JPS6070075U - 金属膜抵抗測定用電極 - Google Patents

金属膜抵抗測定用電極

Info

Publication number
JPS6070075U
JPS6070075U JP16154583U JP16154583U JPS6070075U JP S6070075 U JPS6070075 U JP S6070075U JP 16154583 U JP16154583 U JP 16154583U JP 16154583 U JP16154583 U JP 16154583U JP S6070075 U JPS6070075 U JP S6070075U
Authority
JP
Japan
Prior art keywords
electrode
metal film
film resistance
resistance measurement
center point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16154583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424454Y2 (enrdf_load_stackoverflow
Inventor
正美 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16154583U priority Critical patent/JPS6070075U/ja
Publication of JPS6070075U publication Critical patent/JPS6070075U/ja
Application granted granted Critical
Publication of JPH0424454Y2 publication Critical patent/JPH0424454Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
JP16154583U 1983-10-19 1983-10-19 金属膜抵抗測定用電極 Granted JPS6070075U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Publications (2)

Publication Number Publication Date
JPS6070075U true JPS6070075U (ja) 1985-05-17
JPH0424454Y2 JPH0424454Y2 (enrdf_load_stackoverflow) 1992-06-09

Family

ID=30354995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16154583U Granted JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Country Status (1)

Country Link
JP (1) JPS6070075U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (ja) * 2007-03-30 2008-10-16 Tokyo Electron Ltd 測定システム
JP2024023323A (ja) * 2018-07-11 2024-02-21 Ｎｅｘｔ Ｉｎｎｏｖａｔｉｏｎ合同会社 抵抗測定方法及び接合型整流素子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (enrdf_load_stackoverflow) * 1974-09-17 1976-03-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (enrdf_load_stackoverflow) * 1974-09-17 1976-03-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (ja) * 2007-03-30 2008-10-16 Tokyo Electron Ltd 測定システム
JP2024023323A (ja) * 2018-07-11 2024-02-21 Ｎｅｘｔ Ｉｎｎｏｖａｔｉｏｎ合同会社 抵抗測定方法及び接合型整流素子

Also Published As

Publication number Publication date
JPH0424454Y2 (enrdf_load_stackoverflow) 1992-06-09

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