JPS6071911A - 光学式変位・回転測定装置 - Google Patents

光学式変位・回転測定装置

Info

Publication number
JPS6071911A
JPS6071911A JP18140283A JP18140283A JPS6071911A JP S6071911 A JPS6071911 A JP S6071911A JP 18140283 A JP18140283 A JP 18140283A JP 18140283 A JP18140283 A JP 18140283A JP S6071911 A JPS6071911 A JP S6071911A
Authority
JP
Japan
Prior art keywords
target
light
displacement
pbs
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18140283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045122B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Eiji Ogita
英治 荻田
Daisuke Yamazaki
大輔 山崎
Toshitsugu Ueda
敏嗣 植田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP18140283A priority Critical patent/JPS6071911A/ja
Publication of JPS6071911A publication Critical patent/JPS6071911A/ja
Publication of JPH045122B2 publication Critical patent/JPH045122B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP18140283A 1983-09-29 1983-09-29 光学式変位・回転測定装置 Granted JPS6071911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18140283A JPS6071911A (ja) 1983-09-29 1983-09-29 光学式変位・回転測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18140283A JPS6071911A (ja) 1983-09-29 1983-09-29 光学式変位・回転測定装置

Publications (2)

Publication Number Publication Date
JPS6071911A true JPS6071911A (ja) 1985-04-23
JPH045122B2 JPH045122B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-01-30

Family

ID=16100121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18140283A Granted JPS6071911A (ja) 1983-09-29 1983-09-29 光学式変位・回転測定装置

Country Status (1)

Country Link
JP (1) JPS6071911A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128405A (ja) * 1989-10-12 1991-05-31 Keyence Corp フォーミングマシン等における材料の送り量検出装置
US6642506B1 (en) 2000-06-01 2003-11-04 Mitutoyo Corporation Speckle-image-based optical position transducer having improved mounting and directional sensitivities
US6873422B2 (en) 2000-12-08 2005-03-29 Mitutoyo Corporation Systems and methods for high-accuracy displacement determination in a correlation based position transducer
JP2006300763A (ja) * 2005-04-21 2006-11-02 Mitsutoyo Corp 変位検出装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128405A (ja) * 1989-10-12 1991-05-31 Keyence Corp フォーミングマシン等における材料の送り量検出装置
US6642506B1 (en) 2000-06-01 2003-11-04 Mitutoyo Corporation Speckle-image-based optical position transducer having improved mounting and directional sensitivities
US6873422B2 (en) 2000-12-08 2005-03-29 Mitutoyo Corporation Systems and methods for high-accuracy displacement determination in a correlation based position transducer
JP2006300763A (ja) * 2005-04-21 2006-11-02 Mitsutoyo Corp 変位検出装置

Also Published As

Publication number Publication date
JPH045122B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-01-30

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