JPS6071927A - 圧力トランスデユ−サ及びその製造法 - Google Patents

圧力トランスデユ−サ及びその製造法

Info

Publication number
JPS6071927A
JPS6071927A JP59180261A JP18026184A JPS6071927A JP S6071927 A JPS6071927 A JP S6071927A JP 59180261 A JP59180261 A JP 59180261A JP 18026184 A JP18026184 A JP 18026184A JP S6071927 A JPS6071927 A JP S6071927A
Authority
JP
Japan
Prior art keywords
pressure
capacitance
electrode
diaphragm
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59180261A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431052B2 (enFirst
Inventor
ダニエル・ハリソン・グランサム
ジエームス・ロイス・スウインダル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of JPS6071927A publication Critical patent/JPS6071927A/ja
Publication of JPH0431052B2 publication Critical patent/JPH0431052B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Measuring Fluid Pressure (AREA)
JP59180261A 1983-08-29 1984-08-29 圧力トランスデユ−サ及びその製造法 Granted JPS6071927A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/527,531 US4467394A (en) 1983-08-29 1983-08-29 Three plate silicon-glass-silicon capacitive pressure transducer
US527531 1983-08-29

Publications (2)

Publication Number Publication Date
JPS6071927A true JPS6071927A (ja) 1985-04-23
JPH0431052B2 JPH0431052B2 (enFirst) 1992-05-25

Family

ID=24101835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59180261A Granted JPS6071927A (ja) 1983-08-29 1984-08-29 圧力トランスデユ−サ及びその製造法

Country Status (4)

Country Link
US (1) US4467394A (enFirst)
EP (1) EP0136249B1 (enFirst)
JP (1) JPS6071927A (enFirst)
DE (1) DE3481140D1 (enFirst)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290525A (ja) * 1988-12-30 1990-11-30 United Technol Corp <Utc> 低誘電ドリフト容量型圧力センサ
JPH04116058A (ja) * 1990-09-05 1992-04-16 Nisca Corp 原稿給送装置
JP2019020398A (ja) * 2017-07-12 2019-02-07 センサータ テクノロジーズ インコーポレーテッド 増加した容量性応答のために構成されるガラス障壁材料を備える圧力センサ素子

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI71015C (fi) * 1984-02-21 1986-10-27 Vaisala Oy Temperaturoberoende kapacitiv tryckgivare
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4625561A (en) * 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
US4675960A (en) * 1985-12-30 1987-06-30 Motorola, Inc. Method of manufacturing an electrically variable piezoelectric hybrid capacitor
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
US5431057A (en) * 1990-02-12 1995-07-11 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Integratable capacitative pressure sensor
US5009690A (en) * 1990-03-09 1991-04-23 The United States Of America As Represented By The United States Department Of Energy Method of bonding single crystal quartz by field-assisted bonding
US5029478A (en) * 1990-07-19 1991-07-09 Honeywell Inc. Fluid isolated self-compensating absolute pressure sensor transducer
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5369544A (en) * 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
US5440931A (en) * 1993-10-25 1995-08-15 United Technologies Corporation Reference element for high accuracy silicon capacitive pressure sensor
US5444901A (en) * 1993-10-25 1995-08-29 United Technologies Corporation Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
US5375034A (en) * 1993-12-02 1994-12-20 United Technologies Corporation Silicon capacitive pressure sensor having a glass dielectric deposited using ion milling
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
US5381299A (en) * 1994-01-28 1995-01-10 United Technologies Corporation Capacitive pressure sensor having a substrate with a curved mesa
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
DE10055081A1 (de) * 2000-11-07 2002-05-16 Bosch Gmbh Robert Mikrostrukturbauelement
US7189378B2 (en) * 2002-02-04 2007-03-13 Kulite Semiconductor Products, Inc. Miniature reaction chamber template structure for fabrication of nanoscale molecular systems and devices
EP1830167A3 (en) * 2006-03-02 2010-01-20 Alps Electric Co., Ltd. Pressure sensor having gold-silicon eutectic crystal layer interposed between contact layer and silicon substrate
CN103512698A (zh) * 2013-09-23 2014-01-15 沈阳仪表科学研究院有限公司 电容型绝压传感器及其制造方法
US9837935B2 (en) 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4380041A (en) * 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
US4198670A (en) * 1978-11-20 1980-04-15 General Motors Corporation Capacitive pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4424713A (en) * 1982-06-11 1984-01-10 General Signal Corporation Silicon diaphragm capacitive pressure transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290525A (ja) * 1988-12-30 1990-11-30 United Technol Corp <Utc> 低誘電ドリフト容量型圧力センサ
JPH04116058A (ja) * 1990-09-05 1992-04-16 Nisca Corp 原稿給送装置
JP2019020398A (ja) * 2017-07-12 2019-02-07 センサータ テクノロジーズ インコーポレーテッド 増加した容量性応答のために構成されるガラス障壁材料を備える圧力センサ素子

Also Published As

Publication number Publication date
JPH0431052B2 (enFirst) 1992-05-25
US4467394A (en) 1984-08-21
EP0136249A2 (en) 1985-04-03
DE3481140D1 (de) 1990-03-01
EP0136249A3 (en) 1986-04-30
EP0136249B1 (en) 1990-01-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees