JPS6057938A - 極微細パタ−ン形成方法 - Google Patents

極微細パタ−ン形成方法

Info

Publication number
JPS6057938A
JPS6057938A JP58165964A JP16596483A JPS6057938A JP S6057938 A JPS6057938 A JP S6057938A JP 58165964 A JP58165964 A JP 58165964A JP 16596483 A JP16596483 A JP 16596483A JP S6057938 A JPS6057938 A JP S6057938A
Authority
JP
Japan
Prior art keywords
film
electron beam
pattern
substrate
electron beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58165964A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458178B2 (show.php
Inventor
Katsumi Mori
克己 森
Shinji Matsui
真二 松井
Susumu Asata
麻多　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58165964A priority Critical patent/JPS6057938A/ja
Publication of JPS6057938A publication Critical patent/JPS6057938A/ja
Publication of JPH0458178B2 publication Critical patent/JPH0458178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP58165964A 1983-09-09 1983-09-09 極微細パタ−ン形成方法 Granted JPS6057938A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58165964A JPS6057938A (ja) 1983-09-09 1983-09-09 極微細パタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58165964A JPS6057938A (ja) 1983-09-09 1983-09-09 極微細パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS6057938A true JPS6057938A (ja) 1985-04-03
JPH0458178B2 JPH0458178B2 (show.php) 1992-09-16

Family

ID=15822351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58165964A Granted JPS6057938A (ja) 1983-09-09 1983-09-09 極微細パタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS6057938A (show.php)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07130710A (ja) * 1993-11-02 1995-05-19 Nec Corp 微細パターン形成方法とその装置
US6849471B2 (en) 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US6913942B2 (en) 2003-03-28 2005-07-05 Reflectvity, Inc Sacrificial layers for use in fabrications of microelectromechanical devices
US6942811B2 (en) 1999-10-26 2005-09-13 Reflectivity, Inc Method for achieving improved selectivity in an etching process
US6949202B1 (en) 1999-10-26 2005-09-27 Reflectivity, Inc Apparatus and method for flow of process gas in an ultra-clean environment
US6960305B2 (en) 1999-10-26 2005-11-01 Reflectivity, Inc Methods for forming and releasing microelectromechanical structures
US6965468B2 (en) 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US6980347B2 (en) 2003-07-03 2005-12-27 Reflectivity, Inc Micromirror having reduced space between hinge and mirror plate of the micromirror
US7019376B2 (en) 2000-08-11 2006-03-28 Reflectivity, Inc Micromirror array device with a small pitch size
US7027200B2 (en) 2002-03-22 2006-04-11 Reflectivity, Inc Etching method used in fabrications of microstructures
US7041224B2 (en) 1999-10-26 2006-05-09 Reflectivity, Inc. Method for vapor phase etching of silicon
US7189332B2 (en) 2001-09-17 2007-03-13 Texas Instruments Incorporated Apparatus and method for detecting an endpoint in a vapor phase etch
US7645704B2 (en) 2003-09-17 2010-01-12 Texas Instruments Incorporated Methods and apparatus of etch process control in fabrications of microstructures

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07130710A (ja) * 1993-11-02 1995-05-19 Nec Corp 微細パターン形成方法とその装置
US6960305B2 (en) 1999-10-26 2005-11-01 Reflectivity, Inc Methods for forming and releasing microelectromechanical structures
US7041224B2 (en) 1999-10-26 2006-05-09 Reflectivity, Inc. Method for vapor phase etching of silicon
US6942811B2 (en) 1999-10-26 2005-09-13 Reflectivity, Inc Method for achieving improved selectivity in an etching process
US6949202B1 (en) 1999-10-26 2005-09-27 Reflectivity, Inc Apparatus and method for flow of process gas in an ultra-clean environment
US7019376B2 (en) 2000-08-11 2006-03-28 Reflectivity, Inc Micromirror array device with a small pitch size
US7189332B2 (en) 2001-09-17 2007-03-13 Texas Instruments Incorporated Apparatus and method for detecting an endpoint in a vapor phase etch
US7027200B2 (en) 2002-03-22 2006-04-11 Reflectivity, Inc Etching method used in fabrications of microstructures
US6913942B2 (en) 2003-03-28 2005-07-05 Reflectvity, Inc Sacrificial layers for use in fabrications of microelectromechanical devices
US6849471B2 (en) 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US7153443B2 (en) 2003-03-28 2006-12-26 Texas Instruments Incorporated Microelectromechanical structure and a method for making the same
US6965468B2 (en) 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US6970281B2 (en) 2003-07-03 2005-11-29 Reflectivity, Inc. Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US6980347B2 (en) 2003-07-03 2005-12-27 Reflectivity, Inc Micromirror having reduced space between hinge and mirror plate of the micromirror
US6985277B2 (en) 2003-07-03 2006-01-10 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US6972891B2 (en) 2003-07-24 2005-12-06 Reflectivity, Inc Micromirror having reduced space between hinge and mirror plate of the micromirror
US7002726B2 (en) 2003-07-24 2006-02-21 Reflectivity, Inc. Micromirror having reduced space between hinge and mirror plate of the micromirror
US7645704B2 (en) 2003-09-17 2010-01-12 Texas Instruments Incorporated Methods and apparatus of etch process control in fabrications of microstructures

Also Published As

Publication number Publication date
JPH0458178B2 (show.php) 1992-09-16

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