JPS6078318A - Magnetostriction potentiometer - Google Patents

Magnetostriction potentiometer

Info

Publication number
JPS6078318A
JPS6078318A JP18634383A JP18634383A JPS6078318A JP S6078318 A JPS6078318 A JP S6078318A JP 18634383 A JP18634383 A JP 18634383A JP 18634383 A JP18634383 A JP 18634383A JP S6078318 A JPS6078318 A JP S6078318A
Authority
JP
Japan
Prior art keywords
wire
magnetostrictive
coil
detecting part
potentiometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18634383A
Other languages
Japanese (ja)
Other versions
JPH0310047B2 (en
Inventor
Toshitsugu Ueda
敏嗣 植田
Hiroyuki Yamamoto
裕之 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP18634383A priority Critical patent/JPS6078318A/en
Publication of JPS6078318A publication Critical patent/JPS6078318A/en
Publication of JPH0310047B2 publication Critical patent/JPH0310047B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/02Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance
    • G01H11/04Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance using magnetostrictive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To obtain a constitution where even a round magnetostriction wire can be supported without the influence upon signals by etching magnetostrictive materials to form the magnetostriction wire and a supporting part, which is connected to this wire through a connecting part, into one body. CONSTITUTION:When a pulse current is supplied to an ultrasonic wave generating coil 41 constituting a driving part 40, a local change of magnetic field is caused in a magnetostriction wire 10 in the coil 41. This change is converted to a longitudinal elastic wave, and it is propagated toward a detecting part 70 in the magnetostriction wire 10. Then, the permeance of the magnetic path is changed, and a pulse voltage is generated in a detecting coil 74 after a time corresponding to the displaced position of the detecting part 70. A time t1, which is required when the direct wave form the coil 41 is detected by the detecting part 70, and a time t2 which is required when the reflected wave which is reflected on an end face 12 of the magnetostriction wire 10 and is returned is detected by the detecting part 70 are measured to detect the displaced position of the detecting part 70. Since a ratio of the difference to the sum between delay times t1 and t2 is the signal indicating the displaced position of the detecting part 70 as a movable part, a potentiometer having an inexpensive constitution is obtained.

Description

【発明の詳細な説明】 〔発明の属する分野〕 本発明は超音波を利用した磁歪ポテンショメータに関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a magnetostrictive potentiometer that uses ultrasonic waves.

〔従来技術〕[Prior art]

8音波を利用した磁歪ポテンショメータは本願出願人に
よって開発され、その開発された技術は特願昭53−2
2281号、特願昭53−22282号等として多数出
願され、かつ横列新技術リポート“79P3(1979
)等によって発表され、既に公知の状態にあるものて゛
ある。このような公知の磁歪ポテンショメータを第1図
に示す。
8 A magnetostrictive potentiometer using sound waves was developed by the applicant of the present application, and the developed technology was disclosed in Japanese Patent Application No. 53-2.
No. 2281, Japanese Patent Application No. 53-22282, etc., and many applications have been filed, including the horizontal new technology report “79P3 (1979
), etc., and some of them are already known. Such a known magnetostrictive potentiometer is shown in FIG.

第1図において、10は磁歪線、20は超音波発生用の
コイル21と永久磁石22とで構成された可動の駆動部
、30 、40は夫々は検出コイル31 、41及び永
久磁石32 、42で構成された検出部である。検出部
30と40は磁歪線10の両fqiに固定されており、
駆動部20より発生し磁歪線10を伝播する超音波信号
を受信する。駆動部20の変位位置は超音波信号が検出
部30と40に到達するまでの時間の差を検出すること
によりめらる。このような構成に係る第1図の装置は非
接触のポテンショメータとして、例えば記録針の位置帰
遷要素等に適用して好適なものである。
In FIG. 1, 10 is a magnetostrictive wire, 20 is a movable drive unit composed of an ultrasonic generation coil 21 and a permanent magnet 22, and 30 and 40 are detection coils 31 and 41 and permanent magnets 32 and 42, respectively. The detection unit is composed of: The detection units 30 and 40 are fixed to both fqi of the magnetostrictive wire 10,
The ultrasonic signal generated by the drive unit 20 and propagated through the magnetostrictive wire 10 is received. The displacement position of the drive unit 20 is determined by detecting the difference in time until the ultrasonic signals reach the detection units 30 and 40. The device shown in FIG. 1 having such a configuration is suitable for use as a non-contact potentiometer, for example, as a position return element for a recording needle.

このような構成に係る磁歪ポテンショメータに用いられ
る磁歪線10を固定部材に取イづける場合には、磁歪線
10の両端以外を支持すると出力が減衰して誤差を生じ
るようになる。その為、第1図のポテンショメータにお
いては磁歪線10の両端に固定した検出部30と40と
でこの@歪線を支持するようにしている。一方、磁歪線
10としては薄肉パイプ或いは薄いリボン等、薄肉の材
料の方が肉厚のものより渦電’IM損或0は伝播減衰等
の影響が小さくて適する。しかし、上記の両端支持方式
では薄肉で強度の極く弱い磁歪線を支持することはでき
ず、更に丸型等直線以外の形状の磁歪線の支持ができな
い等の問題点がある。
When the magnetostrictive wire 10 used in the magnetostrictive potentiometer having such a configuration is attached to a fixed member, if the magnetostrictive wire 10 is supported at other than both ends, the output will be attenuated and an error will occur. Therefore, in the potentiometer shown in FIG. 1, the magnetostrictive wire 10 is supported by detecting sections 30 and 40 fixed at both ends thereof. On the other hand, as the magnetostrictive wire 10, a thin material such as a thin pipe or a thin ribbon is more suitable than a thick material because the influence of eddy current IM loss or propagation attenuation is smaller. However, the above-mentioned both-end support method cannot support magnetostrictive wires that are thin and have extremely weak strength, and furthermore, there are problems such as the inability to support magnetostrictive wires having shapes other than round, equilinear lines.

〔本発明の目的〕[Object of the present invention]

本発明はこのような問題点を改善する為になされたもの
で、薄肉で、しかも直線以外の形状の磁歪線1例えば丸
型の磁歪線でも信号に影響を与えることなくその磁歪線
を支持することのできる全体構成の簡7r1な磁歪ポテ
ンショメータを得ることを目的としたもである。以下本
発明の実施例を詳細に説明する。
The present invention has been made in order to improve these problems, and is capable of supporting magnetostrictive wires that are thin and have shapes other than straight lines, such as round magnetostrictive wires, without affecting the signal. The object of the present invention is to obtain a magnetostrictive potentiometer with a simple overall configuration that can be used. Examples of the present invention will be described in detail below.

〔実施例〕〔Example〕

第2図は本発明に係る磁歪ポテンショメータの一実施例
の+16戊図である。第2図におて、10は磁歪線で、
この磁歪線は丸型になっている。20は磁歪w10を支
持する支持部で、この支持部は磁歪線10の外周におい
て一定の間隙を隔てて、その外周に沿うように九壓に形
成されている。31乃至34は夫々磁歪線10と支持部
20とを繋ぐ!J部である。歪遅線10と支持部20及
び繋部31乃至34は、これら全体を例えばNiのよう
な磁歪特性の大きい金属の板をエツチングにより抜くこ
とにより成形したものである。このように繋s31乃至
34をエツチングにより成形したので、本発明によれば
これらの繋部を極く細く(実施例では0.1M・・・0
.2mm)形成することができる。支持部20は固定部
材(図示せず)にその周面が取付けられる。40は超音
波発生用のコイル41(及び第1図に示す永久磁石42
)を有する駆動部である。この駆動部は磁歪線10の一
@11に固定的に取付けられている。50は回転軸、6
0は取イづけ部材、70は検出部である。検出部7oは
取((け部材60を介して回転軸50に取付けられてい
る。
FIG. 2 is a +16 diagram of an embodiment of the magnetostrictive potentiometer according to the present invention. In Figure 2, 10 is a magnetostrictive line,
This magnetostrictive wire has a round shape. Reference numeral 20 denotes a support part that supports the magnetostrictive wire w10, and this support part is formed in a shape of nine cubes along the outer periphery of the magnetostrictive wire 10 with a constant gap therebetween. 31 to 34 connect the magnetostrictive wire 10 and the support part 20, respectively! This is the J section. The strain retardation line 10, the support portion 20, and the connecting portions 31 to 34 are all formed by etching a metal plate having a large magnetostriction characteristic, such as Ni. Since the connections s31 to s34 are formed by etching in this way, according to the present invention, these connections are made extremely thin (0.1M...0 in the example).
.. 2mm) can be formed. The support portion 20 has its peripheral surface attached to a fixing member (not shown). 40 is a coil 41 for generating ultrasonic waves (and a permanent magnet 42 shown in FIG. 1).
). This drive unit is fixedly attached to one @ 11 of the magnetostrictive wire 10. 50 is the rotation axis, 6
0 is a mounting member, and 70 is a detection section. The detection unit 7o is attached to the rotating shaft 50 via a mounting member 60.

検出部70において、71.72は夫々コア、73は永
久磁石である。コア71には超音波を検出する検出コイ
ル74が捲装されている。コア71と72は永へ磁石7
3を挟んでコ字状に用型てられ、これにより検出ヘッド
が構成されている。
In the detection unit 70, 71 and 72 are cores, and 73 is a permanent magnet. A detection coil 74 for detecting ultrasonic waves is wound around the core 71 . Cores 71 and 72 are permanent magnets 7
3 is placed in a U-shape, thereby forming a detection head.

このような411!或の検出部70は、−側が開放され
た検出ヘッド内に磁歪線10が挿入されるように取イ(
Jけ部材60を介して回転軸50に取付けられている。
411 like this! A certain detection unit 70 is arranged so that the magnetostrictive wire 10 is inserted into the detection head whose negative side is open.
It is attached to the rotating shaft 50 via a J-shaped member 60.

然して回転軸50を回転させると、検出部70はこの回
転軸を軸として磁歪線1oに沿って円弧状に回転する。
When the rotating shaft 50 is rotated, the detecting section 70 rotates in an arc shape along the magnetostrictive line 1o about this rotating shaft.

このような構成の磁歪ポテンショメータにおいて駆動部
40を構成する超音波発生用コイル41にパルス電流を
g+、給すると、コイル41の中の磁歪線1゜に局所的
な磁場の変化が起り、その変化は磁歪効果により縦弾性
波〔超音波〕に変換されて磁歪線10内を検出部70に
向って伝播する。一方、検出部70を構成する検出ヘッ
ドにおては、永久磁石73で発生した磁束がコア71→
磁歪線1o→コア72を通って再び永久磁石73に戻る
磁路が形成されている。
In a magnetostrictive potentiometer with such a configuration, when a pulse current of g+ is supplied to the ultrasonic generation coil 41 constituting the drive section 40, a local change in the magnetic field occurs at 1° of the magnetostrictive wire in the coil 41, and the change occurs. is converted into a longitudinal elastic wave (ultrasonic wave) by the magnetostrictive effect and propagates within the magnetostrictive wire 10 toward the detection unit 70. On the other hand, in the detection head constituting the detection unit 70, the magnetic flux generated by the permanent magnet 73 is transferred from the core 71 to
A magnetic path from the magnetostrictive wire 1o to the core 72 and back to the permanent magnet 73 is formed.

このような磁路に磁歪信号が入って来ると、逆磁歪効果
により磁路のパーミアンスが変化して磁束の変化を生じ
、その結果検出コイル74に検出部7゜の変位位置に応
じた時間後にパルス電圧が発生する。
When a magnetostrictive signal enters such a magnetic path, the permeance of the magnetic path changes due to the inverse magnetostrictive effect, causing a change in magnetic flux, and as a result, the detection coil 74 receives a signal after a time corresponding to the displacement position of the detection section 7°. A pulse voltage is generated.

ここで、駆動部40を構成する超音波発生用コイル41
にパルス電流を印加してから検出部70に検出パルス信
号が発生するまでの時間は、コイル41からの直接波と
、磁歪線10の端面12で反射して戻ってくる反射波と
を検出部70が検出するに要する時間 t 1. t 
2を測定することにより、可動部である検出部70の変
位位置を検出することができる。
Here, the ultrasonic generation coil 41 that constitutes the drive unit 40
The time from when a pulse current is applied to when a detection pulse signal is generated at the detection unit 70 is such that the direct wave from the coil 41 and the reflected wave reflected from the end face 12 of the magnetostrictive wire 10 are detected by the detection unit. Time required for detection of 70 t 1. t
By measuring 2, it is possible to detect the displacement position of the detection section 70, which is a movable section.

下式(1)はt 1. t 2の演算内容を示したもの
で、このような演算をすることにより、音速の湿度変化
等の影響が除去された変位位置信号を得ることができる
The following formula (1) is t1. This shows the calculation contents of t2. By performing such calculation, it is possible to obtain a displacement position signal from which influences such as changes in humidity on the speed of sound are removed.

(t2−tl)/(t2+tl) =d2 / (dl +d2 )・・・・・・・・・・
・・・・・・・・・・・・(1)ここに、tl=dl/
 C t2=a27 c dl=駆動部40と検出部70までの距離d2−検出部
70と磁歪線10の端面12までの距離 C−音速 すなわち、遅延時間t1.t2の和と差の比が可動部で
ある検出部7oの変位位置を表わす信号となる。
(t2-tl)/(t2+tl) =d2/(dl+d2)・・・・・・・・・・・・
・・・・・・・・・・・・(1) Here, tl=dl/
C t2 = a27 c dl = distance d2 between the drive unit 40 and the detection unit 70 - distance C between the detection unit 70 and the end face 12 of the magnetostrictive wire 10 - speed of sound, that is, delay time t1. The ratio of the sum and difference of t2 becomes a signal representing the displacement position of the detecting section 7o, which is a movable section.

このような構成の本発明に係る磁歪ポテンショメータに
おいては、磁歪線10と支持部20と供に繋部31乃至
34をエツチングによって一体成形することにより構成
したので、繋部31乃至34を実施例の如く極めて細く
構成することができる。その結果、本発明によれば伝播
する縦弾性波に殆んど影響を与えるこなく胎内で強度の
弱い磁歪線10を支持する支持部20を有する磁歪ポテ
ンショメータを得ることができる。又、本発明によれば
丸形の磁歪線10でもこれを支持することができ、かつ
磁歪線10と支持部20とを一体成形により形成する為
に構成が簡単で、しかも支持部20を用いることにより
装f&への取付けも容易で、かつ安価な構成の磁歪ポテ
ンショメータを得ることができる。
In the magnetostrictive potentiometer according to the present invention having such a configuration, the connecting portions 31 to 34 are formed integrally with the magnetostrictive wire 10 and the support portion 20 by etching, so that the connecting portions 31 to 34 are formed in the same manner as in the embodiment. It can be configured extremely thinly. As a result, according to the present invention, it is possible to obtain a magnetostrictive potentiometer having a support portion 20 that supports the magnetostrictive wire 10, which has a weak strength inside the womb, with almost no effect on the propagating longitudinal elastic waves. Further, according to the present invention, even a round magnetostrictive wire 10 can be supported, and since the magnetostrictive wire 10 and the support part 20 are formed by integral molding, the structure is simple, and moreover, the support part 20 is used. As a result, it is possible to obtain a magnetostrictive potentiometer that is easy to attach to the device and has an inexpensive structure.

(他の実施例) なお、第2図は磁歪線を丸型にした磁歪ポテンショメー
タの実施例であるが、第3図はこれを直線形にした直線
形の磁歪ポテンショメータの実施例の構成図である。第
3図において、10はyJ綿線状磁歪線、20は支持部
、31・・・34は繋部であり、又40は磁歪線10の
〜端11に取イづけらた駆動部、70は変位可能な検出
部である。このような構成の第3図のポテンショメータ
においては、第2図と同様な作用効果を有する直線型の
磁歪ポテンショメータを得ることができる。
(Other Examples) Although Fig. 2 shows an example of a magnetostrictive potentiometer in which the magnetostrictive wire is made into a round shape, Fig. 3 is a configuration diagram of an example of a linear magnetostrictive potentiometer in which the magnetostrictive wire is made into a linear shape. be. In FIG. 3, 10 is a YJ cotton wire magnetostrictive wire, 20 is a support part, 31...34 are connecting parts, 40 is a drive part attached to the end 11 of the magnetostrictive wire 10, and 70 is a displaceable detector. In the potentiometer of FIG. 3 having such a configuration, a linear magnetostrictive potentiometer having the same effect as that of FIG. 2 can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁歪ポテンショメータの構成図、第2図
及び第3図は夫々本亮明に係る磁歪ポテンショメータの
実施例を示す構成図である。 10・・・・・・m歪線、20・・・・・・支持部、3
1−34・・・・・・繋部、40・・・・・・駆動部、
70・・・・・・検出部。
FIG. 1 is a block diagram of a conventional magnetostrictive potentiometer, and FIGS. 2 and 3 are block diagrams showing embodiments of the magnetostrictive potentiometer according to the present invention. 10...m strain line, 20...support part, 3
1-34... Connecting part, 40... Drive part,
70...detection section.

Claims (1)

【特許請求の範囲】[Claims] 磁歪線と繋部を介してII記録磁歪線繋がれた支持部と
を磁歪材をエツチングによって一体成形することにより
構成したことを特徴とする磁歪ポテンショメータ
A magnetostrictive potentiometer characterized in that a magnetostrictive wire and a support part to which a II recording magnetostrictive wire is connected via a connecting part are formed by integrally molding a magnetostrictive material by etching.
JP18634383A 1983-10-05 1983-10-05 Magnetostriction potentiometer Granted JPS6078318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18634383A JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18634383A JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Publications (2)

Publication Number Publication Date
JPS6078318A true JPS6078318A (en) 1985-05-04
JPH0310047B2 JPH0310047B2 (en) 1991-02-12

Family

ID=16186692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18634383A Granted JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Country Status (1)

Country Link
JP (1) JPS6078318A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164216A (en) * 1984-02-07 1985-08-27 Yokogawa Hokushin Electric Corp Rotary type magnetostriction potentiometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164216A (en) * 1984-02-07 1985-08-27 Yokogawa Hokushin Electric Corp Rotary type magnetostriction potentiometer

Also Published As

Publication number Publication date
JPH0310047B2 (en) 1991-02-12

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