JPS6085344A - 小型圧力測定装置 - Google Patents

小型圧力測定装置

Info

Publication number
JPS6085344A
JPS6085344A JP19309083A JP19309083A JPS6085344A JP S6085344 A JPS6085344 A JP S6085344A JP 19309083 A JP19309083 A JP 19309083A JP 19309083 A JP19309083 A JP 19309083A JP S6085344 A JPS6085344 A JP S6085344A
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
measuring device
substrate
pressure measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19309083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544615B2 (enrdf_load_stackoverflow
Inventor
Isao Iwasaki
功 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP19309083A priority Critical patent/JPS6085344A/ja
Publication of JPS6085344A publication Critical patent/JPS6085344A/ja
Publication of JPH0544615B2 publication Critical patent/JPH0544615B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP19309083A 1983-10-15 1983-10-15 小型圧力測定装置 Granted JPS6085344A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19309083A JPS6085344A (ja) 1983-10-15 1983-10-15 小型圧力測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19309083A JPS6085344A (ja) 1983-10-15 1983-10-15 小型圧力測定装置

Publications (2)

Publication Number Publication Date
JPS6085344A true JPS6085344A (ja) 1985-05-14
JPH0544615B2 JPH0544615B2 (enrdf_load_stackoverflow) 1993-07-06

Family

ID=16302061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19309083A Granted JPS6085344A (ja) 1983-10-15 1983-10-15 小型圧力測定装置

Country Status (1)

Country Link
JP (1) JPS6085344A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177030A (ja) * 1987-01-19 1988-07-21 Nippon Denso Co Ltd 半導体圧力センサ
FR2700846A1 (fr) * 1993-01-26 1994-07-29 Brugidou Vincent Dispositif de mesure de contraintes ou déformations par résonance ferromagnétique, et procédé de mise en Óoeuvre dudit dispositif.
JPH07167720A (ja) * 1993-12-14 1995-07-04 Matsushita Electric Ind Co Ltd 圧力センサ
KR100763022B1 (ko) * 2005-02-03 2007-10-02 주식회사 엠디티 초음파 공간 진동에 의한 자계 교란 검출을 이용한 무전원 및 무선 센서 그리고 그 센서를 이용한 센싱 시스템

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8429978B2 (en) * 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717830A (en) * 1980-05-22 1982-01-29 Siemens Ag Semiconductor pressure sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717830A (en) * 1980-05-22 1982-01-29 Siemens Ag Semiconductor pressure sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177030A (ja) * 1987-01-19 1988-07-21 Nippon Denso Co Ltd 半導体圧力センサ
FR2700846A1 (fr) * 1993-01-26 1994-07-29 Brugidou Vincent Dispositif de mesure de contraintes ou déformations par résonance ferromagnétique, et procédé de mise en Óoeuvre dudit dispositif.
JPH07167720A (ja) * 1993-12-14 1995-07-04 Matsushita Electric Ind Co Ltd 圧力センサ
KR100763022B1 (ko) * 2005-02-03 2007-10-02 주식회사 엠디티 초음파 공간 진동에 의한 자계 교란 검출을 이용한 무전원 및 무선 센서 그리고 그 센서를 이용한 센싱 시스템

Also Published As

Publication number Publication date
JPH0544615B2 (enrdf_load_stackoverflow) 1993-07-06

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