JPS6060042U - デイスククランプ装置 - Google Patents

デイスククランプ装置

Info

Publication number
JPS6060042U
JPS6060042U JP15141383U JP15141383U JPS6060042U JP S6060042 U JPS6060042 U JP S6060042U JP 15141383 U JP15141383 U JP 15141383U JP 15141383 U JP15141383 U JP 15141383U JP S6060042 U JPS6060042 U JP S6060042U
Authority
JP
Japan
Prior art keywords
disc
clamp arm
gear
screw shaft
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15141383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222836Y2 (enrdf_load_stackoverflow
Inventor
勉 松井
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP15141383U priority Critical patent/JPS6060042U/ja
Publication of JPS6060042U publication Critical patent/JPS6060042U/ja
Application granted granted Critical
Publication of JPH0222836Y2 publication Critical patent/JPH0222836Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP15141383U 1983-09-30 1983-09-30 デイスククランプ装置 Granted JPS6060042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15141383U JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15141383U JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Publications (2)

Publication Number Publication Date
JPS6060042U true JPS6060042U (ja) 1985-04-26
JPH0222836Y2 JPH0222836Y2 (enrdf_load_stackoverflow) 1990-06-20

Family

ID=30335536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15141383U Granted JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Country Status (1)

Country Link
JP (1) JPS6060042U (enrdf_load_stackoverflow)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech, Inc., Beaverton, Oreg. Wafersonde
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
AU2003233659A1 (en) 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202005021434U1 (de) 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermooptische Einspannvorrichtung
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
CA2570886A1 (en) 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
JP2008512680A (ja) 2004-09-13 2008-04-24 カスケード マイクロテック インコーポレイテッド 両面プロービング構造体
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
WO2006137979A2 (en) 2005-06-13 2006-12-28 Cascade Microtech, Inc. Wideband active-passive differential signal probe
DE112007001399T5 (de) 2006-06-09 2009-05-07 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031802A (enrdf_load_stackoverflow) * 1973-07-20 1975-03-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031802A (enrdf_load_stackoverflow) * 1973-07-20 1975-03-28

Also Published As

Publication number Publication date
JPH0222836Y2 (enrdf_load_stackoverflow) 1990-06-20

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