JPS607592B2 - Laser irradiation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser irradiation device, and more particularly to a laser irradiation device that simultaneously processes multiple points.

As an example, a conventional laser irradiation device for simultaneous two-point welding at three locations will be described.

As shown in FIG. 1a, a laser beam 1 emitted from a laser oscillator (not shown) is installed movably in a fixed posture along the optical axis of the laser beam 1, and is set at one reflection position a.
The direction of the laser beam 1 is changed by a laser beam reflecting mirror 2, which is a scanning optical member positioned at , and enters a roof-shaped prism 3, which is an optical member that splits the laser beam 1. As shown in FIG. 1b, this roof-shaped prism 3 is made so as to divide the laser beam 1 into two at a dividing line 4 formed by its ridgeline, and from this dividing line 4 enters the left side of the figure. After being refracted, the laser beam 1 enters the condenser lens 5 and is condensed at a condensing point 8 located on the surfaces of the welding members 6 and 7. Laser light entering the right side of the figure from the dividing line is similarly focused on a focusing point 9 located on the surfaces of the welding members 6 and 7. When the laser beam 1 is focused on the surface of the welding parts 6 and 7, absorption of the laser beam 1 occurs on this surface, the welding members 6 and 7 are melted, and the focusing points 8 and 9
be welded. When the two-point simultaneous welding at the first location is completed in this way, the laser beam reflecting mirror 2 is moved in a constant posture by a guide and a drive mechanism (not shown) and positioned at the second reflecting position b. Synchronizing with this positioning, a laser beam is emitted from a laser oscillator, and two-point simultaneous welding at the second location is performed through the same process as described above. Next, the laser beam reflecting mirror 2 moves to the third reflection position c, the laser beam is emitted, and welding of all the welding members is completed. However, when this irradiation device is used, it is necessary to increase the accuracy of the stopping position of the laser beam reflecting mirror 2 at each of the reflection positions a, b, and c. That is, the laser beam reflecting mirror 2
is the laser beam 1 whose direction is changed by this mirror 2
must be positioned at a position where the pattern is accurately bisected by the roof-shaped prism 3. Otherwise, the amount of energy of the divided laser beams will be different,
It is not possible to weld two points at the same time, resulting in manufacturing defects such as a hole being formed at one point and the other points being unable to be welded. As an example,
The center position of the six diameter laser beams is 0.0 mm from the dividing line 4.
If there is a shift of one axis, one of the divided parts will have an energy amount that differs by nearly 10% from the other. In this way, a slight positional shift of the laser beam reflecting mirror 2 may cause an inconvenience, so the laser beam reflecting mirror 2 should be adjusted before emitting the laser beam.
It is necessary to detect the stopping position of the Moreover, such an apparatus cannot meet the demand for welding at multiple locations without stopping the laser beam reflecting mirror 2 in order to improve production efficiency. In the present invention, a distribution optical member and a division optical member are paired, and each pair is provided separately for a plurality of irradiation locations, and is driven to move in one direction in order to guide the laser beam to a desired location. By providing a scanning optical member and further setting it in the dividing line direction of the dividing optical member, even if the reflection position of the scanning optical member with respect to the distributing optical member is shifted, the division ratio of the laser beam in the dividing optical member is always divided into equal parts. The present invention provides an apparatus that can perform uniform laser irradiation.

The present invention will be described below based on embodiments with reference to the drawings. Figure 2 shows a case where two-point welding is performed at three locations at the same time. A scanning optical member 11 made of a mirror that moves in a constant posture on the optical axis is provided.

The laser light 1 is reflected by this mirror, and is refracted 90° to the left in the figure by the mirrors stopped at welding positions indicated by a, b, and c. In the refraction direction of the laser beam 1, a minute position adjustment mechanism (not shown) similar to a micrometer head is used to adjust the welding position of the welding member 6 aligned parallel to the irradiation direction of the laser beam 1 emitted from the oscillator. is supported so as to be movable in this refraction direction,
A distributing optical member 12, which is also made of a mirror and is made of a mirror, is provided at an angle of 450 degrees with respect to the optical axis of this refracted laser beam 1', and receives this laser beam 1' and reflects it in the direction of welding areas 6 and 7. It will be done. That is, the laser beam 1' is refracted 900 degrees downward in the figure by the distributing optical member 12, as shown in FIG. 2b. A split optical member 13 made by joining lens pieces 13a and 13b obtained by cutting a lens is provided in the direction of the refracted laser beam 1''.This split optical member 13
As shown in FIG. 2a, the lens pieces 13a and 13b
A dividing line 4 formed by the joint portion of is parallel to the irradiation direction of the laser beam 1 emitted from the oscillator, and is directed in a direction perpendicular to the optical axis of the laser beam 1' reflected by the scanning optical member 11. , is installed at a position that approximately divides the pattern of the laser beam 1'' into two equal parts.
are installed at positions where their surfaces coincide with the respective condensing points 8 and 9 of these lens pieces 13a and 13b. In the above configuration, the position of the distributing optical member 12 is finely adjusted (by 0.01 units) in the irradiation direction of the supercharged Caesar light 1' using the fine position adjustment mechanism, The pattern is arranged to be equally divided into each of the lens pieces 13a and 13b.

In this way, when the scanning optical member 11 is moved to the welding position a and the laser beam 1 is emitted, this scanning optical member 11
Even if the position of the laser beam 1'' from the distributing optical member 12 is slightly off from the welding position a, the pattern of the laser beam 1'' from the distributing optical member 12 is the same as that of each lens piece]3a.
, 13b into equal parts with an accuracy of 0.01 Yanagi unit.As a result, the laser beam 1 is accurately divided into two parts and focused on the convergence points 8 and 9 on the surface of the Wekaibemura 6 and 7. Welding is performed evenly at two points. Note that the position of this welding point is the same as that of the scanning optical member 11.
Although it will vary depending on the amount of positional deviation, welding part village 6
, 7 have an area, so both members can be welded. For example, if the effective diameter of the splitting lens 13 is set to 2 mm and the pattern ridge of the laser beam 1' is set to the 6 side, the amount of positional deviation of the scanning optical member 11 may be 7 mm in principle. Therefore, the present invention does not require position detection before emitting laser light, which was required in the conventional device. Also, set the pattern diameter of laser beam 1 to 6 columns, for example, and set the division accuracy to 0.
．． 01 fence, the energy distribution error between the divided energies can be kept to 1% or less, and therefore uniform welding is possible. Furthermore, as described above, the scanning optical member 1
Since the stop position deviation amount of 1 is allowed to be close to ±7 fields, it becomes possible to weld while moving the scanning optical unit 11 without stopping it at each reflection position a, b, and c, which improves production efficiency. be able to. In the above embodiment, mirrors are used for the scanning optical member 11 and the distributing optical member 12, but the same effect can be obtained even if a T-prism is used.

Furthermore, the same effect can be obtained by using a roof-shaped prism and a condensing lens instead of the splitting lens 13. Furthermore, although the example shows the case of simultaneous welding at 2 points, 3
More than one point is also possible. Furthermore, even if the welding members are not aligned parallel to the irradiation direction of the laser beam 1 emitted from the oscillator, the distribution optical member 12 and the dividing optical member 13 can be arranged in correspondence with the positions of these welding members; The scanning optical member can be processed by scanning in the same manner as in the embodiment. Furthermore, the processing content is not limited to welding, but can be used for all processing that uses laser light, such as drilling and cutting. As described above, in the present invention, the scanning optical member and the distributing optical member are provided separately, so that even if the position of the scanning optical member 11 is inaccurate, the energy of the laser light can be accurately divided into predetermined proportions. It is possible to perform the required processing.

Note that the present invention is not limited to the above-mentioned embodiments, and can be arbitrarily modified without changing the gist thereof.

[Brief explanation of the drawing]

FIG. 1 shows a conventional laser irradiation device, FIG. 1a is a side view thereof, and FIG.
Fig. 2 shows an embodiment of the laser irradiation device of the present invention, Fig. 2a is a plan view thereof, and Fig. 2b is a side view thereof as seen in the direction of arrow bb. Y, 1', 1''... Laser light, 2... Laser light reflecting mirror, 3... Roof prism 4... Parting line 6, 7... Welding member, 8 , 9... Focusing point, 11... Scanning optical section, Wing 2... Distributing optical section, 13... Division optical member, 13a, 13b...
・Lens piece. Figure 1 Chrysanthemum Figure 2

Claims (1)

[Claims] 1 a laser oscillator, a scanning optical member that is moved in a fixed posture along the optical axis of the laser beam emitted from the laser oscillator and reflects the laser beam, and a scanning optical member that is separately arranged corresponding to a plurality of irradiation points and that is A plurality of distributing optical members that reflect the laser beam reflected by the scanning optical member toward the irradiation location, and a function of dividing the reflected light from these distributing optical members and focusing it on two or more locations. The dividing lines are arranged separately in the optical path of the light, and the dividing lines are parallel to the optical axis of the laser beam incident on the scanning optical member on one plane, and are perpendicular to the optical axis of the laser beam reflected by the scanning optical member. A laser irradiation device characterized by comprising a plurality of divided optical systems directed toward each other.