JPS6047342A - 液体金属イオン源 - Google Patents
液体金属イオン源Info
- Publication number
- JPS6047342A JPS6047342A JP58153056A JP15305683A JPS6047342A JP S6047342 A JPS6047342 A JP S6047342A JP 58153056 A JP58153056 A JP 58153056A JP 15305683 A JP15305683 A JP 15305683A JP S6047342 A JPS6047342 A JP S6047342A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- emitter
- liquid metal
- extraction electrode
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001338 liquidmetal Inorganic materials 0.000 title claims description 37
- 238000000605 extraction Methods 0.000 claims description 57
- 150000002500 ions Chemical class 0.000 claims description 57
- 238000001816 cooling Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 description 25
- 239000010931 gold Substances 0.000 description 12
- 229910052737 gold Inorganic materials 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- -1 gold ion Chemical class 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58153056A JPS6047342A (ja) | 1983-08-24 | 1983-08-24 | 液体金属イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58153056A JPS6047342A (ja) | 1983-08-24 | 1983-08-24 | 液体金属イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6047342A true JPS6047342A (ja) | 1985-03-14 |
| JPH0160891B2 JPH0160891B2 (enrdf_load_stackoverflow) | 1989-12-26 |
Family
ID=15554011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58153056A Granted JPS6047342A (ja) | 1983-08-24 | 1983-08-24 | 液体金属イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047342A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012212655A (ja) * | 2011-03-23 | 2012-11-01 | Gigaphoton Inc | ターゲット供給装置及び極端紫外光生成装置 |
-
1983
- 1983-08-24 JP JP58153056A patent/JPS6047342A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012212655A (ja) * | 2011-03-23 | 2012-11-01 | Gigaphoton Inc | ターゲット供給装置及び極端紫外光生成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0160891B2 (enrdf_load_stackoverflow) | 1989-12-26 |
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