JPS6049411U - 空気圧式操作器の位置検出装置 - Google Patents

空気圧式操作器の位置検出装置

Info

Publication number
JPS6049411U
JPS6049411U JP14094983U JP14094983U JPS6049411U JP S6049411 U JPS6049411 U JP S6049411U JP 14094983 U JP14094983 U JP 14094983U JP 14094983 U JP14094983 U JP 14094983U JP S6049411 U JPS6049411 U JP S6049411U
Authority
JP
Japan
Prior art keywords
position detection
detection device
springs
pneumatic actuators
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14094983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240481Y2 (enrdf_load_stackoverflow
Inventor
正治 中尾
則之 藤井
橋本　可男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP14094983U priority Critical patent/JPS6049411U/ja
Publication of JPS6049411U publication Critical patent/JPS6049411U/ja
Application granted granted Critical
Publication of JPH0240481Y2 publication Critical patent/JPH0240481Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP14094983U 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置 Granted JPS6049411U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14094983U JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14094983U JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Publications (2)

Publication Number Publication Date
JPS6049411U true JPS6049411U (ja) 1985-04-06
JPH0240481Y2 JPH0240481Y2 (enrdf_load_stackoverflow) 1990-10-29

Family

ID=30315390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14094983U Granted JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Country Status (1)

Country Link
JP (1) JPS6049411U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6196867B2 (ja) * 2013-10-01 2017-09-13 浜松ホトニクス株式会社 光学モジュール

Also Published As

Publication number Publication date
JPH0240481Y2 (enrdf_load_stackoverflow) 1990-10-29

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