JPS6081048A - 窒化チタン薄膜付きガラスおよびその作製方法 - Google Patents

窒化チタン薄膜付きガラスおよびその作製方法

Info

Publication number
JPS6081048A
JPS6081048A JP18812583A JP18812583A JPS6081048A JP S6081048 A JPS6081048 A JP S6081048A JP 18812583 A JP18812583 A JP 18812583A JP 18812583 A JP18812583 A JP 18812583A JP S6081048 A JPS6081048 A JP S6081048A
Authority
JP
Japan
Prior art keywords
glass
titanium nitride
titanium
sputtering
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18812583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158134B2 (https=
Inventor
Toku Tsutsuki
筒木 徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP18812583A priority Critical patent/JPS6081048A/ja
Publication of JPS6081048A publication Critical patent/JPS6081048A/ja
Publication of JPH0158134B2 publication Critical patent/JPH0158134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP18812583A 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法 Granted JPS6081048A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18812583A JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18812583A JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Publications (2)

Publication Number Publication Date
JPS6081048A true JPS6081048A (ja) 1985-05-09
JPH0158134B2 JPH0158134B2 (https=) 1989-12-08

Family

ID=16218148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18812583A Granted JPS6081048A (ja) 1983-10-06 1983-10-06 窒化チタン薄膜付きガラスおよびその作製方法

Country Status (1)

Country Link
JP (1) JPS6081048A (https=)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200011U (https=) * 1986-06-12 1987-12-19
JPS63262454A (ja) * 1987-03-26 1988-10-28 ピーピージー インダストリーズ,インコーポレーテツド オキシ窒化チタン被覆物品及びその製造方法
JPH02177601A (ja) * 1988-09-01 1990-07-10 Asahi Glass Co Ltd 自動車用窓ガラス
US5464683A (en) * 1991-12-13 1995-11-07 Balzers Aktiengesellschaft Coated transparent substrate
US6466124B1 (en) 1999-04-08 2002-10-15 Nec Corporation Thin film resistor and method for forming the same
WO2005063646A1 (en) * 2003-12-22 2005-07-14 Cardinal Cg Company Graded photocatalytic coatings
EP1743876A3 (en) * 2003-12-22 2007-07-25 Cardinal CG Company Graded photocatalytic coatings
US7604865B2 (en) 2004-07-12 2009-10-20 Cardinal Cg Company Low-maintenance coatings
JP2010280941A (ja) * 2009-06-03 2010-12-16 Nikon Corp 被膜形成物および被膜形成物の製造方法
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US9738967B2 (en) 2006-07-12 2017-08-22 Cardinal Cg Company Sputtering apparatus including target mounting and control
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5059299A (https=) * 1973-09-28 1975-05-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5059299A (https=) * 1973-09-28 1975-05-22

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200011U (https=) * 1986-06-12 1987-12-19
JPS63262454A (ja) * 1987-03-26 1988-10-28 ピーピージー インダストリーズ,インコーポレーテツド オキシ窒化チタン被覆物品及びその製造方法
JPH02177601A (ja) * 1988-09-01 1990-07-10 Asahi Glass Co Ltd 自動車用窓ガラス
US5464683A (en) * 1991-12-13 1995-11-07 Balzers Aktiengesellschaft Coated transparent substrate
US5473468A (en) * 1991-12-13 1995-12-05 Balzers Aktiengesellschaft Coated transparent substrate
US6466124B1 (en) 1999-04-08 2002-10-15 Nec Corporation Thin film resistor and method for forming the same
US7294404B2 (en) 2003-12-22 2007-11-13 Cardinal Cg Company Graded photocatalytic coatings
EP1743876A3 (en) * 2003-12-22 2007-07-25 Cardinal CG Company Graded photocatalytic coatings
WO2005063646A1 (en) * 2003-12-22 2005-07-14 Cardinal Cg Company Graded photocatalytic coatings
US7604865B2 (en) 2004-07-12 2009-10-20 Cardinal Cg Company Low-maintenance coatings
US7713632B2 (en) 2004-07-12 2010-05-11 Cardinal Cg Company Low-maintenance coatings
USRE43817E1 (en) 2004-07-12 2012-11-20 Cardinal Cg Company Low-maintenance coatings
USRE44155E1 (en) 2004-07-12 2013-04-16 Cardinal Cg Company Low-maintenance coatings
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US9738967B2 (en) 2006-07-12 2017-08-22 Cardinal Cg Company Sputtering apparatus including target mounting and control
JP2010280941A (ja) * 2009-06-03 2010-12-16 Nikon Corp 被膜形成物および被膜形成物の製造方法
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology
US11325859B2 (en) 2016-11-17 2022-05-10 Cardinal Cg Company Static-dissipative coating technology

Also Published As

Publication number Publication date
JPH0158134B2 (https=) 1989-12-08

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