JPS6050053B2 - oil mask device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates primarily to an oil mask apparatus used in the manufacture of metallized, film capacitors.

Conventionally, this type of device has been designed to direct oil vapor generated in a nozzle pipe having a large number of nozzle holes through each nozzle hole, and to run a synthetic resin film or other substrate facing the outside of the nozzle pipe and running approximately along the outside of the nozzle pipe. on the surface to
A type in which the oil film is formed in a linear shape, and the film is then used as a linear oil mask when an aluminum or other metal film is formed on the substrate by vacuum deposition. However, in this case, the substrate generally runs along the outside of each nozzle hole with a small distance therebetween, for example, 0.15 to 0.2 mF7l. In this case, the width of each mask is more or less larger than that of each nozzle hole due to the spacing, and it tends to fluctuate, and its edges tend to be blurred.

The object of the present invention is to obtain a device that does not have such inconveniences, and the present invention aims to provide a device that does not have such inconveniences, and the oil vapor generated in a nozzle pipe having a large number of nozzle holes is led out through each nozzle hole, and the outside thereof is In a type in which a film of the oil is formed linearly on the opposing surfaces of a synthetic resin film or other substrate that runs approximately along the pipe, the outer peripheral surface of the pipe is chamfered at the location where the nozzle hole is located. The substrate is formed into a mirror-finished flat surface, and the substrate is made to run along this surface while being in contact with the surface.

One aspect of implementing the present invention will be explained with reference to the attached drawings.

In the drawings, reference numeral 1 indicates a machine frame, and a nozzle pipe 2 made of stainless steel or other metal, elongated in the horizontal direction, is fixedly installed on the front surface of the machine frame 1, and the pipe 2 has a number of nozzle holes 3 on its front surface. are arranged at appropriate intervals. In the drawing, reference numeral 4 indicates an oil pan installed horizontally on the back side of the oil pan 4, into which oil is guided from an oil tank 5 at the upper side of the oil pan 4 to a predetermined liquid level. The nozzle pipe 2 communicates with the bottom of the oil pan 4 through connecting pipes 6, 6 at both ends, and thus the oil circulates within the pipe 2 and between it and the pan 4. The liquid level was always kept at the planned level. Furthermore, the pipe 2 is provided with a pair of exhaust pipes 7, 7 that communicate the upper part of the inside thereof with the upper part of the inside of the pan 4.

In the drawings, reference numeral 8 indicates an oil gauge on the end face of the oil pan 4, 9 indicates an oil receiver under the pan 4, and 10 indicates a flow control valve interposed in one of the connecting pipes 6, 6. Furthermore, the vibrator 2 is connected to a power source (not shown) via conductive pieces 11, 11 extending from both ends thereof, and when the electric current is applied, heat is generated to heat the oil inside and generate steam. The vibe 2
is opposed to a synthetic resin film or other substrate a at the nozzle hole 3, and as shown in FIGS. A flat surface 14 is chamfered and mirror-finished at a point opposite to a, and the substrate a is in contact with and runs along this surface.

In other words, the vibrator 2 was brought into contact with the substrate a at the surface 14 to act on it.
The apparatus of the present invention can be prepared, for example, in a vacuum processing chamber 15 as shown in FIG. An oil mask is applied, and an aluminum or other metal coating is vacuum-deposited by an evaporation source 17 on the downstream side, so that the product is obtained, for example, in the state shown in Figure 6. This is then cut into predetermined widths to make each capacitor.

To explain its operation 2, oil is stored in the nozzle vibe 2 at a predetermined liquid level, and the oil is heated to generate steam, which is led to the outside from each nozzle hole 3. However, at this time, the synthetic resin film or other substrate a runs on a flat surface 14 formed in advance on its outer circumferential surface and in contact with it, so that the oil discharged from each nozzle hole 3 is The steam is supplied to the substrate a
The oil film acts directly on the opposite surface of the pores 3 and condenses at the points in contact with the pores 3, and the oil film is obtained in the shape of each line 3 having a width substantially equal to the diameter of the hole 3. In other words, a large number of parallel linear oil masks each having a width equal to the diameter of the hole 3 are provided on the substrate a at a position facing each nozzle hole 3. During such operation, the substrate a is likely to be damaged due to contact with the flat surface 14. To prevent this, the flat surface 14 is mirror-finished and its accuracy is preferably 0.2S. Further, each nozzle hole 3 is machined by electric discharge machining, and the heating temperature of the vibrator 2 is set to a relatively low temperature, for example, 150°C or less, to prevent damage due to heat, and the oil is heated at this temperature. A high grade oil with a relatively low evaporation temperature is used to generate steam, and since the oil vapor generated in the vibrator 2 tends to displace the substrate a and flow out, in order to prevent this, the substrate a is used. is relatively fast, e.g. 1507TLI
The vibrator 2 is made to run at m1n or more, and the vibrator 2 is relatively thick, for example, 25TTrJn or less.

According to the inventor's experiments, the film winding speed was set to 3507T1. For example, the mask width is 0.5 as Im1n.
It was confirmed that the accuracy of the mask width and mask pitch could be within ±0.1w1n.

In this way, according to the present invention, the outer circumferential surface of the nozzle vibrator is chamfered at the nozzle hole to form a flat surface with a mirror finish, and the substrate is moved in contact with the flat surface, instead of being isolated from the conventional method. It does not have the above-mentioned disadvantages of the type that runs on the ground, and has the advantage that it can be applied to, for example, the manufacture of capacitors, and excellent products can be obtained simply and at low cost.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of one example of the device of the present invention, Fig. 2 is a cut-away side view thereof, Fig. 3 is an enlarged front view of its main parts, Fig. 4 is a cut-away sectional view taken along the line ■-■, FIG. 5 is an explanatory diagram of one example of its use, and FIG. 6 is a sectional view of one example of the product. 2... Nozzle vibe, 3... Nozzle hole, a... Substrate, 14... Flat surface.

Claims (1)

[Claims] 1. Oil vapor generated in a nozzle pipe having a large number of nozzle holes is led out through each nozzle hole, and the outside thereof is applied onto the opposing surface of a synthetic resin film or other substrate running approximately along the nozzle hole. In the type in which the oil film is formed in a linear form, the outer circumferential surface of the pipe is chamfered at the location where the nozzle hole is located to form a flat surface with a mirror finish, and the substrate is brought into contact with the surface. An oil mask device that is configured to run along this path.