JPS6057202A - 光学式表面変位検出装置 - Google Patents

光学式表面変位検出装置

Info

Publication number
JPS6057202A
JPS6057202A JP16632083A JP16632083A JPS6057202A JP S6057202 A JPS6057202 A JP S6057202A JP 16632083 A JP16632083 A JP 16632083A JP 16632083 A JP16632083 A JP 16632083A JP S6057202 A JPS6057202 A JP S6057202A
Authority
JP
Japan
Prior art keywords
scanning
reflected light
light
displacement
scanning beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16632083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331367B2 (en:Method
Inventor
Junpei Okada
岡田　淳平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP16632083A priority Critical patent/JPS6057202A/ja
Publication of JPS6057202A publication Critical patent/JPS6057202A/ja
Publication of JPH0331367B2 publication Critical patent/JPH0331367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16632083A 1983-09-09 1983-09-09 光学式表面変位検出装置 Granted JPS6057202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16632083A JPS6057202A (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16632083A JPS6057202A (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Publications (2)

Publication Number Publication Date
JPS6057202A true JPS6057202A (ja) 1985-04-03
JPH0331367B2 JPH0331367B2 (en:Method) 1991-05-02

Family

ID=15829163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16632083A Granted JPS6057202A (ja) 1983-09-09 1983-09-09 光学式表面変位検出装置

Country Status (1)

Country Link
JP (1) JPS6057202A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108981585A (zh) * 2017-06-01 2018-12-11 上海砺晟光电技术有限公司 可精确测量曲面目标位移的激光位移传感器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3750502B2 (ja) * 2000-08-03 2006-03-01 ソニー株式会社 固体撮像装置およびカメラシステム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267661A (en) * 1975-12-02 1977-06-04 Seiko Instr & Electronics Ltd Range finding method of photoelectric type
JPS57161608A (en) * 1981-03-31 1982-10-05 Anritsu Corp Measuring device for object size

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267661A (en) * 1975-12-02 1977-06-04 Seiko Instr & Electronics Ltd Range finding method of photoelectric type
JPS57161608A (en) * 1981-03-31 1982-10-05 Anritsu Corp Measuring device for object size

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108981585A (zh) * 2017-06-01 2018-12-11 上海砺晟光电技术有限公司 可精确测量曲面目标位移的激光位移传感器

Also Published As

Publication number Publication date
JPH0331367B2 (en:Method) 1991-05-02

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