JPS6050850A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS6050850A
JPS6050850A JP58160089A JP16008983A JPS6050850A JP S6050850 A JPS6050850 A JP S6050850A JP 58160089 A JP58160089 A JP 58160089A JP 16008983 A JP16008983 A JP 16008983A JP S6050850 A JPS6050850 A JP S6050850A
Authority
JP
Japan
Prior art keywords
electron beam
scanning
signal
electron
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58160089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542102B2 (enrdf_load_stackoverflow
Inventor
Akinari Ono
小野　昭成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58160089A priority Critical patent/JPS6050850A/ja
Publication of JPS6050850A publication Critical patent/JPS6050850A/ja
Publication of JPH0542102B2 publication Critical patent/JPH0542102B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58160089A 1983-08-31 1983-08-31 走査電子顕微鏡 Granted JPS6050850A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58160089A JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58160089A JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6050850A true JPS6050850A (ja) 1985-03-20
JPH0542102B2 JPH0542102B2 (enrdf_load_stackoverflow) 1993-06-25

Family

ID=15707617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58160089A Granted JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6050850A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652859A (en) * 1979-10-05 1981-05-12 Hitachi Ltd Scanning type electron microscope
JPS5765656A (en) * 1980-10-08 1982-04-21 Hitachi Ltd Limited view diffraction image device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652859A (en) * 1979-10-05 1981-05-12 Hitachi Ltd Scanning type electron microscope
JPS5765656A (en) * 1980-10-08 1982-04-21 Hitachi Ltd Limited view diffraction image device

Also Published As

Publication number Publication date
JPH0542102B2 (enrdf_load_stackoverflow) 1993-06-25

Similar Documents

Publication Publication Date Title
US6265719B1 (en) Inspection method and apparatus using electron beam
US9679738B2 (en) Electron microscope
US6310341B1 (en) Projecting type charged particle microscope and projecting type substrate inspection system
JP2875940B2 (ja) 試料の高さ計測手段を備えた電子ビーム装置
US8067733B2 (en) Scanning electron microscope having a monochromator
WO2015050201A1 (ja) 荷電粒子線の傾斜補正方法および荷電粒子線装置
US4097740A (en) Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope
JP3101114B2 (ja) 走査電子顕微鏡
JPH0244103B2 (enrdf_load_stackoverflow)
JPS6134221B2 (enrdf_load_stackoverflow)
JPH0122705B2 (enrdf_load_stackoverflow)
US7217924B1 (en) Holey mirror arrangement for dual-energy e-beam inspector
TWI384216B (zh) Checking method of charged particle line and inspection method of charged particle
JPH0235419B2 (enrdf_load_stackoverflow)
JPS6050850A (ja) 走査電子顕微鏡
JPH04229939A (ja) 電子ビーム装置
JPH0756786B2 (ja) 電子顕微鏡の焦点合わせ装置
JPH11135052A (ja) 走査電子顕微鏡
JP2000123774A (ja) 走査透過電子顕微鏡
JP2000003690A (ja) 電子線装置
JPS6364255A (ja) 粒子線照射装置
JPS586267B2 (ja) 走査電子顕微鏡
JPH1167138A (ja) 微小領域観察装置
JPS59114740A (ja) 荷電ビ−ム光学鏡筒のレンズ設定方法
JP2000048749A (ja) 走査電子顕微鏡および電子ビームの軸合わせ方法