JPS608189A - 舶用主機関制御方法 - Google Patents

舶用主機関制御方法

Info

Publication number
JPS608189A
JPS608189A JP11638083A JP11638083A JPS608189A JP S608189 A JPS608189 A JP S608189A JP 11638083 A JP11638083 A JP 11638083A JP 11638083 A JP11638083 A JP 11638083A JP S608189 A JPS608189 A JP S608189A
Authority
JP
Japan
Prior art keywords
signal
output signal
time mode
mode converter
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11638083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238436B2 (enrdf_load_stackoverflow
Inventor
Hidetoshi Nishimura
秀俊 西村
Takayoshi Maeda
前田　隆義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabco Ltd
Original Assignee
Nabco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabco Ltd filed Critical Nabco Ltd
Priority to JP11638083A priority Critical patent/JPS608189A/ja
Publication of JPS608189A publication Critical patent/JPS608189A/ja
Publication of JPH0238436B2 publication Critical patent/JPH0238436B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Vehicle Engines Or Engines For Specific Uses (AREA)
JP11638083A 1983-06-28 1983-06-28 舶用主機関制御方法 Granted JPS608189A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11638083A JPS608189A (ja) 1983-06-28 1983-06-28 舶用主機関制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11638083A JPS608189A (ja) 1983-06-28 1983-06-28 舶用主機関制御方法

Publications (2)

Publication Number Publication Date
JPS608189A true JPS608189A (ja) 1985-01-17
JPH0238436B2 JPH0238436B2 (enrdf_load_stackoverflow) 1990-08-30

Family

ID=14685565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11638083A Granted JPS608189A (ja) 1983-06-28 1983-06-28 舶用主機関制御方法

Country Status (1)

Country Link
JP (1) JPS608189A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method
US6273802B1 (en) 1993-09-19 2001-08-14 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6273802B1 (en) 1993-09-19 2001-08-14 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6425806B2 (en) 1993-09-21 2002-07-30 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6439971B2 (en) 1993-09-21 2002-08-27 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6443808B2 (en) 1993-09-21 2002-09-03 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6547638B2 (en) 1993-09-21 2003-04-15 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6966821B2 (en) 1993-09-21 2005-11-22 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US7708618B2 (en) 1993-09-21 2010-05-04 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method
US6500051B1 (en) 1994-11-29 2002-12-31 Ebara Corporation Polishing apparatus and method
US6997782B2 (en) 1994-11-29 2006-02-14 Ebara Corporation Polishing apparatus and a method of polishing and cleaning and drying a wafer
US7198552B2 (en) 1994-11-29 2007-04-03 Ebara Corporation Polishing apparatus

Also Published As

Publication number Publication date
JPH0238436B2 (enrdf_load_stackoverflow) 1990-08-30

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