JPS6057539A - Production for magnetic recording medium - Google Patents

Abstract

PURPOSE:To prevent a high polymer base material on a rotary drum from being wound around the rotary drum, by forming a magnetic thin film layer on the high polymer base material on the rotary drum in the paper deposition method and subjecting the part of the base material, which is peeled from the rotary drum, to a local glow discharge processing. CONSTITUTION:The magnetic thin film layer is vacuum-deposited onto the surface of a high polymer base material 20 in a rotary drum 10, and this base material 20 enters a glow discharge processing part 21. The discharge processing part 21 is arranged near the part of the high polymer base material 20 which is peeled from the rotary drum 10, and gaseous Ar or the like is introduced into the processing part 21 through a gas leading-in hole 24, and the inside of the processing part 21 is set to a pressure suitable for glow discharge by a shielding wall 22. The base material 20 in the part peeled from the drum 10 is exposed to glow discharge due to a glow discharge electrode 23. Though the base material 20 is electrified by an electron beam or the like for vacuum deposition, this electrification is removed by said local glow discharge processing. Consequently, it is not difficult that the base material 20 is peeled from the drum 10.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for forming a polymer substrate by a paper deposition method.
The present invention relates to a method of manufacturing a magnetic recording medium in which a magnetic thin film layer as a magnetic recording layer is formed in 1-, and more particularly to a method of manufacturing a magnetic recording medium that prevents a polymer substrate from being caught in a manufacturing device.

Conventionally, as a magnetic recording medium, γ-Fe203. 1-F doped with CO
'e203. Fe3α, Coi-doped Fe3O4
+ Powder magnetic materials such as beltlide compounds of r-Fe203 and Fe3O4, magnetic powders such as CrO2, or ferromagnetic alloy powders are combined with vinyl chloride-vinyl acetate copolymers, styrene-butadiene copolymers, epoxy resins, polyurethane resins, etc. Is it something dispersed in an organic binder? Paint-on type products that are applied and dried have been widely used7
In recent years, with the increasing demand for high-density recording, magnetic recording layers are made of ferromagnetic metal thin films formed by paper deposition methods such as vacuum evaporation, sputtering, and ion blating, or plating methods such as electroplating and electroless plating. So-called binder-free magnetic recording media that do not use any binder are attracting attention, and various efforts are being made to put them into practical use.

Conventional coating-type magnetic recording media mainly use fully magnetic metal oxide materials, which have lower saturation magnetization than ferromagnetic metals, and the thinning required for high-density recording results in a reduction in signal output. It has reached its limit, and its manufacturing process is complicated, and it has the disadvantage of requiring large amounts of incidental equipment for solvent recovery and pollution prevention. Non-binder type magnetic recording media are formed as thin films without containing any non-magnetic substances such as ferromagnetic metal binders, which have a saturation magnetization larger than that of the above-mentioned oxides, so they can be made ultra-thin for high-density recording. Moreover, the manufacturing process is simple.

As one of the requirements for magnetic recording media for high-density recording, high coercive force and thinness have been proposed both theoretically and experimentally. There are great expectations for non-binder type magnetic recording media, which can be easily made small and thin and have a high saturation magnetic flux density.

'I? The K-paper deposition method is very advantageous because unlike plating, it does not require any drainage treatment, the manufacturing process is simple, and the film deposition rate can be increased.

However, in the method of manufacturing a magnetic recording medium using the above-mentioned paper deposition method, accidents tend to occur in which the polymer substrate on which the magnetic thin film layer is formed gets caught up in the manufacturing equipment. In other words, in the method of manufacturing this type of magnetic recording medium, generally, a polymer base material hung on a rotating drum is cleanly moved to the rotating drum using a feeding mechanism and a winding mechanism, and this rotation A magnetic thin film layer is formed on the polymer substrate on the drum, but for example, the electron beam used for vapor deposition charges the polymer substrate and makes it difficult to peel off from the rotating drum. It is possible.

It is an object of the present invention to provide an entire method for manufacturing a magnetic recording medium by a paper deposition method, which can prevent the above-described entrainment of a polymer substrate.

As described above, in the method for manufacturing a magnetic recording medium of the present invention, a polymer substrate is conveyed along a rotating drum by a feeding mechanism and a winding mechanism, and a magnetic material is applied to the polymer substrate on this rotating drum by a paper deposition method. The main feature is that the entire thin film layer is formed and then a local glow discharge treatment is applied to the part of the polymer substrate that is to be peeled off from the rotating drum.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

The figure shows an apparatus for manufacturing magnetic recording media using a method according to one embodiment of the present invention. This apparatus forms a magnetic thin film layer on a polymer substrate by vacuum evaporation as an example of a paper deposition method. +5t
6+7. , s, a polymer substrate transport mechanism consisting of a touch roller 9 and a rotating drum 10, and a glow chamber 11. which is arranged near the transport rollers 5 and 8, respectively. ] 2. Furthermore, crucible 13, electron beam irradiation device J4, and mask 15
It has. In addition to the above-mentioned polymer substrate conveyance mechanism, known expander rubber rollers and dancer
Roller "4 'j: 411 may be formed in combination. Also, the vapor deposition tank is connected to an exhaust port 16 connected to a vacuum exhaust system (not shown) and an oxygen inlet port ]7, The glow chambers 1 ], , ], and 2 are also communicated with exhaust ports 18 and 19 connected to a vacuum exhaust system.

The polymer substrate 20 serving as the magnetic layer support of the magnetic recording medium is
Starting from the sending roller 2, the sheet is applied to the conveying rollers 4, 5, the touch roller 9, the rotary drum], the O1 conveying roller 6, 7, and 8, and is finally wound up by the winding roller 3. The polymer substrate 20 from which the above-mentioned delivery roller 2 has also been delivered is subjected to glow discharge treatment by the glow discharge electrode 1] in the glow chamber J and cleaned and activated, and then transported along the rotating tram IOK. However, a magnetic film layer is vacuum-deposited on the surface of the rotating drum 10. The vacuum evaporation of this magnetic thin film layer is carried out by heating the crucible 13 with an electron beam generated from the electron beam irradiation device 1/I under a state in which the inside of the evaporation tank 1 is evacuated by exhausting the air through the exhaust port 16. This is done by evaporating the magnetic metal material M2 stored in 13.

Polymer substrate 2 on which a magnetic thin film layer is deposited as described above
0 moves as it is on the rotating drum 1° and is wound up by the winding roller 3 via the conveying roller 6.7.8i, but before being wound up, it is moved by the glow discharge electrode 1.2a in the glow chamber 12. Glow discharge treated. This glow discharge treatment eliminates static electricity from the polymer substrate 2o, and prevents the polymer substrate 20 from being rolled up or blocked by the winding roller 3.

The configuration described above is generally employed in conventional vacuum evaporation-based magnetic recording medium manufacturing equipment, but this equipment uses glow for localized glow discharge processing, which is a feature of the present invention. A discharge processing section 21 is provided. This glow discharge treatment section 21 has a glow discharge electrode 23 disposed inside a shielding wall 22 and a gas inlet 24 that is fully opened. It is located in

A gas such as Ar is introduced into the glow discharge processing section 21 through the gas inlet 24, and the inside of the glow discharge processing section 21 is protected by the shielding wall 22 so that the inside of the vapor deposition tank 1 suitable for JL empty evaporation is heated. In the glow discharge treatment section 21 having the above-described structure, the pressure is set at a pressure different from that of the rotary drum, and the pressure is set at a pressure suitable for glow discharge. layer) is exposed to a glow discharge by a glow discharge electrode 23. Although the polymer substrate 20 is charged by the electron beam used in the vacuum evaporation described above or by the electrostatic effect during peeling from the rotating drum 10, the high polymer substrate 20 can be charged by applying the local glow discharge treatment as described above. Ions are adsorbed onto the molecular substrate 20, and the charge is neutralized and removed. Therefore, this polymer base 20
is not electrically attracted to the rotating drum 10 and becomes difficult to peel off, and is no longer caught in the rotating drum 10. Furthermore, when the polymer substrate 20 is neutralized as described above, the electrical system of the control device of the transport mechanism that transports the polymer substrate 20 is not affected by noise, etc., and the substrate transport is stabilized.

As the mechanism for generating the glow discharge, an AC glow discharge mechanism, a DC glow discharge mechanism, a high frequency glow discharge mechanism, etc. can be arbitrarily selected and used. Further, if the polymer substrate 20 is sufficiently neutralized by the above-described local glow discharge treatment, the glow chamber 12 before the row 23 to be wound up may be omitted. Further, the local glow discharge treatment may be applied only to the surface of the substrate opposite to the surface on which the magnetic thin film layer is formed, or may be applied to both surfaces of the substrate 20.

In addition, as the magnetic metal particle M used for vacuum evaporation, P
Metals such as C, Co, Ni, or F'e-C
o, Fe-Ni+ Co-Ni, Fe-Co-N
i, Fe-Rh, Fe-Cu.

Co-Cu, Cn-Au, Co-Y, Co-La,
Co-Pr, Co-()d.

Co-8m, Co-Pl, Ni-Cu, Mn-
B1. Mn-8b, M'n-Ag.

Fe-Cr, Cn-Cr, Ni-Cr, Fe-C
o-Cr, Ni-Co-Cr.

A ferromagnetic alloy mainly composed of Fe-Co-Ni-Cr or the like may be used. ! CO or C is suitable for 1.
It is an alloy that contains a large amount of o f 7.5 by weight. Furthermore, as additives, W + Mo + Ta; Mg +
It may also contain a small amount of S + + A1, etc. Also C,
It may also contain a small amount of nonmetallic components such as B, O, N, and P.

Further, as the polymer substrate used in the present invention, plastic bases such as polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate, polycarbonate, and polyethylene naphthalene-1 are preferable. In particular, in the present invention, the surface roughness (Ra) is 0.
0 ] The above flexible plastic base having a thickness of 2 μm or less is preferable.

Next, the differences in operation and effect between the method of the present invention and the conventional method will be explained by citing all specific numerical examples.

Average surface roughness R, a) of the polymer base 20 is 0.02
The glow chambers 11 and 1 of the illustrated device were made using a 23 μm thick PET (polyethine terephthalate) base of
．． 2 f 3 All masks 15 were set so that oblique evaporation was performed at an incident angle of 40°. CO.gNi.2 was used as the magnetic metal material M, and oxygen gas was introduced through the oxygen inlet 17 to increase the oxygen partial pressure I x 10''. T”or
Vacuum deposition was performed on the polymer substrate 20 at r. In the glow discharge treatment section 2], A, r gas k 3 is supplied from the gas inlet 24.
00 cc/min is applied to the glow discharge electrode 23, and a direct current voltage of 1]1 (V) is applied to the glow discharge electrode 23, and a local glow discharge treatment is performed on the polymer substrate 20 at the peeled part from the rotating drum 0.Polymer The conveyance speed of the base 20 is 30 m/min
If the winding tension is 1. , 5 kg or less, the polymer substrate 20 was wound around the rotating drone 10 and was stably transported without falling.

Next, as the polymer substrate 20 and the magnetic metal material M to be vapor-deposited, all the same materials as those in the above example were used, and the glow chamber 1 was opened.
The conditions for the glow discharge treatment and vacuum deposition in 1.2 and the conveyance speed of the polymer substrate 20 were all set the same as in the above example, and the glow discharge treatment section 21 did not perform the local glow discharge treatment, but the vacuum deposition was performed. Vapor deposition was performed.

As a result, although the winding tension of the polymer substrate 20 was increased to 4 kgt, the substrate 20 was caught up in the rotating drum 10 and it became impossible to convey the substrate 20. Magnetic 9 on the substrate 2o
Regarding an example in which the present invention is applied to a method of forming a film layer)
71, but the present invention also covers all magnetic recording media manufacturing methods in which a polymer substrate is conveyed along a rotating drum and a magnetic thin film layer is formed on the polymer substrate by a paper deposition method on the rotating tram. It has similar effects.

The method of manufacturing a magnetic recording medium of the present invention, which has been explained in detail below, can reliably prevent the polymer substrate from being wound to the appropriate size on a rotating drum, and can greatly increase the productivity of magnetic recording media. Ru.

[Brief explanation of drawings]

The figure is a schematic diagram showing an example of an apparatus for carrying out the method of the present invention. 2...Feeding roller 3... Winding up roller 4.5, 6, 7, 8... Conveyance roller 10...Rotating drum 13...Lupo 14...Electron beam irradiation device 20...Polymer base 21-...Glow discharge treatment section M......
・Magnetic Metal Materials (Voluntary) Mr. Utne City, Masashi, Commissioner of the Patent Office, 1, Indication of Matter A'1, Patent Application No. 1983-164578, 2, Name of the Invention, Method of Manufacturing Magnetic Recording Media, 3.7 Yamamasa. Things to do! Relationship with 1 Patent applicant Address 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name Fuji Photo Film Co., Ltd. 4 Agent 5-2-1-8 Rokigi, Minato-ku, Tokyo Contents of amendment 1) Specification No. Page 4, lines 12-13, ``Caught up in manufacturing equipment'' is corrected to ``Significant, resulting in failure to transport.'' 2) On page 5, line 2, ``no deru'' is corrected to ``an accident has been seen.'' 3) Attach the drawing (j of q: Correct it to sea urchin.

Claims (1)

[Claims] The polymer substrate is conveyed along a rotating drum by a feeding mechanism and a winding mechanism, a magnetic thin film layer is entirely formed on the polymer substrate on this rotating tram by a paper deposition method, and the polymer substrate is transported from the rotating drum to the polymer substrate on this rotating tram. A method of manufacturing a magnetic recording medium, comprising applying local glow discharge treatment to a portion to be peeled off.