JPS6049406U - 格子干渉計 - Google Patents

格子干渉計

Info

Publication number
JPS6049406U
JPS6049406U JP14187783U JP14187783U JPS6049406U JP S6049406 U JPS6049406 U JP S6049406U JP 14187783 U JP14187783 U JP 14187783U JP 14187783 U JP14187783 U JP 14187783U JP S6049406 U JPS6049406 U JP S6049406U
Authority
JP
Japan
Prior art keywords
optical path
reflecting mirror
light source
grating
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14187783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230723Y2 (enrdf_load_stackoverflow
Inventor
寛 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP14187783U priority Critical patent/JPS6049406U/ja
Publication of JPS6049406U publication Critical patent/JPS6049406U/ja
Application granted granted Critical
Publication of JPH0230723Y2 publication Critical patent/JPH0230723Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
JP14187783U 1983-09-13 1983-09-13 格子干渉計 Granted JPS6049406U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14187783U JPS6049406U (ja) 1983-09-13 1983-09-13 格子干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14187783U JPS6049406U (ja) 1983-09-13 1983-09-13 格子干渉計

Publications (2)

Publication Number Publication Date
JPS6049406U true JPS6049406U (ja) 1985-04-06
JPH0230723Y2 JPH0230723Y2 (enrdf_load_stackoverflow) 1990-08-20

Family

ID=30317185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14187783U Granted JPS6049406U (ja) 1983-09-13 1983-09-13 格子干渉計

Country Status (1)

Country Link
JP (1) JPS6049406U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0230723Y2 (enrdf_load_stackoverflow) 1990-08-20

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