JPS6056823U - Gas supply control device for static pressure gas bearings - Google Patents

Gas supply control device for static pressure gas bearings

Info

Publication number
JPS6056823U
JPS6056823U JP14815983U JP14815983U JPS6056823U JP S6056823 U JPS6056823 U JP S6056823U JP 14815983 U JP14815983 U JP 14815983U JP 14815983 U JP14815983 U JP 14815983U JP S6056823 U JPS6056823 U JP S6056823U
Authority
JP
Japan
Prior art keywords
control device
supply control
gas
static pressure
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14815983U
Other languages
Japanese (ja)
Other versions
JPS6332983Y2 (en
Inventor
直人 佐々木
Original Assignee
日産自動車株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日産自動車株式会社 filed Critical 日産自動車株式会社
Priority to JP14815983U priority Critical patent/JPS6056823U/en
Publication of JPS6056823U publication Critical patent/JPS6056823U/en
Application granted granted Critical
Publication of JPS6332983Y2 publication Critical patent/JPS6332983Y2/ja
Granted legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の静圧気体軸受の気体供給法の一例を示す
構成図、第２図は本考案の一実施例を示す構成図である
。 ２・・・エアポンプ、４・・・アキュームレータ、５・
・・軸、６・・・静圧気体軸受、７・・・空気供給通路
、９・・・流量調整バルブ、１０・・・回転数センサ、
１１・・・圧力センサ、１２・・・コントロールユニッ
ト、Ｃ・・・間隙。FIG. 1 is a block diagram showing an example of a conventional gas supply method for a static pressure gas bearing, and FIG. 2 is a block diagram showing an embodiment of the present invention. 2... Air pump, 4... Accumulator, 5...
... shaft, 6 ... static pressure gas bearing, 7 ... air supply passage, 9 ... flow rate adjustment valve, 10 ... rotation speed sensor,
DESCRIPTION OF SYMBOLS 11... Pressure sensor, 12... Control unit, C... Gap.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ポンプによって加圧された気体を軸と軸受との間隙に供
給することによって軸を浮遊支持するようにした静圧気
体軸受の気体供給制御装置におい、　　て軸の回転数を
検出する手段と、該手段により検出された軸の回転数に
応じて静圧気体軸受への気体の供給量を可変制御する手
段とを設けたことを特徴とする静圧気体軸受の気体供給
制御装置。In a gas supply control device for a hydrostatic gas bearing, the shaft is floatingly supported by supplying pressurized gas by a pump to a gap between the shaft and the bearing, the device comprising: means for detecting the rotational speed of the shaft; 1. A gas supply control device for a hydrostatic gas bearing, comprising: means for variably controlling the amount of gas supplied to the hydrostatic gas bearing in accordance with the rotational speed of a shaft detected by the means.
JP14815983U 1983-09-27 1983-09-27 Gas supply control device for static pressure gas bearings Granted JPS6056823U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (en) 1983-09-27 1983-09-27 Gas supply control device for static pressure gas bearings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14815983U JPS6056823U (en) 1983-09-27 1983-09-27 Gas supply control device for static pressure gas bearings

Publications (2)

Publication Number Publication Date
JPS6056823U true JPS6056823U (en) 1985-04-20
JPS6332983Y2 JPS6332983Y2 (en) 1988-09-02

Family

ID=30329261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14815983U Granted JPS6056823U (en) 1983-09-27 1983-09-27 Gas supply control device for static pressure gas bearings

Country Status (1)

Country Link
JP (1) JPS6056823U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114852A (en) * 2004-10-18 2006-04-27 Dainippon Screen Mfg Co Ltd Substrate holder
WO2022025017A1 (en) * 2020-07-30 2022-02-03 ファナック株式会社 Pressurized fluid supply system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925934U (en) * 1972-06-13 1974-03-05
JPS5022150A (en) * 1973-06-21 1975-03-10
JPS56138502A (en) * 1980-03-31 1981-10-29 Agency Of Ind Science & Technol Oil pressure servo driving device
JPS57117401U (en) * 1981-01-14 1982-07-21

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925934U (en) * 1972-06-13 1974-03-05
JPS5022150A (en) * 1973-06-21 1975-03-10
JPS56138502A (en) * 1980-03-31 1981-10-29 Agency Of Ind Science & Technol Oil pressure servo driving device
JPS57117401U (en) * 1981-01-14 1982-07-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114852A (en) * 2004-10-18 2006-04-27 Dainippon Screen Mfg Co Ltd Substrate holder
JP4594031B2 (en) * 2004-10-18 2010-12-08 大日本スクリーン製造株式会社 Substrate holding device
WO2022025017A1 (en) * 2020-07-30 2022-02-03 ファナック株式会社 Pressurized fluid supply system

Also Published As

Publication number Publication date
JPS6332983Y2 (en) 1988-09-02

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