JPS6076633A - 感圧センサ - Google Patents
感圧センサInfo
- Publication number
- JPS6076633A JPS6076633A JP18313383A JP18313383A JPS6076633A JP S6076633 A JPS6076633 A JP S6076633A JP 18313383 A JP18313383 A JP 18313383A JP 18313383 A JP18313383 A JP 18313383A JP S6076633 A JPS6076633 A JP S6076633A
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- light receiving
- pressure
- shielding layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000011521 glass Substances 0.000 abstract description 12
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 239000011651 chromium Substances 0.000 abstract description 2
- 239000012212 insulator Substances 0.000 abstract description 2
- 229910001120 nichrome Inorganic materials 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 235000009508 confectionery Nutrition 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- GLVAUDGFNGKCSF-UHFFFAOYSA-N mercaptopurine Chemical compound S=C1NC=NC2=C1NC=N2 GLVAUDGFNGKCSF-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18313383A JPS6076633A (ja) | 1983-10-03 | 1983-10-03 | 感圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18313383A JPS6076633A (ja) | 1983-10-03 | 1983-10-03 | 感圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6076633A true JPS6076633A (ja) | 1985-05-01 |
| JPH0475452B2 JPH0475452B2 (https=) | 1992-11-30 |
Family
ID=16130371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18313383A Granted JPS6076633A (ja) | 1983-10-03 | 1983-10-03 | 感圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6076633A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010197066A (ja) * | 2009-02-23 | 2010-09-09 | Casio Computer Co Ltd | 圧力センサ及び圧力センサの圧力測定方法 |
| CN112160263A (zh) * | 2020-10-19 | 2021-01-01 | 东阳汉林传感器有限公司 | 一种用于玻璃栈道的应力检测警示设备 |
-
1983
- 1983-10-03 JP JP18313383A patent/JPS6076633A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010197066A (ja) * | 2009-02-23 | 2010-09-09 | Casio Computer Co Ltd | 圧力センサ及び圧力センサの圧力測定方法 |
| CN112160263A (zh) * | 2020-10-19 | 2021-01-01 | 东阳汉林传感器有限公司 | 一种用于玻璃栈道的应力检测警示设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0475452B2 (https=) | 1992-11-30 |
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