JPS6067363U - 真空処理装置用治具 - Google Patents

真空処理装置用治具

Info

Publication number
JPS6067363U
JPS6067363U JP15937383U JP15937383U JPS6067363U JP S6067363 U JPS6067363 U JP S6067363U JP 15937383 U JP15937383 U JP 15937383U JP 15937383 U JP15937383 U JP 15937383U JP S6067363 U JPS6067363 U JP S6067363U
Authority
JP
Japan
Prior art keywords
jig
protrusion
vacuum processing
processing equipment
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15937383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126766Y2 (enrdf_load_stackoverflow
Inventor
田村　栄三
Original Assignee
株式会社徳田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社徳田製作所 filed Critical 株式会社徳田製作所
Priority to JP15937383U priority Critical patent/JPS6067363U/ja
Publication of JPS6067363U publication Critical patent/JPS6067363U/ja
Application granted granted Critical
Publication of JPH0126766Y2 publication Critical patent/JPH0126766Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15937383U 1983-10-17 1983-10-17 真空処理装置用治具 Granted JPS6067363U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15937383U JPS6067363U (ja) 1983-10-17 1983-10-17 真空処理装置用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15937383U JPS6067363U (ja) 1983-10-17 1983-10-17 真空処理装置用治具

Publications (2)

Publication Number Publication Date
JPS6067363U true JPS6067363U (ja) 1985-05-13
JPH0126766Y2 JPH0126766Y2 (enrdf_load_stackoverflow) 1989-08-10

Family

ID=30350848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15937383U Granted JPS6067363U (ja) 1983-10-17 1983-10-17 真空処理装置用治具

Country Status (1)

Country Link
JP (1) JPS6067363U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0126766Y2 (enrdf_load_stackoverflow) 1989-08-10

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