk <Nkk> 非接触超音波探傷方法
JPS62133341A (ja) * 1985-12-06 1987-06-16 Hitachi Ltd はんだ付部検査装置
JPH01203966A (ja) * 1988-02-10 1989-08-16 Hitachi Constr Mach Co Ltd 微小部材接合部の接合状態検査方法およびその装置
JPH06242079A (ja) * 1993-02-19 1994-09-02 Hitachi Ltd 光音響信号検出方法及び装置
JPH06308095A (ja) * 1993-04-21 1994-11-04 Hitachi Ltd 光熱変位信号検出方法とその装置
WO2022157870A1 (ja) * 2021-01-21 2022-07-28 ヤマハロボティクスホールディングス株式会社 不良検出装置及び不良検出方法
JPWO2022157870A1 (https=) * 2021-01-21 2022-07-28
CN115769071A (zh) * 2021-01-21 2023-03-07 雅马哈智能机器控股株式会社 不良检测装置以及不良检测方法
TWI820581B (zh) * 2021-01-21 2023-11-01 日商雅馬哈智能機器控股股份有限公司 不良檢測裝置、不良檢測方法以及振動檢測裝置
US12487206B2 (en) 2021-01-21 2025-12-02 Yamaha Robotics Co., Ltd. Defect detection device and defect detection method

Also Published As

Publication number Publication date
JPH0252981B2 (https=) 1990-11-15

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