JPS6052642U - monolithic integrated circuit - Google Patents
monolithic integrated circuitInfo
- Publication number
- JPS6052642U JPS6052642U JP14330183U JP14330183U JPS6052642U JP S6052642 U JPS6052642 U JP S6052642U JP 14330183 U JP14330183 U JP 14330183U JP 14330183 U JP14330183 U JP 14330183U JP S6052642 U JPS6052642 U JP S6052642U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- monolithic integrated
- spiral inductor
- strip
- shaped conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の角形スパイラルインダクタヲ設けたモノ
リシック集積回路のインダクタ部分の平面図、第２図は
第１図のＡ−Ａ’断面図、第３図はスパイラルインダク
タを用いた並列帰還形ＦＥＴ増幅器の等価回路図、第４
図はこの考案の角形スパイラルインダクタを設けたモノ
リシック集積回路図で、ａは平面図、ＢはａのＡ−Ａ’
断面図、ＣはａのＢ−Ｂ’断面図、第５図は第４図の等
価回路図、第６図はこの考案の角形スパイラルインダク
タを設けたモノリシック並列帰還形ＦＥＴ増幅器を示す
図である。
図中、１は半導体基板、２は帯状導体、３は導体膜、４
は帯状導体と導体膜とを接続するエアブリッジＡ、５は
エアブリッジＢ、６はＦＥＴ、７はゲート電極、８はド
レイン電極、９はリース電極、１０は抵抗、１１は平行
平板キャパシタである。なお、図中同一、あるいは相当
部分には同一符号を付して示しである。
第４図
第５図Figure 1 is a plan view of the inductor portion of a monolithic integrated circuit equipped with a conventional rectangular spiral inductor, Figure 2 is a sectional view taken along line AA' in Figure 1, and Figure 3 is a parallel feedback FET using a spiral inductor. Equivalent circuit diagram of amplifier, 4th
The figure is a diagram of a monolithic integrated circuit equipped with a rectangular spiral inductor of this invention, where a is a plan view and B is an AA' of a.
5 is an equivalent circuit diagram of FIG. 4, and FIG. 6 is a diagram showing a monolithic parallel feedback type FET amplifier provided with a rectangular spiral inductor of this invention. . In the figure, 1 is a semiconductor substrate, 2 is a strip-shaped conductor, 3 is a conductor film, and 4
is an air bridge A that connects the strip conductor and the conductor film, 5 is an air bridge B, 6 is a FET, 7 is a gate electrode, 8 is a drain electrode, 9 is a lease electrode, 10 is a resistor, and 11 is a parallel plate capacitor. . It should be noted that the same or corresponding parts in the figures are indicated by the same reference numerals. Figure 4 Figure 5
Claims (1)
ック集積回路において、スパイラルインダクタが隣接す
る一方の帯状導体と他方の帯状導体との間に金属膜を設
けたことを特徴とするモノリシック集積回路。A monolithic integrated circuit in which a spiral inductor is provided on a semiconductor substrate, characterized in that a metal film is provided between one strip-shaped conductor and the other strip-shaped conductor where the spiral inductor is adjacent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14330183U JPS6052642U (en) | 1983-09-16 | 1983-09-16 | monolithic integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14330183U JPS6052642U (en) | 1983-09-16 | 1983-09-16 | monolithic integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6052642U true JPS6052642U (en) | 1985-04-13 |
Family
ID=30319911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14330183U Pending JPS6052642U (en) | 1983-09-16 | 1983-09-16 | monolithic integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6052642U (en) |
-
1983
- 1983-09-16 JP JP14330183U patent/JPS6052642U/en active Pending
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