JPS6070346A - 半導体ガス検出素子 - Google Patents

半導体ガス検出素子

Info

Publication number
JPS6070346A
JPS6070346A JP17821683A JP17821683A JPS6070346A JP S6070346 A JPS6070346 A JP S6070346A JP 17821683 A JP17821683 A JP 17821683A JP 17821683 A JP17821683 A JP 17821683A JP S6070346 A JPS6070346 A JP S6070346A
Authority
JP
Japan
Prior art keywords
semiconductor
detection element
metal wire
resistance value
gas detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17821683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312702B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Kaino
貝野　洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINKOSUMOSU DENKI KK
New Cosmos Electric Co Ltd
Original Assignee
SHINKOSUMOSU DENKI KK
New Cosmos Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINKOSUMOSU DENKI KK, New Cosmos Electric Co Ltd filed Critical SHINKOSUMOSU DENKI KK
Priority to JP17821683A priority Critical patent/JPS6070346A/ja
Priority to EP19840301211 priority patent/EP0120605B1/en
Priority to DE8484301211T priority patent/DE3468739D1/de
Publication of JPS6070346A publication Critical patent/JPS6070346A/ja
Publication of JPH0312702B2 publication Critical patent/JPH0312702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP17821683A 1983-03-29 1983-09-28 半導体ガス検出素子 Granted JPS6070346A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP17821683A JPS6070346A (ja) 1983-09-28 1983-09-28 半導体ガス検出素子
EP19840301211 EP0120605B1 (en) 1983-03-29 1984-02-24 Gas detecting apparatus
DE8484301211T DE3468739D1 (en) 1983-03-29 1984-02-24 Gas detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17821683A JPS6070346A (ja) 1983-09-28 1983-09-28 半導体ガス検出素子

Publications (2)

Publication Number Publication Date
JPS6070346A true JPS6070346A (ja) 1985-04-22
JPH0312702B2 JPH0312702B2 (enrdf_load_stackoverflow) 1991-02-20

Family

ID=16044608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17821683A Granted JPS6070346A (ja) 1983-03-29 1983-09-28 半導体ガス検出素子

Country Status (1)

Country Link
JP (1) JPS6070346A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320392A (en) * 1976-08-10 1978-02-24 Tama Denki Kougiyou Kk Gas sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320392A (en) * 1976-08-10 1978-02-24 Tama Denki Kougiyou Kk Gas sensor

Also Published As

Publication number Publication date
JPH0312702B2 (enrdf_load_stackoverflow) 1991-02-20

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